• 제목/요약/키워드: Diffusion Bonding

검색결과 266건 처리시간 0.026초

저온 Cu/Ag-Ag/Cu 본딩에서의 Ag 나노막 효과 (Effect of Ag Nanolayer in Low Temperature Cu/Ag-Ag/Cu Bonding)

  • 김윤호;박승민;김사라은경
    • 마이크로전자및패키징학회지
    • /
    • 제28권2호
    • /
    • pp.59-64
    • /
    • 2021
  • 차세대 반도체 기술은 이종소자 집적화(heterogeneous integration)를 이용한 시스템-인-패키징(system-inpackage, SIP) 기술로 발전하고 있고, 저온 Cu 본딩은 SIP 구조의 성능 향상과 미세 피치 배선을 위해서 매우 중요한 기술이라 하겠다. 본 연구에서는 porous한 Ag 나노막을 이용하여 Cu 표면의 산화 방지 효과와 저온 Cu 본딩의 가능성을 조사하였다. 100℃에서 200℃의 저온 영역에서 Ag가 Cu로 확산되는 것보다 Cu가 Ag로 확산되는 것이 빠르게 관찰되었고, 이는 저온에서 Ag를 이용한 Cu간의 고상 확산 본딩이 가능함을 나타내었다. 따라서 Ag 나노막을 이용한 Cu 본딩을 200℃에서 진행하였고, 본딩 계면의 전단 강도는 23.27 MPa로 측정되었다.

원심주조법에 의한 주철-Babbitt Metal 복합관 제조에 관한 연구 (A Study on the Fabrication of Cast Iron-Babbitt Metal Composite Pipes by Centrifugal Casting Process)

  • 이충도;강춘식
    • 한국주조공학회지
    • /
    • 제13권1호
    • /
    • pp.42-49
    • /
    • 1993
  • Conventional manufacturing process for cast iron-babbitt metal composite is complicate and bimetallic bonding by centrifugal casting is also difficult because their melting point is largely different and nonmetallic inclusion exists on outer shell. This study is aiming to simplify multistage process by adding Cu-powder as insert metals during cast iron solidification. The variables on fabrication of composite pipe are mold rotating speed and inner surface temperature of outer metal. The optimum temperature range for fusion bonding between cast iron and Cu-layer was $1100^{\circ}C-1140^{\circ}C$ in case of mold rotating speed was 700rpm. When the inner surface of Cu-layer was at $900^{\circ}C$, the value of interfacial hardness between Cu-layer and babbitt metal were higher than Cu-matrix by forming diffusion layer, interfacial products between Cu-layer and babbitt metal are proved to be $Cu_6Sn_5({\eta})$by XRD.

  • PDF

BONDING PHENOMENON IN TRANSIENT LIQUID PHASE BONDING OF NI BASE SUPERALLOY GTD-111

  • Kang, Chung-Yun;Kim, Dae-Up;Woo, In-Soo
    • 대한용접접합학회:학술대회논문집
    • /
    • 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
    • /
    • pp.798-802
    • /
    • 2002
  • Metallurgical studies on the bonded interlayer of directionally solidified Ni-base superalloy GTD111 joints were carried out during transient liquid phase bonding. The formation mechanism of solid during solidification process was also investigated. Microstructures at the bonded interlayer of joints were characterized with bonding temperature. In the bonding process held at 1403K, liquid insert metal was eliminated by well known mechanism of isothermal solidification process and formation of the solid from the liquid at the bonded interlayer were achieved by epitaxial growth. In addition, grain boundary formed at bonded interlayer is consistent with those of base metal. However, in the bonding process held at 1453K, extensive formation of the liquid phase was found to have taken place along dendrite boundaries and grain boundaries adjacent to bonded interlayer. Liquid phases were also observed at grain boundaries far from the bonding interface. This phenomenon results in liquation of grain boundaries. With prolonged holding, liquid phases decreased gradually and changed to isolated granules, but did not disappeared after holding for 7.2ks at 1473K. This isothermal solidification occurs by diffusion of Ti to be result in liquation. In addition, grain boundaries formed at bonded interlayer were corresponded with those of base metal. In the GTD-ll1 alloy, bonding mechanism differs with bonding temperature.

  • PDF

Characteristics of copper wire wedge bonding

  • Tian, Y.;Zhou, Y.;Mayer, M.;Won, S.J.;Lee, S.M.;Cho, S.Y.;Jung, J.P.
    • 대한용접접합학회:학술대회논문집
    • /
    • 대한용접접합학회 2005년도 춘계학술발표대회 개요집
    • /
    • pp.34-36
    • /
    • 2005
  • Copper wire bonding is an alternative interconnection technology that serves as a viable and cost saving alternative to gold wire bonding. In this paper, ultrasonic wedge bonding with $25{\mu}m$ copper wire on Au/Ni/Cu metallization of a PCB substrate was performed at ambient temperature. The central composite design of experiment (DOE) approach was applied to optimize the copper wire wedge bonding process parameters. After that, pull test of the wedge bond was performed to study the bond strength and to find the optimum bonding parameters. SEM was used to observe the cross section of the wedge bond. The pull test results show good performance of the wedge bond. Additionally, DOE results gave the optimized parameter for both the first bond and the second bond. Cross section analysis shows a continuous interconnection between the copper wire and Au/Ni/Cu metallization. The diffusion of Cu into the Au layer was also observed.

  • PDF

확산 접합된 오스테나이트계 재료의 인장특성에 미치는 후열처리의 영향 (The Effect of Post-Bond Heat Treatment on Tensile Property of Diffusion Bonded Austenitic Alloys)

  • 홍성훈;김성환;장창희;사인진
    • 대한기계학회논문집A
    • /
    • 제39권12호
    • /
    • pp.1221-1227
    • /
    • 2015
  • 미세유로채널 타입의 열교환기 제작에 필요한 과정 중 하나인 확산접합(Diffusion Bonding)에 대하여 연구를 수행하였다. 시험에 사된 재료는 Alloy 800HT, Alloy 690, 그리고 Alloy 600 으로 다양한 온도에서 확산접합을 수행하고 상온에서 $650^{\circ}C$ 까지 인장특성을 평가하였다. Alloy 800H 의 경우 든 온도에서 확산접합부의 연신율이 크게 저하되었다. Alloy 690 과 Alloy 600 의 경우 $500^{\circ}C$ 까지는 확산접합부도 높은 연신율을 보이나 $550^{\circ}C$ 이상에서는 연신율이 재에 비해 감소하였다. 이는 확산접합부에서의 불분한 결정립계 이동과 석출상에 의한 것으로 판단된다. 확산접합부의 인장 특성을 향상시키기 위해 후열처리를 수행한 경우 든 재료에 대해 $550^{\circ}C$ 까지 재 수준으로 연신율이 회복되었다. 이러한 확산접합부의 인장특성의 변화와 미세조직간의 연관성에 대해 토의하였다.