• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.37.3-37
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• 2001

The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.6
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• pp.64-69
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• 2016

Vehicle clutch measurement for disc cushion variation was developed for the production of high quality Dual clutch transmissions. The developed device is composed of load cells for load measurement and LVDT for measuring the distance variation measurement in cushion variation. The servo motor-driven electric press for flexible loads that was developed was controlled by a PC-based HMI system, LabVIEW, and the device was able to continuously record real time measurement data with the accuracies of ${\pm}0.1\;kgf$ load and ${\pm}5{\mu}m$ cushion amount, which is far above the requirements of commercial vehicle standards.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.3
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• pp.115-121
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• 2001

In micro automation technology, the concurrent realization of a high resolution and a large operating rage has been achieved by a dual actuator, usually called by piggy-back system, conventionally. But, because of its manufacturing cost, the complexity of control, and the limit of overall bandwidth, the contract-free and single servo actuators have been suggested with specific applications. In this paper, we suggest a novel non-contact surface actuator suing combination of the Lorentz force and the magnetized force, and discuss the actuating principles including an analytical approach. Differently from the existing planar system, an operating range of the suggested system can be expanded by an additional attachment of active elements. Therefore, it is estimated to be suitable for the next-generation moving system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.9
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• pp.663-670
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• 2003

As the micro-technologies in the high precision manufacturing processes are developed, the demand for micro actuating device is increasing. But, it is difficult to achieve high resolution and wide operating range simultaneously with the conventional actuating systems which are contacting and type of dual servo system. So, the contact-free surface actuators whose movers are suspended or levitated were proposed. These systems can be applied to high precision stages and alignment apparatuses. The suspended mover can be assumed to be rigid body, but the mover is a structure in this study, therefore the vibration caused during the operating process has a serious adverse effect on the performance and it is very important to identify the vibrational characteristics. In this paper, a contact-free surface actuator is modeled in finite element method and updated by using the experimental modal data. Finally, the static and dynamic characteristics of the finite element model are predicted and then discussed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.1004-1008
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• 2003

Near-filed optical storage using cantilever aperture tip is a promising way fer next generation optical data storage. To enhance the speed of reading and writing data, gap between tip and media should be controlled fast and precisely within near field region. In this paper, several PZT actuators are analyzed far constructing dual servo control algorithm: coarse actuators(stact. PZT, bimorph PZI) for media surface inclination and One actuator(film PZT) for media surface roughness. Dynamic analysis of stack PZT, bimorph PZT, and film PZT are performed through the frequency response. Based on the frequency response and mathematical model, fast analog controller is designed.

• Proceedings of the KIEE Conference
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• summer
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• pp.1034-1036
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• 2004

The most basic form of a direct-drive linear motor is the voice coil motor(VCM). The voice coil motor employs a stationary permanent magnet field assembly in conjunction with a moving coil winding assembly to produce a force proportional to the current applied to the coil. Voice coil motor provide motion capable of extremely fine position sensitivity, limited only by the feedback sensor used to close the control loop. This paper presents dual-servo voice coil motor for improvement of driving range and position resolution. The voice coil motor is a cylindrical shape to improve reliability of a nanoindenter.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.342-347
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• 2002

After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• Journal of the Institute of Convergence Signal Processing
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• v.10 no.1
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• pp.93-99
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• 2009

The fuzzy control, neural network and genetic algorithm(GA) are algorithms to make the intelligence of system more higher. In this paper, we optimized the fuzzy controller using a genetic algorithm for desire response. Also a compensated fuzzy controller has dual rules. One control rule used to decrease the overshoot and rise time occurring in transient response region and another fuzzy control rule use to decrease the steady state error and rapildy to converge at the convergence region. GA is necessary to optimal the exchange time of the two fuzzy control rule base. Fuzzy-GA controller have a process of reproduction, crossover and mutation and we experimented by hydraulic servo motor control system We could observe that compensated Fuzzy-GA controller have good control performance compare to the fuzzy control technique have two rule base table.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.103-112
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• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

• Proceedings of the KIEE Conference
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• 2001.11a
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• pp.65-68
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• 2001

본 연구에서는 코움 드라이브에 비해 구동력은 크고 평행 판 구동 방식에 비해서는 선형 특성이 우수하며 안정된 구동거리가 증가하는 특성을 갖는 새로운 정전력(electrostatic force) 구동 방식을 제안한다. 운동 전극과 고정 전극을 기울어지게 배치하여 전극 면에 평행한 정전력 $F_x$와 전극 면에 수직인 정전력 $F_y$의 합력 $F_e$ 방향으로 전극을 운동시킴으로써 정전력의 방향과 전극의 운동 방향을 일치시킨다. 제안된 구동방식의 정전력 모델을 이용한 해석 결과 코움 드라이브에 비해서는 구동력이 50 % 이상 크며 평행 판 구동에 비해서는 안정된 구동 거리가 10 - 30 % 이상 증가하는 구동 특성을 얻을 수 있었다. 제안된 구동방식을 이용하여 HDD의 트랙 방향 저장 밀도를 증가시키기 위한 듀얼스테이지 서보(dual-stage servo)에 사용 될 마이크로 액츄에이터 (microactuator)를 설계하고 SoG(Silicon on Glass) 공정을 이용하여 제작하였다.