• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.151-155
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• 1996

In this paper, the continuous motion of a quadrupedal walking machine was studied. The motion planning which is able a walking machine body to precisely follow a three-dimensional curve was developed. A three-dimensional curve was designed based on Bezier curve and obstacle avoidance considerations. Due to the arbitrary motion direction during walking, special strategies of gaits were developed to ensure positive stability. The gait strategies were based on wave and wave-crab gait.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.336-342
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• 1994

This paper presents an useful technique for assessing the volumetric error in multi_axis machine tools using the kinematic double ball bar and 3 dimensional spherical contouring. The developed system proposes the 3 dimensional spherical contour for the error analysis. The developed system input the measured radial data, analysing the volumetric errors such as positional, strightness, angle, and squareness errors, etc. The developed system has been tested in a practical machine tool, and showed high

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.485-489
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• 1995

From the relationship between the two different views of an object with grid, the three dimensional coordinates of intersection points are determined. The images are captured and digitized with a CCD camera and a frame grabber. To find intersection points, local thresholding and line thinning operations are performed. By establishing the correspondence between the points in the two views, the three dimensional corrdinates of intersection points are calculated.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1996년도 춘계학술대회 논문집
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• pp.47-51
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• 1996

Unsteady-state temperature distributions and thermal deformations of a spindle system are studied in this paper. Three dimensional model is built for analysis, and the amount of heat generation of bearing and the thermal characteristic values including heat transfer coefficient are estimated. Temperature distributions and thermal deformations of a model are analyzed using the finite element method and the termal boundary values. Numerical results are compared with the measured data. The results show that thermal deformations and temperature distributions of a high precision spindle system can be reasonably estimated using the three dimensional model and the finite element method.

• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.145-153
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• 1999

This study has been performed to investigate the stress distribution around defects that behave as stress concentrators and fracture mechanical analysis for cracks initiatiating at stress concentrators. The stress distribution was analyzed using Finite Element Method and non dimensional stress intensity factor was determined by the mean stress method. In addition, stress interaction effects around defects and cracks were compared.

• 한국정밀공학회지
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• 제13권12호
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• pp.120-128
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• 1996

An attempt is made to characterize and synthesize engineered surfaces. The proposed method is not only an analytical tool to characterize but also to generate/synthesize three-dimensional surfaces. The developed method expresses important engineered surface characteristics such as the autocorrelation or power spectrum density functions in terms of the two-dimensional autoregressive coefficients.

• 한국정밀공학회지
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• 제17권1호
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• International Journal of Precision Engineering and Manufacturing
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• 제6권4호
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• pp.14-20
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• 2005

In this paper, a new field of metrology called 'precision nanometrology' is presented. The 'precision nanometrology' is the result of evolutions of the traditional 'precision metrology' and the new 'nanometrology'. 'Precision nanometrology' is defined here as the science of dimensional measurement and motion measurement with 100 nm to 0.1 nm resolution/uncertainty within a range of micrometer to meter. The definition is based on the fact that nanometrology in nanoengineering and the precision industries, such as semiconductor industry, precision machine tool industry, precision instrument industry, is not only concerned with the measurement resolution and/or uncertainty but also the range of measurement. It should also be pointed out that most of the measurement objects in nanoengineering have dimensions larger than 1 micrometer. After explaining the definition of precision nanometrology, the paper provides several examples showing the critical roles of precision nanometrology in precision nanosystems, including nanometrology system, nanofabrication system, and nanomechatronics system.

• 한국정밀공학회지
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• 제22권1호
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• pp.115-121
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• 2005

Micromachines are extremely novel artifacts with a variety of special characteristics. Utilizing their tiny dimensions ranging roughly from 10 to $10^3$ micro-meters, the micromachines can perform tasks in a revolutionary manner that would be impossible for conventional artifacts. Micromachines are in general related to various coupled physical phenomena. They are required to be evaluated and designed considering the coupled phenomena. This paper describes finite element analysis (FEA) simulation of practical behaviors for the micro actuator. Especially, electric field modeling in micro actuators has been generally restricted to in-plane two-dimensional finite element analysis because of the complexity of the micro actuator geometry. However, in this paper, the actual three-dimensional geometry of the micro actuator is considered. The starting torque obtained from the in-plane two-dimensional analytical solutions were compared with that of the actual three-dimensional FE analysis results. The starting torque is proportional to $V^2$, and that the two-dimensional analytical solutions are larger than the three- dimensional FE ones. It is found that the evaluation of micro actuator has to be considered electrical leakage phenomenon.

• 한국정밀공학회지
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• 제23권2호
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• pp.181-190
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• 2006

In the industry, three-dimensional coloring has been needed for a realistic prototype. The Z-corporation developed a 3D printer which provides a three-dimensional colored prototype. However, the process cannot be adopted to models fabricated by other rapid prototyping processes. In addition, time and cost for manufacturing colored prototypes still remain to be improved. In this study, a new coloring process using an ink-jet head is proposed for color printing on a three-dimensional surface. Process parameters such as the angle and the distance between the ink-jet nozzle and the three-dimensional surface should be investigated through experiments. In order to minimize the distortion of a 2D image, the correction matrix according to the sloped angle is proposed and obtained by analysis of printing errors. An image on the doubly curved surface is printed so as to verify the proposed method. As a practical example, a helmet is chosen for printing images on the curved surface. The practical applicability of the correction matrix is then demonstrated by printing the character images on the surface of the helmet.