• 한국재료학회지
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• 제8권11호
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• pp.1067-1073
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• 1998

CO와 $H_2$의 탄소원을 사용한 마이크로파 플라즈마 화학기상증착 방법으로 SOD 구조에 적용될 양질의 다이아몬드 박막을 형성하였고, SOD 구조를 형성하기 위해 diamond/Si(100) 구조 위에 poly-Si 박막을 저압화학기상 증착법으로 제작하였다. CO/$H_2$탄소원의 유량비 증가에 따라 다이아몬드의 결정은 octahedron 구조에서 cubo-octahedron 구조로 바뀌었으며, 결정면은 {111}과 {100}으로 혼합되어 형성되었다. 비정질 carbon과 non-diamond성분이 없는 양질의 다이아몬드 박막은 CO/$H_2$의 유량비가 0.18일 때 형성되었으며, 주 결정상은 (111) 면이었다. diamond/Si(100) 계면은 void가 없는 평활한 계면을 이루었으며, 다이아몬드 박막의 유전상수, 누설전류와 비저항은 각각 $5.31\times10^{-9}A/cm^2$ 그리고 $9\times{10^7}{\Omega}cm$이었다.

• 한국진공학회지
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• 제21권4호
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• pp.193-198
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• 2012

플라즈마화학기상증착 장치를 이용하여 플라즈마 폴리머와 다이아몬드상 탄소(diamond-like carbon, DLC) 박막을 합성하였다. 플라즈마 폴리머 박막 위에 패시베이션 층으로 DLC 박막을 두께에 따라 합성하였고, DLC/플라즈마 폴리머 박막의 구조적, 물리적, 전기적 특성들을 고찰하였다. 기존 플라즈마 폴리머는 누설 전류 특성이 좋고 낮은 유전상수 값을 가지고 있다. 그러나 실제 반도체 공정에 적용되기 위해서는 물리적 특성도 만족되어야 하기 때문에 플라즈마 폴리머 박막 위에 DLC 패시베이션을 적용하여 플라즈마 폴리머의 물리적, 전기적 특성들을 향상시키고자 하였다. DLC 박막의 두께가 증가함에 따라 플라즈마 폴리머의 경도와 탄성계수 값은 증가하였고, root-mean-square 표면거칠기 값은 감소하고 접촉각은 증가하였다. DLC 패시베이션 되어진 플라즈마 폴리머의 경우 패시베이션이 없는 폴리머보다 유전상수 값이 증가하였지만 전기적 누설전류 특성은 향상되었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1054-1057
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• 2004

The nitrogenated diamond-like carbon (NDLC) exhibits high electrical resistivity and thermal conductivity that are similar to the properties shown by diamond-like carbon (DLC) films. These diamond-like transparent properties in NDLC come in a material consisting of $sp^2$-bonded carbon versus the $sp^3$-carbon of DLC. The diamond-like properties and nondiamond-like bonding make NDLC an attractive candidate for applications. Liquid crystal (LC) alignment capabilities with ion beam exposure on NDLC thin films and electro-optical (EO) performances of the ion-beam-aligned twisted nematic liquid crystal display (TN-LCD) with oblique ion beam exposure on the NDLC thin film surface were studied. An excellent uniform alignment of the nematic liquid crystal (NLC) alignment with the ion beam exposure on the NDLC thin films was observed. In addition, it can be achieved that the good EO properties of the ion-beam-aligned TN-LCD. Finally, we will present the residual DC property of the ion-beam-aligned TN-LCD on the NDLC thin film surface.

• Journal of Mechanical Science and Technology
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• 제18권10호
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• pp.1772-1781
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• 2004

The mechanical as well as tribological characteristics of coating films as thin as a few nm become more crucial as applications in micro-systems grow. Especially, the amorphous carbon film has a potential to be used as a protective layer for micro-systems. In this work, quantitative evaluation of nano-indentation, scratching, and wear tests were performed on the 7nm thick amorphous carbon film using an Atomic Force Microscope (AFM). It was shown that AFM-based nano-indentation using a diamond coated tip can be feasibly utilized for mechanical characterization of ultra-thin films. Also, it was found that the critical load where the failure of the carbon film occurred was about 18${\mu}$N by the ramp load scratch test. Finally, the wear experimental results showed that the quantitative wear rate of the carbon film ranged 10$\^$-9/～10$\^$-8/ ㎣ /N cycle. These experimental methods can be effectively utilized for a better understanding the mechanical and tribological characteristics at the nano-scale.

• 한국표면공학회지
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• 제42권4호
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• pp.173-178
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• 2009

DLC film was synthesized on plastic injection mold(SKD11, $30\;mm\;{\times}\;19\;mm\;{\times}\;0.5\;mm$) and Si(100) wafer for 2 h at $130^{\circ}C$ under 6 mTorr using hybrid method of rf sputtering and ion source. The obtained film was analysed by Raman spectroscopy, AFM, TEM, Nano indenter and scratch tester, etc. The film was defined as an amorphous phase. In the Raman spectrum, broad peak of $sp^2$-bonded carbon attributed to graphite at $1550\;cm^{-1}$ were observed, and the ratio of ID($sp^3$ diamond intensity)/IG($sp^2$ graphite intensity) was approximately 0.54. The adhesion of DLC film was more than 80 N with scratch tester when $0.2\;{\mu}m$ thickness Cr was coated as interlayer. The micro-hardness was distributed at 35~37 GPa. The friction coefficient was 0.02~0.07, and surface roughness(Ra) was 0.34~1.64 nm. The lifetime of DLC coated plastic injection mold using as a connector part in computer was more than 2 times of non-coated mold.

• 한국전기전자재료학회논문지
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• 제34권1호
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• pp.16-20
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• 2021

In this study, we tried finding new materials to improve the stain resistance properties of polymer insulating materials. Using the filtered vacuum arc source (FVAS) with a graphite target source, DLC thin films were deposited on silicon and polymer insulator substrates depending on their thickness to confirm the surface properties, physical properties, and structural properties of the thin films. Subsequently, the possibility of using a DLC thin film as a protective coating material for polymer insulators was confirmed. DLC thin films manufactured in accordance with the thickness of various thin films exhibited a very smooth and uniform surface. As the thin film thickness increased, the surface roughness value decreased and the contact angle value increased. In addition, the elastic modulus and hardness of the DLC thin film slightly increased, and the maximum values of elastic modulus and hardness were 214.5 GPa and 19.8 GPa, respectively. In addition, the DLC thin film showed a very low leakage current value, thereby exhibiting electrical insulation properties.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1999년도 추계학술발표강연 및 논문개요집
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• pp.171-171
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• 1999

• 월간포장계
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• 통권144호
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• pp.111-113
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• 2005

• 한국진공학회:학술대회논문집
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• 한국진공학회 1997년도 제12회 학술발표회 논문개요집
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• pp.21-21
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• 1997

• 한국진공학회:학술대회논문집
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• 한국진공학회 1997년도 제12회 학술발표회 논문개요집
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• pp.33-33
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• 1997