• 제목/요약/키워드: Die Structure

검색결과 350건 처리시간 0.025초

패턴 웨이퍼의 화학기계적 연마시 패턴 밀도의 영향과 모델링에 관한 연구 (A Study on the Effect of Pattern Density and it`s Modeling for ILD CMP)

  • 홍기식;김형재;정해도
    • 한국정밀공학회지
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    • 제19권1호
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    • pp.196-203
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    • 2002
  • Generally, non-uniformity and removal rate are important factors on measurements of both wafer and die scale. In this study, we verify the effects of the pressure and relative velocity on the results of the chemical mechanical polishing and the effect of pattern density on inter layer dielectric chemical mechanical polishing of patterned wafer. We suggest an appropriate modeling equation, transformed from Preston\`s equations which was used in glass polishing, and simulate the removal rate of patterned wafer in chemical mechanical polishing. Results indicate that the pressure and relative velocity are dominant factors for the chemical mechanical polishing and pattern density effects on removal rate of pattern wafers in die scale. The modeling is well agreed to middle and low density structures of the die. Actually, the die used in Fab. was designed to have an appropriate density, therefore the modeling will be suitable for estimating the results of ILD CMP.

반도체 소자용 자동 Die Bonder 기계장치의 개발 (Development of Die Bonder Machine for Semiconductor Automatic Assembly)

  • 변증남;윤명중;오상록;오영석;서일홍;안태영;권구빈;김제옥;김정덕
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1987년도 전기.전자공학 학술대회 논문집(I)
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    • pp.284-287
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    • 1987
  • In this paper, the design and implementation of a multiprocessor based Die Bonder Machine for the semiconductor will be described. This the partial research result, that is, the 1st year portion of the project to be performed for a period of two years from June, 1986 to May, 1988. The mechanical system consists of the following three subsystems : (i) transfer head unit, (ii) die feeding XY-table unit, and (iii) plunge up unit. The overall control system is designed to be essentially a master-slave type in which each slave is functionally fixed in view of software and also the time shared common bus structure with hardwired bus arbitration scheme is utilized, the control system consists of the following three subsystems each of which employs a 16 bits microprocessor MC 68000 : (i) die bonder processor controller, (ii) visual recognition/inspection and display system, (iii) the servo control system. It is reported that the proposed control system were applied to Working Sample and tested in real system, and the results are successful as a working sample phase.

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High Performance Gear Obtained by Die Warm Compaction and Rapid Cooling Process

  • Calero, J.A.
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.199-200
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    • 2006
  • PM recent developments focus on increasing this technology's competitiveness when compared to wrought materials. Warm compaction allows the replacement of a double press double sinter process with a single warm press and sintering step, thus allowing cost and time savings. Moreover there are added benefits to consider such as reducing work in process and lessening part's logistics cost. This paper presents a successful industrial trial to replace a double press-double sinter process with a warm die compaction and sintering process. The part chosen was a high performance gear containing 0,9% wt. carbon. Sintering was conducted in a belt furnace at $1120^{\circ}C$ in a nitrogen rich atmosphere with rapid cooling process in order to obtain a quasi fully martensitic structure with a minimum of 700HV0,1 and 450HV10 after annealing. The balance between properties and cost is favoured by the use of a singular lubricant developed in a Eureka frame project together with POMETON S.A. and die warm compaction. Warm compaction is only needed to be effective on the gear teeth, in order to achieve the required properties. Therefore only the die is actually heated. This simplified system avoids flow rate problems typically involved when using more elaborate warm compaction equipments.

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고강도 Al-Zn기 다이캐스팅 합금개발에 관한 연구 I (A Study of the Development of a High-Strength Al-Zn Based Alloy for Die Casting I)

  • 신상수;염길용;김억수;임경묵
    • 대한금속재료학회지
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    • 제48권10호
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    • pp.936-941
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    • 2010
  • Al-Zn based alloys are the most common types of wrought Al alloys. Although Al-Zn alloys have high strength, they cannot be applied to a conventional casting process. In this study, Al-Zn-based alloys applicable to a die casting process were developed successfully. The developed Al-45 wt% Zn-based alloys showed a fine equiaxed grain structure and high strength. A fine equiaxed grain having an average size of $25{\mu}m$ was obtained by the die casting process. The UTS and elongation of the new alloy are 475 MPa and ~3.5%, respectively. In addition, we elucidate the effect of a Zn addition on variations in different mechanical properties and the microstructure characteristics of (Al96.3-xZnxCu3Si0.4Fe0.3) x=20, 30, 40, and 45 wt% alloys fabricated by a die casting process.

