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Femtosecond Pulsed Laser Ablation of OLED Shadow Mask Invar Alloy  

Chung, Il-Young (인하대학교 기계공학과 대학원)
Kang, Kyung-Ho (인하대학교 기계공학과 대학원)
Kim, Jae-Do (인하대학교 기계공학과)
Sohn, Ik-Bu (광주과학기술원 고등광기술연구소)
Noh, Young-Chul (광주과학기술원 고등광기술연구소)
Lee, Jong-Min (광주과학기술원 고등광기술연구소)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.12, 2007 , pp. 50-56 More about this Journal
Abstract
Femtosecond laser ablation of the Invar alloy and hole drilling for a shadow mask are studied. We used a regenerative amplified Ti-sapphire laser with a 1kHz repetition rate, 184fs pulse duration and 785nm wavelength. Femtosecond laser pulse was irradiated on the Invar alloy with air blowing at the condition of various laser peak power. An ablation characteristic of the Invar alloy was appeared non-linear at $125J/cm^2$ of energy fluence. For the application to a shadow mask, the hole drilling of the Invar alloy with the cross section of a trapezoidal shape was investigated. The ablated micro-holes were characterized using an atomic force microscopy(AFM). The optimal condition of hole pattern f3r a shadow mask was $4\;{\mu}m$ z-axis feed rate, 0.2mm/s circular velocity, $26.4{\mu}J$ laser peak power. With the optimal processing condition, the fine circular hole shape without burr and thermal damage was achieved. Using the femtoseocond laser system, it demonstrates excellent tool for the Invar alloy micro-hole drilling without heat effects and poor edge.
Keywords
Shadow mask; Invar alloy; Femtosecond laser; Laser ablation; Energy fluence;
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Times Cited By KSCI : 1  (Citation Analysis)
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