• Title/Summary/Keyword: Deposition property

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Fabrication of Lithium Nickel Cobaltate Thin-film for the Cathode Material of Microbattery

  • Kim, Duksu;Kim, Mun-Kyu;Son, Jong-Tae;Kim, Ho-Gi
    • Journal of the Korean Ceramic Society
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    • v.38 no.8
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    • pp.683-686
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    • 2001
  • Electrochemically active lithium nickel cobalt oxide thin-film was not fabricated until now. The thin-film was deposited by RF magnetron sputtering at room temperature, and its initial phase was amorphous. By varying deposition condition, the different characteristics of thin-film were achieved. Using electrochemical analyses, the relationship between physical and electrochemical characteristics was identified. Crystallized thin-film by RTA (Rapid Thermal Annealing) was shown a good capacity and cycle property.

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A study on the property of magnetron sputtering deposition by control of a magnetic field distribution (자기장 분포 제어에 의한 마그네트론 스퍼터링 증착 특성 연구)

  • Kim, Hyun-Soo;Kim, Il-Young;Min, Sang-Hong;Kim, Chang-Kyo;Byun, Sang-Doo
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1445-1446
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    • 2011
  • ITO 박막의 전기 광학적 특성을 향상시키기 위해 열처리 공정은 필수적이다. 하지만 향후 발전시켜나갈 플렉서블 디스플레이(flexible display)에서는 ITO를 저온에서 증착해야 할 필요성이 대두되었고, 이에 따라 기판의 온도를 상온으로 유지하면서 고품질의 ITO 박막을 제조하고자 하는 연구가 진행되고 있다. 본 연구에서는 상온에서 유리 기판 위에 RF 마그네트론 스퍼터링(magnetron sputtering) 장치의 자기장 분포를 제어하여 ITO 박막을 증착하였다. 제작된 시편의 두께와 투과도 및 이동도를 측정 비교하였다.

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Characteristics of Ferroelectric SrBi2Ta2O9 Thin Films deposited by Plasma-Enhanced Atomic Layer Deposition (플라즈마 원자층증착법에 의해 제조된 강유전체 SrBi2Ta2O9박막의 특성)

  • 신웅철;류상욱;유인규;윤성민;조성목;이남열;유병곤;이원재;최규정
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.35-35
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    • 2003
  • Recent progress in the integration of the ferroelectric random access memories (FRAM) has attracted much interest. Strontium bismuth tantalate(SBT) is one of the most attractive materials for use in nonvolatile-memory applications due to low-voltage operations, low leakage current, and its excellent fatigue-free property. High-density FRAMs operated at a low voltage below 1.5V are applicable to mobile devices operated by battery. SBT films thinner than 0.1 #m can be operated at a low voltage, because the coercive voltage (Vc) decreases as the film thickness is reduced. In addition, the thickness of the SBT film will have to be reduced so it can fit between adjacent storage nodes in a pedestal type capacitor in future FRAMs.

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Fabrication of high-performance carbon nanotube field emitter using Thermal Chemical Vapor Deposition

  • Yu, Wan-Jun;Cho, You-suk;Park, Gyuseok;Kim, D.J.
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.43-43
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    • 2003
  • Carbon nanotubes(CNTs) have many application points, which are field emission devices, composites, hydrogen storage, nanodevices, supercapacitor and secondary battery. The most promising application point is emitter tip mays of field emission devices. Furthermore, it may be also useful as a vacuum device for high frequency and high power. But, there are some obstacles to fabricate carbon nanotube field emission device. One is that CNTs grown by CVD method has weak adhesion with substrate and the other is non-uniform length of them. These problems are very crucial in aging property and reliability of device in the field emission.

