• 제목/요약/키워드: Dry Film

검색결과 576건 처리시간 0.025초

유도 결합 BCl$_{3}$/Cl$_{2}$ 플라즈마내에서 Pt 박막의 건식 식각 (Dry etching of pt thin film in inductive coupled BCl$_{3}$/Cl$_{2}$ plasmas)

  • 김남훈;김창일;권광호;장의구
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 하계종합학술대회논문집
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    • pp.375-378
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    • 1998
  • Platinum thin film which hardly form volatile compounds with any reactive gas at normal process temperature was etched in inductive coupled BCl$_{3}$/Cl$_{2}$ plasma. The etch rate of platinum thin film increased with increasing Cl$_{2}$/(Cl$_{2}$ + BCl$_{3}$) ratio. That reasoned increasing of ion current density.

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Sol-Gel Processing for Preparation of Metal Oxide Films

  • Korobova Natalya;Soh, Dea-Wha
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.259-264
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    • 2000
  • Systematic research of metal alkoxide electrophoretic deposition has been developed. The formation mechanism of electrophoretic deposits has been offered. The structure study of dry and heat-treated electrophoretic deposits has been established. The concrete examples of one and bi-component oxide thin film formation were considered. The new approaches for thin film technology have developed on various substrates of different shapes and sizes. The correlation between thin film structure, mechanism of their formation, and physico-chemical properties has been determined.

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와이어-실린더형 습식 전기집진기의 수막 유무에 따른 집진 특성 비교 (Comparison of particle collection characteristics in a wire-cylindrical wet electrostatic precipitator with and without a water film)

  • 우창규;조원기;김학준;김용진;한방우
    • 한국입자에어로졸학회지
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    • 제14권4호
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    • pp.89-95
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    • 2018
  • People's environmental concerns for fine particles in Korea lead to the strong necessity of improving the performance of environmental control systems. Wet electrostatic precipitators (ESPs) are considered as one of the alternatives to overcome the limit of previous dry ESPs, the re-entrainment of collected particles during rapping and back corona problem for high electrical resistivity dusts etc. In this study, a wire-cylindrical ESP with a thin water film has been developed. Particle collection characteristics were compared in the ESP with operations of water film on and off. Particle collection efficiencies at various applied voltages as well as voltage-current curves were almost the same in the ESP with and without a water film. Particle collection performance for PM1.0, PM2.5 and PM10 in the wet ESP with a water film was constantly maintained with operation time even in the high dust loading environment. This results indicate that a uniform water film in our wet ESP was successfully formed with a very thin layer without any dry spot and therefore could continuously clean the collected particles on the inner wall of the ESP without any performance degradation.

한국인에 대한 누액 안정성 조사 (The stability of tear film for Korean)

  • 이성욱;심현석;장성주
    • 한국안광학회지
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    • 제6권2호
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    • pp.161-164
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    • 2001
  • 건안은 콘택트렌즈를 착용하는 대부분의 환자에게서 쉽게 나타날 수 있으며 방치해 두면 누액의 안정성이 줄어들고 누액의 찌꺼기, 점액이 점점 증가하면서 각막 얼룩이 형성되어 눈에 충혈, 건조감 등을 동반할 수 있다. 본 연구에서는 51명의 성인 남녀를 대상으로 건성안을 판단하기 위해 Schirmer test, TBUT, 순목 횟수 등을 조사하였다. 건성안 검사 방법 중 순목 횟수는 1분에 평균 19회였고 Schirmer test의 평균은 5분에 25mm이였으며, TBUT는 평균 7.1초로 나타났다. 이런 결과로 TBUT 검사치가 낮으면 순목 횟수가 증가하는 것으로 나타났다.

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멀칭 재료가 참깨재배토양의 생리성 및 종실수량에 미치는 영향 (Effects of Mulching Materials on Physical Properties of Soil and Grain Yield of Sesame)

