• 제목/요약/키워드: Deposition factor

검색결과 492건 처리시간 0.027초

Theoretical Calculation and Experimental Verification of the Hf/Al Concentration Ratio in Nano-mixed $Hf_xAl_yO_z$ Films Prepared by Atomic Layer Deposition

  • Kil, Deok-Sin;Yeom, Seung-Jin;Hong, Kwon;Roh, Jae-Sung;Sohn, Hyun-Cheol;Kim, Jin-Woong;Park, Sung-Wook
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제5권2호
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    • pp.120-126
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    • 2005
  • We have proposed a characteristic method to estimate real composition when multi component oxide films are deposited by ALD. Final atomic concentration ratio was theoretically calculated from the film densities and growth rates for $HfO_2$ and $Al_2O_3$ using ALD processed HfxAhOz mms.W e have transformed initial source feeding ratio during deposition to fins] atomic ratio in $Hf_xAl_yO_z$ films through thickness factors ($R_{HFO_2}$ ami $R_{Al_2O_3}$) ami concentration factor(C) defined in our experiments. Initial source feeding ratio could be transformed into the thickness ratio by each thickness factor. Final atomic ratio was calculated from thickness ratio by concentration factor. It has been successfully confirmed that the predicted atomic ratio was in good agreement with the actual measured value by ICP-MS analysis.

Estimation of NO$_2$ Source Generation and Ventilation rate in Residence by Multiple Measurements

  • Won Ho, Yang;Gi Yeong, Lee
    • 한국환경과학회:학술대회논문집
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    • 한국환경과학회 2003년도 봄 학술발표회 발표논문집
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    • pp.155-160
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    • 2003
  • Indoor air quality can be affected by indoor sources, ventilation, decay and outdoor levels. Although technologies exist to measure these factors, direct measurements are often difficult. The purpose of this study was to develop an alternative method to characterize indoor environmental factors by multiple indoor and outdoor measurements. Daily indoor and outdoor $NO_2$ concentrations were measured for 30 consecutive days in 28 houses in Brisbane, Australia, and for 21 consecutive days in 37 houses in Seoul, Korea. Using a mass balance model and regression analysis, penetration factor (ventilation rate divided by the sum of ventilation rate and deposition constant) and source strength factor (source strength divided by the sum of ventilation rate and deposition constant) were calculated using multiple indoor and outdoor measurements. Subsequently, the ventilation rate and $NO_2$ source strength were estimated. Geometric means of ventilation rate were 1.44 ACH in Brisbane, assuming a residential $NO_2$ deposition constant of 1.05 $hr^{-1}$, and 1.36 ACH in Seoul, with the measured residential $NO_2$ deposition constant of 0.94 $hr^{-1}$. Source strengths of $NO_2$ were 15.8 $\pm$ 18.2 ${\mu}g$/$m^3$.hr and 44.7 $\pm$ 38.1${\mu}g$/$m^3$.hr in Brisbane and Seoul, respectively. In conclusion, indoor environmental factors were effectively characterized by this method using multiple indoor and outdoor measurements.

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Estimation of Nitrogen Dioxide Source Generation and Ventilation Rate in Residence Using Multiple Measurements in Korea

  • Chung, Moon-Ho;Yang, Won-Ho
    • 한국환경보건학회:학술대회논문집
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    • 한국환경보건학회 2004년도 International Conference Current Challenges and Advances in Environmental Health
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    • pp.45-50
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    • 2004
  • Indoor air quality can be affected by indoor sources, ventilation, decay and outdoor levels. Alt hough technologies exist to measure these factors, direct measurements are often difficult. The purpose of this study was to develop an alternative method to characterize indoor environmental factors by multiple indoor and outdoor measurements. Daily indoor and outdoor NO2 concentrations were measured for 30 consecutive days in 28 houses in Brisbane, Australia, and for 21 consecutive days in 37 houses in Seoul, Korea. Using a mass balance model and regression analysis, penetration factor (ventilation rate divided by the sum of ventilation rate and deposition constant) and source strength factor (source strength divided by the sum of ventilation rate and deposition constant) were calculated using multiple indoor and outdoor measurements. Subsequently, the ventilation rate and NO2 source strength were estimated. Geometric means of ventilation rate were 1.44 ACH in Brisbane, assuming a residential NO2 deposition constant of 1.05 hr-1, and 1.36 ACH in Seoul, with the measured residential NO2 deposition constant of 0.94 hr-1. Source strengths of N02 were 15.8 ${\pm}$ 18.2 ${\mu}$g/m3${\cdot}$hr and 44.7 ${\pm}$ 38.1 ${\mu}$g/m3${\cdot}$hr in Brisbane and Seoul, respectively. In conclusion, indoor environmental factors were effectively characterized by this method using multiple indoor and outdoor measurements.