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A Study on the Electrical Properties of PBLG and PBDG monolayers (PBLG와 PBDG단분자막의 전기특성에 관한 연구)

  • Kim, Beyung-Geun;Cho, Su-Young;Lee, Kyung-Sup
    • Proceedings of the KIEE Conference
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    • 2003.10a
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    • pp.92-94
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    • 2003
  • Recently, the study on development of electrical and electronic device is done to get miniature, high degrees of integration and efficiency by using inorganic materials, the study of Langmuir-Boldgett(LB) method that uses organic materials because of the limitation for the ultra small size. In this paper, detected displacement current using PBLG and PBDG, deposition and observed the electrical characteristics to each 1, 3, 5, 7, 9 layers by LB method. Maximum value of change ratio of displacement current by the detected speed and temperature appeared almost lineally, could confirm that it are in comparison relation each other speed-temperature and displacement current. The structure of manufactured device is MIM. Also, we then examined of the MIM device by means of I-V. The I-V characteristic of the device is measured from 0 to +2[V]. The insulation property of a thin film is better as the distance between electrodes is larger.

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Application of Carbon Naotube to the Electron Gun of the Cathode Ray Tube (탄소 나노 튜브의 음극선관용 전자총 응용)

  • Ju, Byeong-Gwon;Jang, Yun-Taek;Lee, Yun-Hui
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.3
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    • pp.121-124
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    • 2002
  • CNTs(Carbon Nano Tube) were employed as an electron source in electron-gun of CRT(Cathode-Ray Tube). The CNTs were grown on the Si substrates and the electron gun by LP-CVD(Low Pressure-Chemical Vapor Deposition). Their physical and field emission property satisfied the requirements of the electron gun of CRT. The fabricated electron gun was inserted into 19 inch-sifted CRT and its operating properly was evaluated for practical usage.

A Study for the Ohmic Contact of High Resistivity p-Cd$_{80}Zn_[20}$Te Semiconductor (고 비저항 p-Cd$_{80}Zn_[20}$Te의 저항성 전극형성에 관한 연구)

  • 최명진;왕진식
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.338-341
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    • 1997
  • According to reports, it is impossible to make Ohmic Contact with high resistivity p type CdTe or CdZnTe semiconductor theoretically. But it is in need of making Ohmic Contact to fabricate semiconductor radiation detector By electroless deposition method using gold chloride solution, we made Ohmic Contact of Au and p-Cd$_{80}$Zn$_{20}$Te which grown by High Presure Bridgman Method in Aurora Technologies Corporation. We investigated the interface with Rutherford Backscattering Spectrometry and Auger electron spectroscopy. And we evaluated the degree of Ohmic Contact for the Au/CdZnTe interface by the I/V characteristic curve. As a result, we concluded that it showed excellent Ohmic Contact property by tunneling mechanism through the interface.e.

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A Study on Surface of BST Thin Films by Sol-Gel Methods (졸겔법으로 제작된 BST 박막의 구조적 특성)

  • 홍경진;민용기;조재철
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.377-380
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    • 2001
  • The BST thin films to composite (Ba$\sub$x/Sr$\sub$l-x/)TiO$_3$ using sol-gel method were fabricated on Pt/Ti/SiO$_2$/Si substrate. The thin film capacitor to be ferroelectric materials was investigated by structural and electrical properties. BST solution was composited by moi ratio, and then spin-coated (from 3 times to 5 times coating on Pt/SiO$_2$/Si substrate. Thickness of BST ceramics thin films are about 2600∼2800[${\AA}$] in 3 times deposition. The property of leakage current was stable when the applied voltage was 3[V]. Leakage current of 3 times coated BST thin film was 10$\^$-9/∼10$\^$-11/[A] at 0∼3[V].

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The Deposition Characterization of DLPC Lipid Membrane by Moving Wall Type LB Methode (Moving Wall형 LB법에 의해서 제작된 DLPC 지질막의 누적특성)

  • 정용호;이우선;김남오;이경섭
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.342-345
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    • 1997
  • We fabricated the sample of u1tra thin lipid membrane(L-${\alpha}$-DLPC ) by LB methode. The $\pi$-A isotherm of the DLPC was measured at the air-water interface varying with the compressing speed and amounts of solutions for spreading. For good property of lipid monolayer film, it was necessary for the lower speed of compressing, and 40${\mu}\ell$ of solutions for spreading. The molecular arrangement of deposited films were evaluated by measuring the absorption, transmitance and intensity with the UV spectrophotometer. The Y-type multilayers prepared at 50mN/m showed weaker than Z-type. So we found building-up of structurally high quality LB films is essential to study properties of the films and to get reproducible data.

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