• Title/Summary/Keyword: Discharge Mechanism

Search Result 337, Processing Time 0.027 seconds

Study of silicon deep via etching mechanism using in-situ temperature monitoring of silicon exposed to $SF_6/O_2$ plasma discharge

  • Im, Yeong-Dae;Lee, Seung-Hwan;Yu, Won-Jong;Jeong, Oh-Jin;Lee, Han-Chun
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2009.10a
    • /
    • pp.116-117
    • /
    • 2009
  • 식각 공정변화 즉 상부 ICP 파워, 반응기 압력, 실리콘 기판 온도변화에 따른 실리콘 딥 비어 (deep via) 의 형상 변화 메커니즘을 연구하였다. 메커니즘을 연구하기 위해 $SF_6/O_2$ 플라즈마에 노출된 실리콘 기판의 공정변화에 따른 표면 온도변화를 실시간으로 측정하여 플라즈마 내 positive ions의 거동을 분석하였다. 실리콘 기판의 표면온도를 상승시키는 주된 요인은 positive ions임을 확인할 수 있었으며 이는 기판에 적용된 negative voltage로 인하여 나타난 이온포격이 그 원인임을 알 수 있었다. 상대적으로 radical은 실리콘 표면온도 상승에 큰 역할을 하지 못하였다. 기판 표면온도가 상승 할수록 실리콘 딥 비어 구조에 undercut, local bowing과 같은 측벽 식각이 활성화됨을 확인할 수 있었으며 이는 기판에 들어오는 positive ions가 측벽식각을 유도하는 것으로 해석할 수 있었다.

  • PDF

Improved Adhesion of DLC Films by using a Nitriding Layer on AISI H13 Substrate

  • Park, Min-Seok;Kim, Dae-Young;Shin, Chang-Seouk;Kim, Wang Ryeol
    • Journal of the Korean institute of surface engineering
    • /
    • v.54 no.6
    • /
    • pp.307-314
    • /
    • 2021
  • Diamond-like carbon (DLC) is difficult to achieve sufficient adhesion because of weak bonding between DLC film and the substrate. The purpose of this study is to improve the adhesion between substrate and DLC film. DLC film was deposited on AISI H13 using linear ion source. To improve adhesion, the substrate was treated by dual post plasma nitriding. In order to define the mechanism of the improvement in adhesive strength, the gradient layer between substrate and DLC film was analyzed by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The microstructure of the DLC film was analyzed using a micro Raman spectrometer. Mechanical properties were measured by nano-indentation, micro vickers hardness tester and tribology tester. The characteristic of adhesion was observed by scratch test. The adhesion of the DLC film was enhanced by active screen plasma nitriding layer.

Observation of Rotational Cooling of CN($B^2{\Sigma}^+$) Radical Generated in a Supersonic Expansion

  • Lee, Sang-Kuk;Choi, Iek-Soon;Kim, Un-Sik
    • Bulletin of the Korean Chemical Society
    • /
    • v.15 no.5
    • /
    • pp.353-356
    • /
    • 1994
  • The $CN(B^2{\Sigma}^+)$ radical was produced in a jet using an electric dc discharge of the precursor $CH_3CN$ with inert carrier gases. The rotationally resolved Fourier transform emission spectra of the 0-0 band of the $(B^2{\Sigma}^+{\to}X^2{\Sigma}^+)$ transition of CN have exhibited different distribution of the intensity for the carrier gases He and Ar, respectively. From the analysis of intensity distribution in the spectra, the mechanism for rotational cooling process of CN radical in a supersonic expansion has been suggested.

Factors Associated with Radiologic Tests in Patients with Radial Head Subluxation (요골두아탈구 환자에서 방사선 검사 시행과 연관된 인자 분석)

