• Title/Summary/Keyword: Droplet Velocity

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Uniformity Prediction of Mist-CVD Ga2O3 Thin Film using Particle Tracking Methodology (입자추적 유동해석을 이용한 초음파분무화학기상증착 균일도 예측 연구)

  • Ha, Joohwan;Park, Sodam;Lee, Hakji;Shin, Seokyoon;Byun, Changwoo
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.3
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    • pp.101-104
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    • 2022
  • Mist-CVD is known to have advantages of low cost and high productivity compared to ALD and PECVD methods. It is capable of reacting to the substrate by misting an aqueous solution using ultrasonic waves under vacuum-free conditions of atmospheric pressure. In particular, Ga2O3 is regarded as advanced power semiconductor material because of its high quality of transmittance, and excellent electrical conductivity through N-type doping. In this study, Computational Fluid Dynamics were used to predict the uniformity of the thin film on a large-area substrate. And also the deposition pattern and uniformity were analyzed using the flow velocity and particle tracking method. The uniformity was confirmed by quantifying the deposition cross section with an FIB-SEM, and the consistency of the uniformity prediction was secured through the analysis of the CFD distribution. With the analysis and experimental results, the match rate of deposition area was 80.14% and the match rate of deposition thickness was 55.32%. As the experimental and analysis results were consistent, it was confirmed that it is possible to predict the deposition thickness uniformity of Mist-CVD.

Experimental Study of Overtopping Void Ratio by Wave Breaking (쇄파에 의한 월파의 기포분율에 대한 실험적 연구)

  • Ryu, Yong-Uk;Lee, Jong-In
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.20 no.2
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    • pp.157-167
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    • 2008
  • The aeration of an overtopping wave on a vertical structure generated by a plunging wave was investigated through laboratory measurements of void fraction. The overtopping wave occurring after wave breaking becomes multi-phased and turbulent with significant aeration, so that the void fraction of the flow is of importance. In this study, fiber optic reflectometer and bubble image velocimetry were employed to measure the void fraction, velocity, and layer thickness of the overtopping flow. Mean properties were obtained by ensembleand time-averaging the repeated instantaneous void fractions and velocities. The mean void fractions show that the overtopping wave is very high-aerated near the overtopping wave front and relatively low-aerated near the deck surface and rear free surface of the wave. The flow rate and momentum of the overtopping flow estimated using the measured data show that the void ratio is an important parameter to consider in the multiphase flow. From the similarity profiles of the depth-averaged void fraction, velocity, and layer thickness, one-dimensional empirical equations were obtained and used to estimate the flow rate and momentum of the overtopping flow.

Cumulative Distributions and Flow Structure of Two-Passage Shear Coaxial Injector with Various Gas Injection Ratio (2중 유로형 전단 동축 분사기의 기체 분사율에 따른 유동 및 입도분포)

  • Lee, Inchul;Kim, Dohun;Koo, Jaye
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.37 no.7
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    • pp.675-682
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    • 2013
  • To verify the effect of inner- and outer-stage gas jets, a shear coaxial injector was designed to analyze the axial velocity profile and breakup phenomenon with an increase in the measurement distance. When the measurement position was increased to Z/d=100, the axial flow showed a fully developed shape due to the momentum transfer, aerodynamic drag effect, and viscous mixing. An inner gas injection, which induces a higher momentum flux ratio near the nozzle, produces the greater shear force on atomization than an outer gas injection. Inner- and Outer-stage gas injection do not affect the mixing between the inner and outer gas flow below Z/d=5. The experiment results showed that the main effect of liquid jet breakup was governed by the gas jet of an inner stage. As the nozzle exit of the outer-stage was located far from the liquid column, shear force and turbulence breaking up of the liquid jets do not fully affect the liquid column. In the case of an inner-stage gas injection momentum flux ratio within 0.84, with the increase in the outer gas momentum flux ratio, the SMD decreases. However, at an inner-stage gas jet momentum flux ratio over 1.38, the SMD shows the similar distribution.

Effect of Major Factors on the Spray Characteristics of Ultrasonic Atomizing Nozzle (초음파 미립화 노즐의 분무 특성에 미치는 주요 인자의 영향)

  • Jeong, Seon Yong;Lee, Kye Bock
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.6
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    • pp.1-7
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    • 2017
  • The atomization of a liquid into multiple droplets has many important industrial applications, including the atomization of fuels in combustion processes and coating of surfaces and particles. Ultrasonic atomizing nozzle has a transducer that receives electrical input in the form of a high frequency signal from a power generator and converts that into mechanical energy at the same frequency. Liquid is atomized into a fine mist spray using high frequency sound vibrations. In coating applications, the unpressurized, low-velocity spray reduces the amount of overspray significantly because the droplets tend to settle on the substrate, rather than bouncing off it. The spray can be controlled and shaped precisely by entraining the slow-moving spray in an ancillary air stream using specialized types of spray-shaping equipment. The desired patterns of spray can be obtained using an air stream. To simulate the water mist behavior of an ultrasonic atomizing nozzle using an air stream, the Lagrangian dispersed phase model was employed using the commercial code FLUENT. The effects of the nozzle contraction shape, water droplet size and the pneumatic pressure drop on the spray characteristics were investigated to obtain the optimal condition for coating applications.

