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http://dx.doi.org/10.14775/ksmpe.2022.21.09.001

Optimal Design of Ultrasonic Horn for Ultrasonic Drilling Processing of Ceramic Material  

Cha, Seung-hwan (School of Mechanical Engineering, KUMOH UNIV.)
Yang, Dong-ho (School of Mechanical Engineering, KUMOH UNIV.)
Lee, Sang-hyeop (School of Mechanical Engineering, KUMOH UNIV.)
Lee, Jong-Chan (School of Mechanical Engineering, KUMOH UNIV.)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.21, no.9, 2022 , pp. 1-11 More about this Journal
Abstract
Recently, there has been continuous technological development in the semiconductor industry, and semiconductor manufacturing technologies are being advanced and highly integrated. For this reason, ceramic material having excellent heat resistance, wear resistance, and conductivity are used as components in semiconductor manufacturing. Among them, the probe card's space transformer is used as ceramic material to prevent electronic signal noise during the electrical die sorting of semiconductor function testing. However, implementing a bulk-type space transformer with a thickness of 5.6 mm or more is challenging, and thus it is produced in a structure with a stacked ceramic film. The stacked space transformer has low productivity because it is difficult to ensure hole clogging and a precise shape. In this research, an ultrasonic horn is designed to manufacture a bulk-type ceramic space transformer through ultrasonic drilling. Vibration characteristics were analyzed according to the ultrasonic horn, and the natural frequency was measured.
Keywords
Ultrasonic Drilling; Ultrasonic Horn; Natural Frequency; Deformation; Resonance;
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