  • 김욱한;홍병희
    • 한국작물학회지
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    • 제31권3호
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    • pp.260-269
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    • 1986
  • 멀칭방법이 토양물리성 개선 및 참깨의 수량증가에 미치는 효과를 구명하기 위하여 풍년깨 품종을 공시하고, 투명비닐, 흑색비닐, 짚을 멀칭 재료로 하여 시험하였으며, 출아율, 토양물리성, 근량, 잡초량, 증발산량 및 수양을 조사하였던 바, 그 결과를 요약하면 다음과 같다. 1. 전생육기간중 토양수분포텐셜의 변화양상은 처리간에 큰 차리가 없었으며, 무멀칭표준구에 비해 비닐멀칭구는 약 5.4%, 짚멀칭구는 약 2.8%의 수분보지효과가 있었다. 2. 최고지온은 표준구에 비해 투명비닐멀칭구에서 약 4$^{\circ}C$ 높았으며, 짚멀칭구에서는 약 7 $^{\circ}C$ 낮았다. 최저지온은 표준구에 비하여 투명비닐멀칭구에서 약 2 $^{\circ}C$높았고, 짚멀칭구에서 약 3$^{\circ}C$ 낮았다. 3. 생육초기에 투명비닐멀칭구의 토양수분포텐셜, 토양온도, 잡초율, 토양경도 및 토분통기능은 무멀칭표준구보다 양호했으며, 따라서 출아율도 높았다. 4. 생육후기에 토양경도는 무멀칭표준구에서 높았으며 짚멀칭구, 흑색비닐멀칭구, 투명비닐멀칭구의 순으로 낮았다. 공극률, 토양통기능 및 유수속도는 투명비닐멀칭구와 짚멀칭구에서 높은 경향이었다. 5. 총근양은 투명비닐멀칭구에서 많았으며, 흑색비닐멀칭구, 짚멀칭구, 무멀칭표준구의 순으로 감소하였다. 근양은 토심 10cm 이내에 높은 밀도로 분포하고 있으며, 토심이 깊어질수록 급격히 감소하였다. 6. 잡초양은 흑색비닐멀칭구에서 가장 적었으며 무멀칭표준구에서 가장 많았다. 7. 토양경도는 토양통기능( r=-.9439**), 투수속도( ${\gamma}$=-.8229*)와 부의 유의상관을 보이며, 토양통기능과 투수속도는 근양과 유의정상관을 보였고, 근량은 수량( r=-.7378*)과 유의적인 상관관계가 있었다. 8. 처리별 증발산양간에는 유의적인 차리가 없었으나, 투명비닐멀칭구가 다른 처리구에 비하여 높은 경향이었다.

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전치장경에 관한 X-선학적 연구 (ROENTGENOLOGIC INVESTIGATIONS FOR THE ANTERIOR TOOTH LENGTH)

  • 조원표
    • 치과방사선
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    • 제2권1호
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    • pp.53-57
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    • 1972
  • The author measured the length of crown, root and tooth on the films which was taken by intraoral bisecting technic with mesh plate on the films. The films were taken from the dry skulls, dentiform and patients who had to be removed their upper incisors and the other patients who adimitted for dental care. From this serial experiment the results was made as follows: 1. By using the film and mesh plate in the oral cavity, the real tooth length can be measured easily on the film surfaces. 2. It can be avoided the film distortion in the oral cavity when taking the film using the mesh plate and film together. 3. When measuring the film, length of crown was elongated and length of root was shortened. 4. When using the well-trained bisecting technic, the real tooth length can be measured directly on the intraoral film.

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얇은 열산화-질화막의 특성평가 (Evaluation of Characteristics of Oxidized Thin LPCVD-$Si_{3}N_{4}$ Film)

  • 구경완;조성길;홍봉식
    • 전자공학회논문지A
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    • 제29A권9호
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    • pp.29-35
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    • 1992
  • Dielectric thin film of N/O (Si$_{3}N_[4}/SIO_{2}$) for high density stacked dynamic-RAM cell was formed by LPCVD and oxidation(Dry & pyrogenic oxidation methods) of the top Si$_{3}N_[4}$ film. The thickness, structure and composition of this film were measured by ellipsometer, high frequency C-V meter, high resolution TEM, AES, and SIMS. The thickness limit of Si$_{3}N_[4}$ film in making thin N/O structure layer was 7nm. In this experiment, the film with thinner than 7nm was not thick enough as oxygen diffusion barrier, and oxygen punched through the film and interfacial oxidation occurred at the phase boundary between Si$_{3}N_[4}$ and polycrystalline silicon electrode.

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노지(露地) 및 P. E. film 피복하(被覆下)에서 제초시기(除草時期)와 기간(期間)이 땅콩의 생육(生育) 및 수량(收量)에 미치는 영향(影響) (Growth and Yield of Peanuts Affected by Weeding Time and Periods in Bare Soil and Under the P. E. film Mulch)

