• Laser Solutions
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• v.14 no.4
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• pp.14-20
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• 2011

The advantage of using lasers for through silicon via (TSV) drilling is that they allow higher flexibility during manufacturing because vacuums, lithography, and masks are not required; furthermore, the lasers can be applied to metal and dielectric layers other than silicon. However, conventional nanosecond lasers have disadvantages including that they can cause heat affection around the target area. In contrast, the use of a picosecond laser enables the precise generation of TSVs with a smaller heat affected zone. In this study, a comparison of the thermal and crystallographic defect around laser-drilled holes when using a picosecond laser beam with varing a fluence and repetition rate was conducted. Notably, the higher fluence and repetition rate picosecond laser process increased the experimentally recast layer, surface debris, and dislocation around the hole better than the high fluence and repetition rate. These findings suggest that even the picosecond laser has a heat accumulation effect under high fluence and short pulse interval conditions. To eliminate these defects under the high speed process, the CDE (chemical downstream etching) process was employed and it can prove the possibility to applicate to the TSV industry.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.235-236
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• 2010

• Korean Journal of Optics and Photonics
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• v.1 no.1
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• pp.98-106
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• 1990

Lasers are used increasingly for specialized engineering applications such as drilling, profile cutting, welding and surface heat-treatment(hardening, alloying, annealing0 of metals and non-metals. The most important characteristics of lasers used for these materials-processing applications are reviewed, with special emphasis on the importance of the controlled heating process. In addition to these processes, some optical devices and supplementary equipment used in laser processing are introduced. Finally, some examples shows the wide variety of laser capability for substitution of traditional materials processing.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.50-56
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• 2007

Femtosecond laser ablation of the Invar alloy and hole drilling for a shadow mask are studied. We used a regenerative amplified Ti-sapphire laser with a 1kHz repetition rate, 184fs pulse duration and 785nm wavelength. Femtosecond laser pulse was irradiated on the Invar alloy with air blowing at the condition of various laser peak power. An ablation characteristic of the Invar alloy was appeared non-linear at $125J/cm^2$ of energy fluence. For the application to a shadow mask, the hole drilling of the Invar alloy with the cross section of a trapezoidal shape was investigated. The ablated micro-holes were characterized using an atomic force microscopy(AFM). The optimal condition of hole pattern f3r a shadow mask was $4\;{\mu}m$ z-axis feed rate, 0.2mm/s circular velocity, $26.4{\mu}J$ laser peak power. With the optimal processing condition, the fine circular hole shape without burr and thermal damage was achieved. Using the femtoseocond laser system, it demonstrates excellent tool for the Invar alloy micro-hole drilling without heat effects and poor edge.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.6
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• pp.77-82
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• 2016

When drilling through Inconel 601 nickel-chromium-based alloys, a large amount of cutting oil is required to prevent tools from wear and fracturing due to heat buildup resulting from the high temperature resistance and toughness of this alloy. However, cutting oil supply has become a factor compromising the machining environment, and this has caused attention to shift to a more environmentally friendly cutting fluid supply system called minimum quantity lubrication (MQL). Our aim in this study was to find a more efficient drill processing method using MQL, and to verify its performance. To that end, we proposed a sealed cover, a step feed, and POSS-type cutting oil as measures to increase the effectiveness of MQL in view of the cutting force and tool wear, and established an improvement in efficiency using the proposed measures.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.9
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• pp.1-11
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• 2022

Recently, there has been continuous technological development in the semiconductor industry, and semiconductor manufacturing technologies are being advanced and highly integrated. For this reason, ceramic material having excellent heat resistance, wear resistance, and conductivity are used as components in semiconductor manufacturing. Among them, the probe card's space transformer is used as ceramic material to prevent electronic signal noise during the electrical die sorting of semiconductor function testing. However, implementing a bulk-type space transformer with a thickness of 5.6 mm or more is challenging, and thus it is produced in a structure with a stacked ceramic film. The stacked space transformer has low productivity because it is difficult to ensure hole clogging and a precise shape. In this research, an ultrasonic horn is designed to manufacture a bulk-type ceramic space transformer through ultrasonic drilling. Vibration characteristics were analyzed according to the ultrasonic horn, and the natural frequency was measured.