마이크로 분말사출성형에서 바인더 물성이 피드스탁 및 성형공정에 미치는 영향에 관한 연구 (A study on the effect of binder properties on feedstock and micro powder injection molding process)

  • 이원식;김용대
    • Design & Manufacturing
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    • 제11권3호
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    • pp.1-7
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    • 2017
  • The fabrication process of micro pattern structure with high precision and high aspect ratio using powder injection molding (PIM) is developed. In the PIM process, the metal powder is mixed with the binder systems and the mixture is injected into the metal mold. The injection molded green parts are debinded and sintered to reach final shape and properties. In this method, the optimization of physical properties such as fluidity and strength of the binder system is essential for perfect filling the high aspect ratio micro-pattern. For this purpose, the correlation between the properties of the binder system and feedstock and ${\mu}-PIM$ process was investigated, and a binder system with low viscosity at low temperature(about $110^{\circ}C$) and high strength after cooling was investigated and applied. Employing this process, high precision parts with line type micro pattern structure which has pattern size $160{\mu}m$ and aspect ratio more than 2 can be manufactured.

마이크로 패턴 성형을 위한 인서트 코어 적용 µ-PIM 표준금형 개발에 관한 연구 (Development of µ-PIM standard mold with exchangable insert core in order to manufacture micro pattern)

  • 박치열;서찬열;김용대
    • Design & Manufacturing
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    • 제11권3호
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    • pp.29-34
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    • 2017
  • Increased demand for parts with micro-pattern structure made of metals, ceramics, and composites in various fields such as medical ultrasonic sensors, CT collimators, and ultra-small actuator parts. Micro powder injection molding (PIM) is a technology for manufacturing micro size, high volume, complex, precision, net-shape components from either metal or ceramic powder. In the present study, a standard mold with a variable insert core capable of producing various micro patterns was investigated. An injection molding test was performed on a standard mold using a line type micro-pattern core having an aspect ratio of 2, a slenderness ratio of 70, a pattern size of $200{\mu}m$, and a pattern spacing of $150{\mu}m$. During the filling process, the deformation of the mold with large aspect ratio and slenderness ratio was analyzed by the experiment and the numerical simulation according to the position of the gate. We proposed a mold structure that minimizes mold deformation by gate modification and enables uniform pattern filling behavior.

분말고속도공구강과 고속도공구강의 펀치 수명 비교 (Comparison of punch life of powder high speed tool steel and high speed tool steel)

  • 이우람;이춘규
    • Design & Manufacturing
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    • 제16권1호
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    • pp.9-14
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    • 2022
  • A lot of research is being done on metal materials to improve the lifespan of molded parts. As a result, excellent mold materials have been developed that withstand high hardness at high temperatures and frictional heat generated from high-speed cutting. In this study, the press mold life of powder high-speed tool steel and general high-speed tool steel was compared. Powdered high-speed steel is composed of alloying elements such as tungsten, maldividene, cobalt, chromium, and vanadium in steel, which improves wear resistance compared to high-hardness and high-speed tool steels. The mold parts of both steel types were manufactured in the same way from heat treatment to machining, and the powder high-speed tool steel was 66HRC and the high-speed tool steel was 61HRC. As a result of the experiment, it was observed that the number of punching of powder high-speed tool steel was improved by 40-50%, and powder high-speed tool steel had fewer impurities, uniform texture, and excellent surface structure. It has a microscopic structure.

프레스 박판 소재의 취급성 (Handling of Polyethylene Sheet Plate in Press Process)

  • 목학수;김경윤
    • 산업공학
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    • 제7권2호
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    • pp.145-155
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    • 1994
  • In this paper, we analyzed weak points of press process with the rolled thin flexible plate. The problems which are caused by the adhesion of blank on the surface of die and the separation of blank from scrap during its transportation after blanking were solved by the redesign of the structure of die and the development of special equipment for material handling. It is our purpose to make better the automation of blanking process and the safety for worker by the improvement of flexible material handling.

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엔진피스톤의 기계적 성질의 향상에 관한 연구 (A Study on the Improvement of Mechanical Properties for an Engine Piston)

  • 김영호;배원병;변흥석
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 추계학술대회 논문집
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    • pp.113-116
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    • 1995
  • In this experimental study,aluminum hotforging was conduct to get superior pistion to cast piston. Cast structure of billet is destroyed, harmful defects is removed by forging process. We proposed the direction od die design by observing formability of product according to die shape. The microstructure of forged products with different preform was investigated to determine inital billet shape. We proposed appropriate heat treatment condition for improvement of mechanical properties.

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로보트용 금형 연마 공구 시스템의 개발 (Development of polishing tool system for robot)

  • 박종오;이대엽
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 26-27 Oct. 1990
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    • pp.190-193
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    • 1990
  • Die finishing (polishing and lapping) after NC machining is characterized as one bottleneck process for reducing lead time. For automation of this typical manual work, a flexible polishing tool system using industrial robot has been developed. This tool system has three principal functions in order to achieve reduction of waviness, 3 D.O.F. compliance and constant pressure structure. This polishing tool shows that adaptability to free form surface is increased and programmability to various areas of die surface is also acquired.

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