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Optimal Design of Ultrasonic Horn for Ultrasonic Drilling Processing of Ceramic Material

세라믹 소재 초음파 드릴링 가공을 위한 초음파 Horn의 최적 설계에 관한 연구

  • 차승환 (금오공과대학교 기계공학과) ;
  • 양동호 (금오공과대학교 기계공학과) ;
  • 이상협 (금오공과대학교 기계공학과) ;
  • 이종찬 (금오공과대학교 기계공학과)
  • Received : 2022.07.12
  • Accepted : 2022.08.17
  • Published : 2022.09.30

Abstract

Recently, there has been continuous technological development in the semiconductor industry, and semiconductor manufacturing technologies are being advanced and highly integrated. For this reason, ceramic material having excellent heat resistance, wear resistance, and conductivity are used as components in semiconductor manufacturing. Among them, the probe card's space transformer is used as ceramic material to prevent electronic signal noise during the electrical die sorting of semiconductor function testing. However, implementing a bulk-type space transformer with a thickness of 5.6 mm or more is challenging, and thus it is produced in a structure with a stacked ceramic film. The stacked space transformer has low productivity because it is difficult to ensure hole clogging and a precise shape. In this research, an ultrasonic horn is designed to manufacture a bulk-type ceramic space transformer through ultrasonic drilling. Vibration characteristics were analyzed according to the ultrasonic horn, and the natural frequency was measured.

Keywords

Acknowledgement

본 연구는 금오공과대학교 학술연구비를 지원받아 수행되었습니다. 관계자 여러분께 감사드립니다.

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