• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.645-646
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• 2010

• Journal of Ocean Engineering and Technology
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• v.23 no.6
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• pp.99-104
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• 2009

PTFE has good mechanical and chemical stability at a wide range of temperatures and demonstrates a low friction coefficient value. PTFE is being used for self-lubricating parts in industry. But it shows a high wear rate. Thus, PTFE and nano-diamond powder were mixed into a composite and the wear properties of a PTFE coating layer on Al6061 was investigated. A ball-on-disk type of wear tester was used under a dry condition and different temperatures of oil. After the wear test, the wear track wasexamined by optical microscope. The PTFE-diamond showed the lowest friction coefficient (0.02) of all the lubricants in the experiments. The friction coefficient was shown to be directly related to the diamond powder in the PTFE coating. Adhesion estimations were performed by a scratch test, which is mainly used for coatings. The critical load between the coating and substrate was defined through analyses of the friction load, normal load curve, and acoustic emissions, along with optical microscope observations. The scratch test results showed that an import item (SWISS) gave the highest critical load values.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.362-365
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• 2005

Currently Chemical Mechanical Planarization (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. Especially the CMP pad conditioner, one of the diamond tools, is required to have strong diamond retention. Strong cohesion between diamond grits and metal matrix prevents macro scratch on the wafer. If diamond retention is weak, the diamond will be pulled out of metal matrix. The pulled diamond grits are causative of macro scratch on wafer during CMP process. Firstly, some results will be reported of cohesion between diamond grits and metal matrix on the diamond tools prepared by three different manufacturing methods. A measuring instrument with sharp cemented carbide connected with a push-pull gauge was manufactured to measure the cohesion between diamond grits and metal matrix. The retention force of brazed diamond tool was stronger than the others. The retention force was also increased in proportion to the contact area of diamond grits and metal matrix. The brazed diamond tool has a strong chemical combination of the interlayer composed of chrome in metal matrix and carbon which enhance the interfacial cohesion strength between diamond grits and metal matrix. Secondly, we measured real-time data of the coefficient of friction and the pad wear rate by using CMP tester (CETR, CP-4). CMP pad conditioner samples were manufactured by brazed, electro-plated and sintered methods. The coefficient of friction and the pad wear rate were shown differently according to the arranged diamond patterns. Consequently, the coefficient of friction is increased according as the space between diamonds is increased or the concentration of diamonds is decreased. The pad wear rate is increased according as the degree of diamond protrusion is increased.

• Journal of the Korean institute of surface engineering
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• v.47 no.3
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• pp.121-127
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• 2014

In this study, in order to improve corrosion resistance and wear resistance of aluminum, surface treatment was made by anodizing with oxalic acid solution and sealing with nano-diamond powder. Average size of nano-diamond powder was 30nm. Anodizing with oxalic acid made many pores in the aluminum oxide layer. Pore size and oxide thickness were investigated by scanning electron microscope (SEM). Pore size increased as temperature increased and voltage increased. It was possible to make oxide layer with pore diameter more than 50 nm. Oxide thickness increased as temperature and voltage and treatment time increased. Oxide layer with above $10{\mu}m$ thickness was made. Aluminum oxide layer with many pores was sealed by water with nano-diamond powder. Surface morphology was investigated by SEM. After sealing treatment with nano-diamond powder, corrosion resistance, wear resistance and hardness increased.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.43-47
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• 2002

In this study, through the experimental results of grinding ratio, grinding force and surface roughness with the obtained wear amount of diamond wheel and ceramic material during the grinding process, the following conclusions could be found. In the case of $Si_3N_4$, the wear of diamond wheel is large while the grinding force is stable and the range of change in surface roughness is small. for the case of $AL_2O_3$ and $ZrO_3$, while the wear of diamond wheel is getting smaller, the grinding force is increasing but the value of surface roughness is decreasing. For grinding with the vitrified bond wheel, it seems that the self-sharpening can be found for $Si_3N_4$ and the glazing effect of the cutting edge for $AL_2O_3$ and $ZrO_3$.