  • 강광희;이석순;이계홍;황형백;이상백;예병덕
    • 한국잡초학회지
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    • 제7권1호
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    • pp.52-57
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    • 1987
  • To know the effects of weeding periods (weeding from 12 days, 28 days and 42 days after seeding to harvest, and weeding from seeding to 14 days, 28 days and 42 days after seeding) and growing conditions such as transparent polyethylene film mulch (P.E. mulch) and bare soil on growth and yield of peanuts, "Yeongho-Tangkong" was planted on May 10, 1984. Under P.E. mulch, the number of weeds was higher, but the weed dry weight was lower than in bare soil by the middle of July. Sixty days after seedings, the length of main stems in weedy check plots was longer, but shoot dry weight was lower compared to weed free plot. In the correlation coefficients between weed dry weight and the shoot dry weight of peanut on July 14, the growth retardation of peanuts due to weeds was showed earlier under P.E. mulch than in bare soil. Shoot dry weight, shelling ratio, number of seeds per pod, 100 pod weight, and seed yield were higher under P.E, mulch compared to bare soil. But weed dry weight, length of branches, number of pod bearing branches, number of pods per square meters, and pod yield were similar between P.E. mulch and bare soil. Shoot dry weight of peanuts, length of branches, number of pod bearing branches, number of pods per square meters, pod yield, 100 pod weight, 100 seed weight, and seed yield in weed free plots from 28 days after seeding to harvest (28 DAS-Harvest) were higher compared to weed free plots from 42 DAS-Harvest. However, in the weed free plot from seeding to 42 days after seeding seed yield was lower than that of the continuous weeding plot due to lower number of pod bearing branches and number of pods per square meters. When weed was not controlled at the later growth stages of peanuts, reduction in seed yield due to weeds was greater in bare soil than that under P.E. mulch.

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4가지 건성안 분석방법(OQAS test, TBUT, Schirmer test, McMonnies test)의 비교 (Comparison Among the Four Examination Methods for Dry Eye (OQAS test, TBUT, Schirmer Test, McMonnies test))

  • 박창원;김효진
    • 한국안광학회지
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    • 제20권4호
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    • pp.519-526
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    • 2015
  • 목적: 객관적 검안기기인 OQAS (Optical Quality Analysis System)를 이용하여 눈물막의 불안정성에 따른 객관적 산란지수의 변화를 연속적으로 관찰하고, 이 측정값과 눈물막파괴시간, 쉬르머테스트 및 맥모니테스트와의 상관성을 알아보고자 하였다. 방법: 대학생 82명($21.51{\pm}3.97$세, 남45명, 여37명), 147안을 대상으로 눈물막파괴시간, 쉬르머테스트, 맥모니테스트를 실시하였고, OQAS의 연속 측정방법을 이용하여 순목 직후 15초 동안 매초간의 객관적 산란지수를 측정하였다. 결과: 정상안과 건성안 군의 객관적 산란지수(OSI value)는 각각 $2.13{\pm}1.16$$3.76{\pm}1.42$로 통계적으로 유의한 차이를 보였다(p<0.05). 모든 대상자는 측정 시간이 경과할수록 객관적 산란지수가 증가하였고, 순목 직후 매초 측정된 객관적 산란지수는 6초와 7초 사이에 변화량이 가장 크게 증가하였다(p<0.05). 객관적 산란지수 cut off 30%(sec.) 결과는 눈물막파괴시간(r = 0.855, p = 0.000), 맥모니테스트(r = -0.351, p = 0.003), 쉬르머테스트(r = 0.316, p = 0.012) 순으로 상관성이 있는 것으로 나타났다. 결론: OQAS의 연속측정 방법은 기존의 건성안 검사법과 상관성이 높았다. 객관적 산란지수를 이용한 OQAS 검사방법은 환자의 눈물막 상태를 객관적으로 평가하는데 유용하게 사용될 것으로 생각된다.

Thin Film Adhesion and Cutting Performance in Diamond-Coated Carbide Tools

  • Jong Hee Kim;Dae Young Jung;Hee Kap Oh
    • The Korean Journal of Ceramics
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    • 제3권2호
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    • pp.105-109
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    • 1997
  • The effects of surface conditions of the C-2 cemented carbide substrate on the adhesion of diamond film were investigated. The substrates were pretreated for different times with Murakami's reagent and then the acid solution of an H2SO4-H2O2. The adhesion strength was estimated by a peeling area around the Rockwell-A indentation. The cutting performance of the diamond-coated tools was evaluated by measuring flank wears in dry turning of Al-17% Si alloy. The morphology of deposited diamond crystallites was dominated by (111) and (220) surfaces with a cubooctahedral shape. The diamond film quality was hardly affected by the surface conditions of the substrate. The variation of tool life with longer substrate etching times resulted from a compromies between the increase of film adhesion at the interface and the decrease of toughness at the substrate surface. The coated tools were mainly deteriorated by chipping and flaking of the diamond film form a lock of adhesion strength, differently from the wear phenomena of PCD tools.

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