• Title/Summary/Keyword: Dual-annealing

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Structure and Property Analysis of Nanoporous Low Dielectric Constant SiCOH Thin Films

  • Heo, Gyu-Yong;Lee, Mun-Ho;Lee, Si-U;Park, Yeong-Hui
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.05a
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    • pp.167-169
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    • 2009
  • We have carried out quantitative structure and property analysis of the nanoporous structures of low dielectric constant (low-k) carbon-doped silicon oxide (SiCOH) films, which were deposited with plasma enhanced chemical vapor deposition (PECVD) using vinyltrimethylsilane (VTMS), divinyldimethylsilane (DVDMS), and tetravinylsilane (TVS) as precursor and oxygen as an oxidant gas. We found that the SiCOH film using VTMS only showed well defined spherical nanopores within the film after thermal annealing at $450^{\circ}C$ for 4 h. The average pore radius of the generated nanopores within VTMS SiCOH film was 1.21 nm with narrow size distribution of 0.2. It was noted that thermally labile $C_{x}H_{y}$ phase and Si-$CH_3$ was removed to make nanopore within the film by thermal annealing. Consequently, this induced that decrease of average electron density from 387 to $321\;nm^{-3}$ with increasing annealing temperature up to $450^{\circ}C$ and taking a longer annealing time up to 4 h. However, the other SiCOH films showed featureless scattering profiles irrespective of annealing conditions and the decreases of electron density were smaller than VTMS SiCOH film. Because, with more vinyl groups are introduced in original precursor molecule, films contain more organic phase with less volatile characteristic due to the crosslinking of vinyl groups. Collectively, the presenting findings show that the organosilane containing vinyl group was quite effective to deposit SiCOH/$C_{x}H_{y}$ dual phase films, and post annealing has an important role on generation of pores with the SiCOH film.

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Effect of Prior Deformation on the Sliding Wear of Ultra-fine Grained Ferrite-Martensite Dual Phase Steel (초기 소성변형이 초미세 결정립 페라이트-마르텐사이트 이상조직 탄소강의 건식 미끄럼마멸 특성에 미치는 영향)

  • Park, J.K.;Yi, S.K.;Shin, D.H.;Kim, Y.S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2008.05a
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    • pp.521-524
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    • 2008
  • Effect of prior deformation on the sliding wear of the ultra-fine grained (UFG) ferrite-martensite dual phase (DP) steel was investigated. The UFG DP steel was fabricated by the ECAP and subsequent intercritical annealing. The steel was cold rolled before the wear test, and the effect of the prior deformation on the wear was examined. The wear tests were carried out at various loads against a bearing steel ball. The wear rate of the UFG DP steel that did not experience the prior deformation was higher than that of the coarse-grained (CG) DP steel, because of more severe surface shear deformation. The wear rate of the specimens with prior deformation was much higher than that of the specimen without prior deformation. The deformed CG DP specimen showed higher rate than the deformed UFG DP specimen, and the rate-variation of the CG DP steel was much bigger under the same test condition.

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A Study on Distributions of Boron Ions Implanted by Using B and BF2 Dual Implantations in Silicon

  • Jung, Won-Chae
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.3
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    • pp.120-125
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    • 2010
  • For the fabrication of PMOS and integrated semiconductor devices, B, $BF_2$ and dual elements with B and $BF_2$ can be implanted in silicon. 15 keV B ions were implanted in silicon at $7^{\circ}$ wafer tilt and a dose of $3.0{\times}10^{16}\;cm^{-2}$. 67 keV $BF_2$ ions were implanted in silicon at $7^{\circ}$ wafer tilt and a dose of $3.0{\times}10^{15}\;cm^{-2}$. For dual implantations, 67 keV $BF_2$ and 15keV B were carried out with two implantations with dose of $1.5{\times}10^{15}\;cm^{-2}$ instead of $3.0{\times}10^{15}\;cm^{-2}$, respectively. For the electrical activation, the implanted samples were annealed with rapid thermal annealing at $1,050^{\circ}C$ for 30 seconds. The implanted profiles were characterized by using secondary ion mass spectrometry in order to measure profiles. The implanted and annealed results show that concentration profiles for the ${BF_2}^+$ implant are shallower than those for a single $B^+$ and dual ($B^+$ and ${BF_2}^+$) implants in silicon. This effect was caused by the presence of fluorine which traps interstitial silicon and ${BF_2}^+$ implants have lower diffusion effect than a single and dual implantation cases. For the fabricated diodes, current-voltage (I-V) and capacitance-voltage (C-V) were also measured with HP curve tracer and C-V plotter. Electrical measurements showed that the dual implant had the best result in comparison with the other two cases for the turn on voltage characteristics.