  • Chang, Ikwan;Kim, Do Kyun;Park, So Young;Suh, Dongbum;Jung, Jae Yun;Kwak, Young Ho
    • Journal of Trauma and Injury
    • /
    • v.27 no.2
    • /
    • pp.13-19
    • /
    • 2014
  • Purpose: In general, X-ray examinations are not recommended for radial head subluxation (pulled elbow) patients. The purpose of this study was to determine the frequency of X-ray examinations and to investigate the factors associated with the decision to perform an X-ray examination on a patient with a pulled elbow. Methods: Patients who visited the pediatric emergency department (ED) of one tertiary hospital from January 1, 2011, to December 31, 2012, with a diagnosis of radial head subluxation at discharge were enrolled in this study. Through retrospective chart reviews, factors that could have influenced the decision to perform an X-ray examination and their statistical relevance were analyzed. Results: A total 308 patients were enrolled, and 101 patients (32.8%) underwent X-ray examinations. Among the 252 patients with a typical pulled elbow, 65 underwent X-ray examination. This result showed statistical significance compared to atypical pull-elbow group (25.8% vs. 64.3%, p<0.001). Factors associated with the decision to perform an X-ray examination were analyzed using the Chi-square test and the Fisher's exact test. The mechanism of injury and consultation with an orthopedic surgeon (p=0.001) showed statistical significance. In the multivariable logistic regression, the odds ratio (OR) for the injury mechanism was 4.7 (95% CI: 1.8~8.8, p<0.001) and that for consultation with an orthopedic surgeon was 8.0 (95% CI: 1.6~40.7, p=0.004). Conclusion: One third of patients with a pulled elbow underwent X-ray examination, and patients with an atypical mechanism of injury underwent more frequent X-ray examinations than did patients with a typical mechanism of injury. The factors that could have influenced the decision to perform an X-ray examination were mechanism of injury and consultation with an orthopedic surgeon.

Performance Estimation Based on 4D Lookup Table Interpolating and Unit Cell Discharge Tests for Thermal Battery (4D Lookup Table Interpolating을 이용한 단위 전지 방전 시험 기반 열전지 성능 예측)

  • Park, Byeong June;Kim, Ji Youn;Ha, Sang Hyeon;Cho, Jang Hyeon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.30 no.6
    • /
    • pp.393-400
    • /
    • 2017
  • For comparison to the Li-ion battery, evaluating a thermal battery must consider additional variables. The first one is the temperature difference between the battery and its unit cell. Thermal batteries and their unit cells have a temperature difference that is caused by the thermal battery activation mechanism and its shape. The second variable is the electrochemical reaction steps. Most Li-ion batteries have a constant electrochemical reaction at the electrode, and battery voltage is affected when the concentration of Li ions is changed. However, a thermal battery has several steps in its electrochemical reaction, and each step has a different potential. In this study, we used unit cell discharge tests based on interpolating a 4D lookup table to estimate the performance of a thermal battery. From the test results, we derived an estimation algorithm by interpolating the table, which is queried from specified profile groups. As a result, we found less than a 5 percent difference between estimation and experiment at the 1.3 V cut-off time.

Study on the design of LEO Satellite System in Space Plasma Environment (우주 플라즈마 환경에서 저궤도 위성 시스템 설계에 관한 고찰)

  • Lim, S.B.;Hong, S.P.;Kim, T.Y.;Jang, J.W.;Choi, S.W.
    • Aerospace Engineering and Technology
    • /
    • v.7 no.2
    • /
    • pp.67-75
    • /
    • 2008
  • The electrostatic charging/discharging mechanism and its effects, and the system design considerations in the space plasma environment are studied in this paper. The electrostatic discharge (ESD) effects are carefully taken into account for a design of the satellite system at the early stage of the development. Generally, the electrical design requirements are specified to protect the satellite system from the ESD effects in the electromagnetic compatibility specifications. Those requirements are included the grounding, the bonding, the shielding, the conductive coating, the electric interfacing and so on. The space charging is caused by the increasing of the voltage difference between the each locations on the satellite surface. If the space charging is continued up to threshold, it may be occurred the system failure. This phenomenon is depended on the mission of system, electrical and mechanical configuration, system operation, and orbit condition. Therefore the related requirements are properly tailored and concentrated into the safety design.

  • PDF

ESD Design and Analysis Tools for LEO SAT (저궤도 위성의 ESD 설계 및 해석도구)

  • Lim, Seong-Bin;Kim, Tae-Youn;Jang, Jae-Woong
    • Current Industrial and Technological Trends in Aerospace
    • /
    • v.7 no.1
    • /
    • pp.68-78
    • /
    • 2009
  • In this paper, the electrostatic charging and discharging mechanism, and its effects in space plasma environment are reviewed and the system design control documents, ESD analysis tools and modelling techniques, and the SPIS program in Europe are introduced. A design of the satellite system against the electrostatic discharge (ESD) effects in space plasma environments is carefully taken into account at the early stage of development. In a view of the space system design, it really depended on the mission of system, electrical and mechanical configuration, system operation, and orbit condition. Behavior of the electrons and the ions in those environments may be occurred the sever problem to the satellite operation. So it is carefully understood for implementation of the satellite system. By this reason, the space environments and its effects have been comprehensively studied in U.S.A and Europe.