• Korea-Australia Rheology Journal
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• v.19 no.4
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• pp.183-190
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• 2007

Injection molding is one of the most common operations in polymer processing. Good quality products are usually obtained and major post-processing treatment is not required. However, residual stresses which exist in plastic parts affect the final shape and mechanical properties after ejection. Residual stresses are caused by polymer melt flow, pressure distribution, non-uniform temperature field, and density distribution. Residual stresses are predicted in this study by numerical methods using commercially available softwares, $Hypermesh^{TM},\;Moldflow^{TM}\;and\;ABAQUS^{TM}$. Cavity filling, packing, and cooling stages are simulated to predict residual stress field right after ejection by assuming an isotropic elastic solid. Thermo-viscoelastic stress analysis is carried out to predict deformation and residual stress distribution after annealing of the part. Residual stresses are measured by the hole drilling method because the automotive part selected in this study has a complex shape. Residual stress distribution predicted by the thermal stress analysis is compared with the measurement results obtained by the hole drilling method. The molded specimen has residual stress distribution in tension, compression, and tension from the surface to the center of the part. Viscoelastic deformation of the part is predicted during annealing and the deformed geometry is compared with that measured by a three dimensional scanner. The viscoelastic stress analysis with a thermal cycle will enable us to predict long term behavior of the injection molded polymeric parts.

• Journal of Ocean Engineering and Technology
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• v.16 no.6
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• pp.60-64
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• 2002

This paper describes the machining characteristics of the MoSi$_2$--based composites through the process of electric discharge drilling with various tubular electrodes. In addition to hardness characteristics, microstructures of Nb/MoSi$_2$laminate composites were evaluated from the variation of fabricating conditions, such as preparation temperature, applied pressure, and pressure holding time. MoSi$_2$-based composites have been developed in new materials for jet engines of supersonic-speed airplanes and gas turbines for high-temperature generators. These high performance engines may require new hard materials with high strength and high temperature-resistance. Also, with the exception of grinding, traditional machining methods are not applicable to these new materials. Electric discharge machining (EDM) is a thermal process that utilizes a spark discharge to melt a conductive material. The tool electrode is almost -unloaded, because there is n direct contact between the tool electrode and the work piece. By combining a non-conducting ceramic with more conducting ceramic, it was possible to raise the electrical conductivity. From experimental results, it was found that the lamination from Nb sheet and MoSi$_2$ powder was an excellent strategy to improve hardness characteristics of monolithic MoSi$_2$. However, interfacial reaction products, like (Nb, Mo)SiO$_2$and Nb$_2$Si$_3$formed at the interface of Nb/MoSi$_2$, and increased with fabricating temperature. MoSi$_2$composites, with which a hole drilling was not possible through the conventional machining process, enhanced the capacity of ED-drilling by adding MbSi$_2$, relative to that of SiC or ZrO$_2$reinforcements.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1517-1521
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• 2007

On this study, technical aspects were reviewed to drill a series of micro holes (${\phi}$0.10) over 200 within a few micron tolerance in diameter and position on the stainless steel material. Dedicated tools & jigs were designed and manufactured and optimum cutting conditions were found. On this micro hole drilling process, guide drill and step feeding were applied to help chip discharge, prevent drill breakage and finally improve the accuracy of positioning and roundness. The processing results indicated that most holes are distributed within a few micron tolerance in diameter and position intervals.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.3
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• pp.8-13
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• 2020

Carbon fiber-reinforced plastics (CFRPs) are extremely strong and light fiber-reinforced plastics containing carbon fibers. CFRPs can be expensive to produce, but are commonly used wherever high strength-to-weight ratio and rigidity are required, such as in the aerospace, automotive, and ship superstructure industries. In CFRP drilling, the tool performance greatly varies depending on the tool shapes, cutting conditions, and diamond coating. This study developed a new type of tungsten carbide drill with multi-blade edges to evaluate the surface quality of CFRP materials according to the coating thickness of diamond-coated drills. Experiments on tool wear, surface roughness, and burr formation were conducted. The bore exit quality of a 12 mμ -coated drill was better than that of a 6 mμ -coated drill. The superior effects of the 12 mμ -coated drill and the good surface quality of CFRP were also demonstrated.