Uniformity Prediction of Mist-CVD Ga2O3 Thin Film using Particle Tracking Methodology |
Ha, Joohwan
(Research Center for Materials, Components and Equipment, Gyeonggi Province, Advanced Institute of Convergence Technology, Seoul National University)
Park, Sodam (Research Center for Materials, Components and Equipment, Gyeonggi Province, Advanced Institute of Convergence Technology, Seoul National University) Lee, Hakji (Research Center for Materials, Components and Equipment, Gyeonggi Province, Advanced Institute of Convergence Technology, Seoul National University) Shin, Seokyoon (Advanced Electronic Materials Laboratory, Advanced Institute of Convergence Technology, Seoul National University) Byun, Changwoo (Research Center for Materials, Components and Equipment, Gyeonggi Province, Advanced Institute of Convergence Technology, Seoul National University) |
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