For High Aspect Ratio of Conductive Line by Using Alignment System in Micro Patterning of Inkjet Industry (화상정렬 시스템을 이용한 잉크젯 반복인쇄기술)

  • Park, Jae-Chan;Park, Sung-Jun;Seo, Shang-Hoon;Joung, Jae-Woo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.154-154
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    • 2006
  • Samsung Electro Mechanics ink jet has developed ultra high resolution alignment system. The alignment system has been developed for repeatable printing of conductive ink. The resolution of alignment system is 0.5um and the velocity of printing working plate is 1.5m/s. So far repeated printing results included sintering process have over 30um of drop mislocation data. In order to improve line thickness and conductivity of metal line, we need to develop the higher mechanical accurate align system. On the demand, this developed align system has under $1{\sim}2{\mu}m$ mispositioning performance and can measure of mechanical accuracy of inkjet printer, as well as the straightness of jetted drop from inkjet head. There is no kinds limit of substrate and ink to use SEM alignment system. By using this alignment system, we progress two experiment of reiterate printing drop and making conductive line on the glass and photo paper. Optical microscope and 3D profiler has been used for measurement of printed ink.

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Study on Three-Dimensional Analysis of Agricultural Plants and Drone-Spray Pesticide (농작물을 위한 드론 분무 농약 살포의 3차원 분석에 관한 연구)

  • Moon, In Sik;Kown, Hyun Jin;Kim, Mi Hyeon;Chang, Se Myong;Ra, In Ho;Kim, Heung Tae
    • Smart Media Journal
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    • v.9 no.4
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    • pp.176-186
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    • 2020
  • The size and shape of crops are diverse, and the growing environment is also different. Therefore, when one uses a drone to spray pesticides, the characteristics of each crop must be considered, and flight conditions such as the flight height and forwarding velocity of the drone should be changed. The droplet flow of pesticides is affected by various flight conditions, and a large change occurs in the sprayed area. As a result, an uneven distribution of liquid may be formed at the wake, and the transport efficiency will be decreased as well as there would be a risk of toxic scatter. Therefore, this paper analyzes the degree of distribution of pesticides to the crops through numerical analysis when pesticide is sprayed onto the selected three crops with different characteristics by using agricultural drones with different flight conditions. On the purpose of establishing a guideline for spraying pesticides using a drone in accordance with the characteristics of crops, this paper compares the amount of pesticides distributed in the crops at the wake of nozzle flow using the figure of merit, and the sum of transported liquid rate divided by the root mean square of the probability density function.

Water droplet generation technique for 3D water drop sculptures (3차원 물방울 조각 생성장치의 구현을 위한 물방울 생성기법)

  • Lin, Long-Chun;Park, Yeon-yong;Jung, Moon Ryul
    • Journal of the Korea Computer Graphics Society
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    • v.25 no.3
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    • pp.143-152
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    • 2019
  • This paper presents two new techniques for solving the two problems of the water curtain: 'shape distortion' caused by gravity and 'resolution degradation' caused by fine satellite droplets around the shape. In the first method, when the user converts a three-dimensional model to a vertical sequence of slices, the slices are evenly spaced. The method is to adjust the time points at which the equi-distance slices are created by the nozzle array. In this method, even if the velocity of a water drop increases with time by gravity, the water drop slices maintain the equal interval at the moment of forming the whole shape, thereby preventing distortion. The second method is called the minimum time interval technique. The minimum time interval is the time between the open command of a nozzle and the next open command of the nozzle, so that consecutive water drops are clearly created without satellite drops. When the user converts a three-dimensional model to a sequence of slices, the slices are defined as close as possible, not evenly spaced, considering the minimum time interval of consecutive drops. The slices are arranged in short intervals in the top area of the shape, and the slices are arranged in long intervals in the bottom area of the shape. The minimum time interval is pre-determined by an experiment, and consists of the time from the open command of the nozzle to the time at which the nozzle is fully open, and the time in which the fully open state is maintained, and the time from the close command to the time at which the nozzle is fully closed. The second method produces water drop sculptures with higher resolution than does the first method.