• Journal of the Korean Society for Precision Engineering
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• v.10 no.1
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• pp.147-152
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• 1993

The lapping characteristics of single crystal diamond are studied by considering the crystallographic anisotropy. It is introduced for lapping method to identify crystallographic orientantion by the X-ray diffraction and to measure lapping force ratio, lapping temperature and lapping wear. Diamound bonded wheels are used for lapping under dry condition. On the lapping {110} and {100} planes, it shows remarkable crystallographic anistropy. The lapping force ratio, temperature and wear become gerater with sliding direction along the <100> than along <110>. The results also show that the wear of diamond is influenced by mechanical work(tangential lapping force * lapping distance) as well by lapping speed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.951-954
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• 2000

This paper presents a new cutting method, i.e. diamond cutting, aided by electrolysis, in order to cut ferrous materials with diamond tools. Diamond cutting is widely applied in manufacturing ultraprecision parts such as magnetic disk, polygon mirror, spherical/non-spherical mirror and copier drum, etc. because of the diamond tool edge sharpness. In general, however, diamond cutting cannot be applied to cutting steels, because diamond tools wear excessively in cutting iron based materials like steel due to their high chemical interaction with iron in high temperature. In order to suppress the diffusion of carbon from the diamond tool and to reduce increase of cutting force due to size effect, we attempt to change chemically the compositions of iron based materials using electrolysis in a limited part which will be soon cut. Through experiments under several micro-machining and electrolysis conditions, cutting using electrolysis, compared to conventional cutting, was found to result in a great decrease of the cutting force, a better surface and much less wear tool.

• Transactions on Electrical and Electronic Materials
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• v.8 no.1
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• pp.15-20
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• 2007

Conditioner wear, copper polish rates, pad temperature and coefficient of friction (COF) are measured for two novel Mitsubishi Materials Corporation designs during an extended wear and polishing test. Both designs are coated with a $Teflon^{TM}$ film to reduce substrate wear and chemical attack. Using optical interferometry, changes in the coating that result in gradual changes in diamond exposure are measured. Theories of the COF, conditioning, and polishing are applied to explain the observed performance differences between the designs.

• The Korean Journal of Ceramics
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• v.1 no.4
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• pp.185-190
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• 1995

Tribological behavior of the diamond-like carbon (DLC) films sliding on floppy disk has been investigated. Hydrogenated DLC films have been prepared by plasma enhanced chemical vapor deposition (PECVD) using methane and hydrogen mixture in different volume ratios on ferrite substrates. DLC films show lower friction coefficients (0.2~0.4) than those of the uncoated ferrite(0.4~0.5). DLC films containing more hydrogen exhibit higher wear resistance. To investigate the roughness effect on wear, the substrates were polished with SiC papers prior to deposition. Too fine or too rough DLC surfaces result in poor wear resistance. Wear resistance of annealed DLC films at higher temperature slightly increases with respect to as-deposited film.

• Journal of the Korean institute of surface engineering
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• v.46 no.5
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• pp.216-222
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• 2013

In order to improve the performance of electrodeposited diamond-nickel composite, surface modification of diamond particles was carried out using powder immersion reaction assisted coating (PIRAC). Titanium and chromium were selected as coating elements, which are known as carbide former. With respect to the powder elements, various phases were formed on diamond; metallic Ti and TiC for Ti powder, $Cr_3C_2$ for Cr powder, and TiC and $Cr_3C_2$ for Ti-Cr mixed powder. Surface modified diamond particle showed higher specific surface area, especially Ti coating induced considerable increase of specific surface area. The increase of specific surface area suggests increase of surface roughness, and that was confirmed by surface observation using FE-SEM. In addition, wear properties of diamond-nickel composite including surface modified diamonds were improved, and Ti coated diamond showed the highest performance. The wear property of diamond-nickel composite is dependent on adhesion strength between diamond particle and nickel layer. Therefore, surface modification of diamond particle by PIRAC increasing surface roughness is effective to improve the properties of diamond-nickel composite.