Characteristics of Oxynitride Dielectics Prepared in $N_2O$ Ambient by Furnace
(Furnace로 $N_2O$ 분위기에서 성장시킨 Oxynitride 절연막 특성)
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- Journal of the Korean Ceramic Society
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- v.32 no.1
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- pp.31-36
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- 1995