Measurement of Material Properties for Miniature Stamping (미세 스탬핑용 박판소재의 물성치 측정)

  • Kim Y.S.;Shim H.B.
    • Transactions of Materials Processing
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    • v.15 no.3 s.84
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    • pp.247-254
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    • 2006
  • Rather than traditional manufacturing processes, miniature manufacturing processes usually require sophisticated equipments and characteristics of the processes of high cost and of low productivity. Contrarily, miniature stamping process can be realized in a low cost high productivity with relatively inexpensive equipments. In the meso scale, mechanical properties, especially work hardening characteristics, are discovered to be statically scattered and size dependent by intensive experimental and numerical investigations, which make the stamping process hard to apply to the miniature manufacturing. In this study, dual purpose experimental device that can be used for both miniature scale tensile test and miniature scale stamping by simple change of attachment has been developed. For the tensile test, the elongation has been measured with a combined use of a CCD camera and a linear encoder in order to account for the possibility of slippage between specimen and the grip and to ensure the accuracy of the measurement, while load has been measured with a load cell. To satisfy the required material properties for stamping, optimal annealing condition has been found by examining the microstructure of annealed specimen.

The Effects of Surface Oxidation Occurring during Delivery from an Annealing Furnace to a Water Bath on the Microstructure and Tensile Properties of TWIP Steel (소둔로에서 수욕으로 이송 중 발생한 표면 산화가 TWIP 강의 미세조직과 인장 성질에 미치는 영향)

  • Oh, Seon-Keun;Lee, Young-Kook
    • Journal of the Korean Society for Heat Treatment
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    • v.33 no.2
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    • pp.57-64
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    • 2020
  • In the present study, we investigated whether the surface oxidation of C-bearing TWIP steel ℃curs in the air during specimen delivery from an annealing furnace to a water bath and how the microstructure and tensile properties are influenced by surface oxidation. A cold-rolled Fe-18Mn-0.6 (wt%) steel was exposed in the air for 5 s after annealing at various temperatures (750℃, 850℃ and 1000℃) for 10 min in a vacuum, and then water-quenched. For comparison, another specimen, which had been quartz-sealed in a vacuum, was annealed at 1000℃ for 10 min and immediately water-quenched without exposure to air. The 750℃ and 850℃-annealed specimens and the quartz-sealed specimen showed a γ-austenite single phase in the entire specimen due to negligible surface oxidation. However, the 1000℃-annealed specimen exhibited a dual-phase microstructure consisting of ε-martensite and γ-austenite at the sub-surface due to decarburization. Whereas the specimens without decarburization revealed high elongations of 70-80%, the decarburized specimen exhibited a low elongation of ~40%, indicating premature failure due to cracking inside the decarburized layer with ε-martensite and γ-austenite.

Influence of Selective Oxidation Phenomena in CGLs on Galvanized Coating Defects Formation

  • Gong, Y.F.;Birosca, S.;Kim, Han S.;De Cooman, B.C.
    • Corrosion Science and Technology
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    • v.7 no.1
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    • pp.1-5
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    • 2008
  • The gas atmosphere in continuous annealing and galvanizing lines alters both composition and microstructure of the surface and sub-surface of sheet steel. The formation and morphology of the oxides of alloying elements in High Strength Interstitial Free (HS-IF), Dual Phase (DP) and Transformation-Induced Plasticity (TRIP) steels are strongly influenced by the furnace dew point, and the presence of specific oxide may result in surface defects and bare areas on galvanized sheet products. The present contribution reviews the progress made recently in understanding the selective formation of surface and subsurface oxides during annealing in hot dip galvanizing and conventional continuous annealing lines. It is believed that the surface and sub-surface composition and microstructure have a pronounced influence on galvanized sheet product surface quality. In the present study, it is shown that the understanding of the relevant phenomena requires a combination of precise laboratory-scale simulations of the relevant technological processes and the use of advanced surface analytical tools.

