• 전기학회논문지
• /
• 제56권12호
• /
• pp.2217-2220
• /
• 2007

In this paper, we propose a new wafer level package (WLP) for the RF MEMS applications. The Film Bulk Acoustic Resonator (FBAR) are fabricated and hermetically packaged in a new wafer level packaging process. With the use of Au-Sn eutectic bonding method, we bonded glass cap and FBAR device wafer which has groove-shaped via formed in the backside. The device wafer includes a electrical bonding pad and groove-shaped via for connecting to the external bonding pad on the device wafer backside and a peripheral pad placed around the perimeter of the device for bonding the glass wafer and device wafer. The glass cap prevents the device from being exposed and ensures excellent mechanical and environmental protection. The frequency characteristics show that the change of bandwidth and frequency shift before and after bonding is less than 0.5 MHz. Two packaged devices, Tx and Rx filters, are attached to a printed circuit board, wire bonded, and encapsulated in plastic to form the duplexer. We have designed and built a low-cost, high performance, duplexer based on the FBARs and presented the results of performance and reliability test.

• 한국생산제조학회지
• /
• 제6권4호
• /
• pp.34-38
• /
• 1997

This paper presents a joining method by using the silicon wafer in order to apply to joint to the 3-dimensional structures of semiconductor device, high-speed , high integration, micro machine, silicon integrated sensor, and actuator. In this study, the high atomic beam, stabilized by oxidation film and organic materials at the material surface, is investigated, and the purified is obtained by removing the oxidation film and pollution layer at the materials. And the unstable surface is obtained, which can be easily joined. In order to use the low temperatures for the joint method, the main subjects are obtained as follows: 1) In the case of the silicon wafer and the silicon wafer and the silicon wafer of alumina sputter film, the specimens can be jointed at 2$0^{\circ}C$, and the joining strength is 5Mpa. 2) The specimens can not always be joined at the room temperatures in the case of the silicon wafer and the silicon wafer of alumina sputter film.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 추계학술대회 논문집
• /
• pp.427-431
• /
• 2005

In this study, 6' GaAs wafer bonding system is designed and optimized to bond 6 inches device wafer and material wafer. Bonding process is performed in vacuum environment and resin is used to bond two wafers. Vacuum module and double heating mechanisms are adopted to minimize wafer warpage and void. Structure and heat transfer analysis, et al of the core modules review the designed mechanisms are very effective in performance improvement. As a result, high productivity (tack time cut-down) and stabilized process can be obtained by reducing breakage failure of wafer.

• 한국표면공학회지
• /
• 제29권5호
• /
• pp.482-486
• /
• 1996

The progress of microelectronics technology has been requiring agressive developments of device technologies. Also the requirements of the next generation devices is heading to the limits of their functions and materials, and hence asking the very specific silicon wafer such as SOI(Silicon On Insulator) wafer. The talk covers the dome stic and world-wide status of SOI device developments and applications. The presentation will also touch some predictions such as SOI device prgress schedules, impacts on the normal wafer developments, market sizes, SOI wafer prices, and so on. Finally it will cover technical aspects which are silicon oxide conditions for bonding, point defects and, surface contaminations. These points will be hopefully overcome by involved people in microelectronics industry.

• 한국재료학회지
• /
• 제17권7호
• /
• pp.347-351
• /
• 2007

Vertical interconnect technology called 3D stacking has been a major focus of the next generation of IC industries. 3D stacked devices in the vertical dimension give several important advantages over conventional two-dimensional scaling. The most eminent advantage is its performance improvement. Vertical device stacking enhances a performance such as inter-die bandwidth improvements, RC delay mitigation and geometrical routing and placement advantages. At present memory stacking options are of great interest to many industries and research institutes. However, these options are more focused on a form factor reduction rather than the high performance improvements. In order to improve a stacked device performance significantly vertical interconnect technology with wafer level stacking needs to be much more progressed with reduction in inter-wafer pitch and increases in the number of stacked layers. Even though 3D wafer level stacking technology offers many opportunities both in the short term and long term, the full performance benefits of 3D wafer level stacking require technological developments beyond simply the wafer stacking technology itself.

• 한국전자통신학회논문지
• /
• 제6권5호
• /
• pp.621-627
• /
• 2011

본 논문에서는 로드-풀을 이용하여 X-band에서 on-Wafer 상태의 GaN HEMT 소자에 대한 성능을 분석하고 분석한 결과를 바탕으로 최적의 임피던스 점을 분석하였다. 패키징 하기 전 on-Wafer 상태에 있는 반도체 소자의 최적의 임피던스 분석을 통해 소자 자체에서 최적의 성능을 내는 방안을 제안하였다. Gate length가 0.25um이고 Gate Width가 각각 400um, 800um인 소자에 대한 최적의 임피던스를 선정하여 성능을 분석한 결과, 400um는 $P_{sat}$=33.16dBm(2.06W), PAE=67.36%, Gain=15.16dBm의 성능을 가지며, 800um는 $P_{sat}$=35.9 dBm(3.9W), PAE=69.23%, Gain=14.87dB의 성능을 보였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제52권10호
• /
• pp.451-457
• /
• 2003

The silicon wafer is stable status at room temperature, but it is weak at high temperatures which is necessary for it to be fabricated into a power semiconductor device. During thermal diffusion processing, a high temperature produces a variety thermal stress to the wafer, resulting in device failure mode which can cause unwanted oxide charge or some defect. This disrupts the silicon crystal structure and permanently degrades the electrical and physical characteristics of the wafer. In this paper, the electrical characteristics of a single oxide layer due to high temperature diffusion process, wafer resistivity and thickness of polyback was researched. The oxide quality was examined through capacitance-voltage characteristics, defect density and BMD(Bulk Micro Defect) density. It will describe the capacitance-voltage characteristics of the single oxide layer by semiconductor process and device simulation.

• 한국전기전자재료학회논문지
• /
• 제16권12S호
• /
• pp.1237-1241
• /
• 2003

In this paper, we report a novel RF-MEMS packaging technology with lightweight, small size, and short electric path length. To achieve this goal, we used the ultra thin silicon substrate as a packaging substrate. The via holes lot vortical feed-through were fabricated on the thin silicon wafer by wet chemical processing. Then, via holes were filled and micro-bumps were fabricated by electroplating. The packaged RF device has a reflection loss under 22 〔㏈〕 and a insertion loss of -0.04∼-0.08 〔㏈〕. These measurements show that we could package the RF device without loss and interference by using the vertical feed-through. Specially, with the ultra thin silicon wafer we can realize of a device package that has low-cost, lightweight and small size. Also, we can extend a 3-D packaging structure by stacking assembled thin packages.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2010년도 춘계학술대회 논문집
• /
• pp.423-424
• /
• 2010

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2002년도 하계학술대회 논문집 C
• /
• pp.2023-2025
• /
• 2002

We have fabricated a novel vertical trench-Hall device sensitive to the magnetic field parallel to the sensor chip surface. The vertical trench-Hall device is built on SOI wafer which is produced by silicon direct bonding technology using bulk micromachining, where buried $SiO_2$ layer and surround trench define active device volume. Sensitivity up to 350 V/AT is measured.