  • PDF

An Analysis of Outflow Hydrograph Resulting from an Earth Dam-Break (Earth Dam의 파괴로 인한 유출수문곡선의 해석)

  • Han, Kun Yeun;Lee, Jong Tae;Lee, Won Hwan
    • KSCE Journal of Civil and Environmental Engineering Research
    • /
    • v.5 no.2
    • /
    • pp.41-50
    • /
    • 1985
  • The mathematical analysis of the outflow hydrograph resulting from earth dam-break was studied. DBFW(Dam Break Flood Wave) model based on the breach mechanism and reservoir storage equation was developed and was applied to the Teton and Buffalo-Creek dam. The modeling results showed that the shape of outflow hydrograph, peak discharge and failure duration time had a good agreement with the data analyzed by NWS. The breach mechanisms which exert influence on the outflow hydrograph were consisted of geomorphological characteristics of the reservoir, breach mode, breach width and failure duration time. The earth dams in Korea were classified into four types by the reservoir geomorphology, and water surface elevation-failure duration time-peak discharge relationships were also presented. The methodological procedure made in this paper will provide a basic contribution to dam-break study in river system.

  • PDF

A Study on the History and Meaning of Exterior Relief Methods using Pungent-cool Properties (신량해표(辛凉解表)의 역사와 의미에 대한 고찰)

  • Yun, Ki-ryoung;Baik, You sang;Jang, Woo-chang;Jeong, Chang-hyun
    • Journal of Korean Medical classics
    • /
    • v.33 no.1
    • /
    • pp.149-158
    • /
    • 2020
  • Objectives : This study aims to examine the exterior relief method through pungent-cool properties in comparison to pungent-warm properties historically, to understand the meaning of 'exterior relief through pungent-cool' more thoroughly. Methods : Contents mentioning the treatment method directly were examined historically, then analyzed. Results & Conclusions : The method to relieve the exterior through pungent-cool properties has developed by overcoming the limitations of the method to relieve the exterior through pungent-warm properties since it was first established in 『Shanghanzabinglun』(『傷寒雜病論』). The term 'relief of the exterior through pungent-coolness'(辛凉解表) was first mentioned in the Ming period, referring to weak level of perspiration. Yetianshi(葉天士) explained it as communicating Weiqi(衛氣) using pungent-cool medicinals for heat to discharge through the exterior, resulting in mild sweating. In 『Wenbingtiaobian』(『溫病條辨』) the term 'to relieve the flesh'(解肌) refers to both mild sweating through pungent-warm medicinals and the opening of the exterior through pungent-cool medicinals for pathogenic qi to exit, resulting in sweating. If the exterior relief of the pungent-warm medicinals happens through the warm Yang qi(陽氣) stimulated the inner Yin fluids(陰液) to discharge as sweat, that through pungent-cool medicinals relieves stagnation in the exterior, opening up a way for the pathogenic heat to exit. From the perspective of the main therapeutic mechanism for pungent-cool medicinals to be its coolness relieving heat, the term 'exterior relief through pungent-coolness' becomes erroneous. For the 'exterior relief through pungent-coolness' category to be valid, the meaning of 'exterior relief' needs to be expanded to include not only stimulated sweating but the treatment process that could result in sweating.

A Study on the Water Quality Relationship between Continuous Dam Discharge and Downstream in North Han River (북한강에 연속된 댐 구간 방류수와 하류 하천간 수질 관계 분석 연구)

  • Kim, Ji Won;Lee, Hye Won;Lee, Yong Seok;Choi, Jung Hyun
    • Journal of Korean Society on Water Environment
    • /
    • v.36 no.2
    • /
    • pp.89-97
    • /
    • 2020
  • North Han River is a very unique type of water system, where Hwacheon, Chuncheon, Soyanggang, Euiam and Cheongpyeong Dams are located consecutively. These dams are operated differently in the amount of discharge and release schedule according to their structure and purpose of use. They have different water quality characteristics depending on external pollutant inflow and internal mixing condition. Therefore, this study investigated the relationship between the upper dam and down stream river with respect to water quality indicators, such as water temperature, electrical conductivity, BOD, COD, TN and TP of the North Han River. The similarities and correlations representing the relationship were analyzed by Pearson's correlation r and t-test. The data was taken from the Ministry of Environment's water quality monitoring from 1999 to 2018. The results show that water temperature and electrical conductivity of the dam and river are similar and correlated. However, it turned out that there was no similarities and correlations in BOD, COD, TN and TP that are significantly affected by subaqueous reaction mechanism. The results of this study present the impact of the dam on the water quality of North Han River, which can be used as useful data for management of water quality.