저탄소 2상조직강의 열처리공정 조건에 따른 기계적특성 변화

  • Kim, Hun-Dong;Park, Jin-Seong;Mun, Man-Bin
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2010.05a
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    • pp.40.1-40.1
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    • 2010
  • Recently high strength steel sheets with high formability for automotive parts have been being developed to meet the demands for passenger safety and weight reduction of car body. Among these high strength steels, dual-phase steels are regarded as one of the attractive steels due to their excellent mechanical properties including high strength and ductility. However, to be successfully applied to automotive parts they should be corrosion resistant enough to satisfy the required quality of car maker. This also requires their feasibility for galvannealed production including hot dip galvanizability. In this study has been placed on understanding the effects of heat-treatment(austenizing and isothermal treatment) on the microstructures and mechanical properties of a 0.06C-0.03Si-2.0Mn high strength steel for cold forming. The microstructure and phase distribution were examined with eth aids of SEM, EBSD, TEM etc.. Through the study the production of 590MPa grade DP GA steels with good formability and galvaniability were shown to be possible.

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Location Analysis for Emergency Medical Service Vehicle in Sub District Area

  • Nanthasamroeng, Natthapong
    • Industrial Engineering and Management Systems
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    • v.11 no.4
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    • pp.339-345
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    • 2012
  • This research aims to formulate a mathematical model and develop an algorithm for solving a location problem in emergency medical service vehicle parking. To find an optimal parking location which has the least risk score or risk priority number calculated from severity, occurrence, detection, and distance from parking location for emergency patients, data were collected from Pratoom sub-district Disaster Prevention and Mitigation Center from October 2010 to April 2011. The criteria of risk evaluation were modified from Automotive Industry Action Group's criteria. An adaptive simulated annealing algorithm with multiple cooling schedules called multi-agent simulated quenching (MASQ) is proposed for solving the problem in two schemes of algorithms including dual agent and triple agent quenching. The result showed that the solution obtained from both scheme of MASQ was better than the traditional solution. The best locations obtained from MASQ-dual agent quenching scheme was nodes #5 and #133. The risk score was reduced 61% from 6,022 to 2,371 points.

Development of High Performance Stainless Steel Powders

  • Schade, Christopher;Schaberl, John;Narasimhan, Kalathur S.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.169-170
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    • 2006
  • Advanced melting technology is now being employed in the manufacture of stainless steel powders. The new process currently includes electric arc furnace (EAF) technology in concert with Argon Oxygen Decarburization (AOD), High Performance Atomizing (HPA) and hydrogen annealing. The new high performance-processing route has allowed the more consistent production of existing products, and has allowed enhanced properties, such as improved green strength and green density. This paper will review these processing changes along with the potential new products that are being developed utilizing this technology. These include high strength stainless steels such as duplex and dual phase as well as stainless steel powders used in high temperature applications such as diesel filters and fuel cells.

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Effect of Martensite Fraction on the Tensile Properties of Dual-phase Steels Containing Micro-alloying Elements (미량합금 원소가 첨가된 2상 조직강의 인장 특성에 미치는 마르텐사이트 분율의 영향)

  • Lim, Hyeon-Seok;Kim, Ji-Yeon;Hwang, Byoungchul
    • Journal of the Korean Society for Heat Treatment
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    • v.30 no.3
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    • pp.106-112
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    • 2017
  • In this study dual-phase steels with different ferrite grain size and martensite fraction were fabricated by varying micro-alloying elements and intercritical anneling temperatures, and then the tensile properties were investigated in terms of yield and tensile strengths, elongation, and yield ratio. The addition of micro-alloying elements reduced ferrite grain size, and the increased intercritial transformation tempeature increased the martensite fracton. The tensile test results showed that yield and tensile strengths of all the steel specimens increased with increasing the martensite fraction. However, the elongation and yield ratio were differently changed according to variations in the morphology and carbon content of martensite, ferrite grain size, and precipitates resulting from the addition of micro-alloying elements and intercritical annealing.