한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 하계학술대회 논문집
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- Pages.259-264
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- 2000
Sol-Gel Processing for Preparation of Metal Oxide Films
- Korobova Natalya (School of electronics Information & Comunication Eng., Myongji University) ;
- Soh, Dea-Wha (School of electronics Information & Comunication Eng., Myongji University)
- 발행 : 2000.07.01
초록
Systematic research of metal alkoxide electrophoretic deposition has been developed. The formation mechanism of electrophoretic deposits has been offered. The structure study of dry and heat-treated electrophoretic deposits has been established. The concrete examples of one and bi-component oxide thin film formation were considered. The new approaches for thin film technology have developed on various substrates of different shapes and sizes. The correlation between thin film structure, mechanism of their formation, and physico-chemical properties has been determined.
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