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ALD와 RF 마그네트론 스퍼터링을 이용한 FBAR 소자의 ZnO 박막증착 및 특성 (Characteristics of ZnO Thin Films of FBAR using ALD and RF Magnetron Sputtering)

  • 신영화;권상직;윤영수
    • 한국전기전자재료학회논문지
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    • 제18권2호
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    • pp.164-168
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    • 2005
  • Piezoelectric ZnO thin films were for the first time formed on SiO$_2$/Si(100) substrate using 2-step deposition, atomic layer deposition(ALD) and RF magnetron sputtering deposition, for film bulk acoustic resonator(FBAR) applications. The ZnO buffer layer by ALD was deposited using alternating diethyl zinc(DEZn)/$H_2O$ exposures and ultrahigh purity argon gas for purging. The ZnO films by 2-step deposition revealed stronger c-axis-preferred orientation and smoother surface than those by the conventional RF sputtering method. The solidly mounted resonator(SMR)-typed FBAR fabricated by using 2-step deposition method revealed higher quality factor of 580 and lower return loss of -17.35dB. Therefore the 2-step deposition method in this study could be applied to the FBAR device fabrication.

사료의 아미노산 조성에 따른 돼지의 단백질 축적을 나타내는 수치모델 (A Simulation Model for the protein Deposition of Pigs According to Amino Acid Composition of Feed Proteins)

  • 이옥희;김강성
    • 한국식품영양과학회지
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    • 제28권1호
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    • pp.178-190
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    • 1999
  • This study was conducted to develop a simulation model for the growth dynamics of pigs and to describe quantitatively protein deposition depending on the amino acid composition of feed protein. In the model it is assumed that the essential processes that determine the utilization of feed protein in the whole body are protein synthesis, breakdown of protein, and oxidation of amino acid. Besides, it is also assumed that occurrence of protein deposition depends on genetic potential and amino acid composition of feed protein. The genetic potential for the protein deposition is the maximum capacity of protein synthesis, being dependent on the protein mass of the whole body. To describe the effect of amino acid composition of feed on the protein deposition, a factor, which consist of ten amino acid functions and lie between 0 and 1, is introduced. Accordingly a model was developed, which is described with 15 flux equations and 11 differential equations and is composed of two compartments. The model describes non linear structure of the protein utilization system of an organism, which is in non steady state. The objective function for the simulation was protein deposition(g/day) cal culated according to the empirical model, PAF(product of amino acid functions) of Menke. The mean of relative difference between the simulated protein deposition and PAF calculated values, lied in a range of 11.8%. The simulated protein synthesis and breakdown rates(g/day) in the whole body showed a parallel behavior in the course of growth.

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Influence of LPPS Spraying Parameters on Deposition Efficiency of Zirconia Powder

  • Shi, Jian-Min;Hu, Zhong-Yin;Huang, Jing-Qi;Ding, Chuan-Xian
    • 한국진공학회지
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    • 제6권S1호
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    • pp.160-165
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    • 1997
  • Yttria stabilized zirconia coating is an attractive material for several engineering applications. In order to produce coatings with consistent and reliable performance it is important to understand the influence of spraying parameters on the coating properties and optimize the spraying parameters. In this paper the low pressure plasma spray(LPPS) deposition of as-received zirconia powder has been investigated using simple one-factor-at-a-time approach. The deposition efficiency was chosen to evaluate the melting characteristics of the as-received zirconia powder. The results obtained indicated that the deposition efficiency of zirconia powder is very sensitive to the spraying parameters such as plasma gas flow rate and ranges from 24% to 57% The microstructure and the phase composition of zirconia coating deposited with the different plasma spraying parameters were also examined by SEM and XRD respectively. The relationship between deposition efficiency and the microstructure of zirconia coating was discussed.

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태안반도주변 강하분진량의 계절변화와 그 성상에 관한 연구 (The Study on the Seasonal Variations and Chemical Compositions of Atmospheric Deposition Flux Measured with Dustfall around Tae-an peninsula)

  • 전상기;김용철;이성철
    • 환경영향평가
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    • 제7권2호
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    • pp.127-133
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    • 1998
  • The atmospheric deposition flux was measured with dustfall from July of 1997 to July of 1998 at nine sampling sites located in Tae-an peninsula to examine the seasonal variations. The results showed that the average dry deposition was higher in spring than the other seasons. Thus, it is considered that yellow sand is one major source of the additional deposition flux in spring. There also appeared the higher measurement of deposition at the sites nearby road (like Hagampo, Bangali and Sinduri) in summer, and it is assumed that the heavy traffic caused by summer visitors was the main factor of that. For more accurate study, the qualitiative analysis should be taken on the deposited materials.

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Highly (111)-oriented SiC Films on Glassy Carbon Prepared by Laser Chemical Vapor Deposition

  • Li, Ying;Katsui, Hirokazu;Goto, Takashi
    • 한국세라믹학회지
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    • 제53권6호
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    • pp.647-651
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    • 2016
  • SiC films were prepared on glassy carbon substrates by laser chemical vapor deposition under a high pressure of $10^4Pa$ using a diode laser (wavelength = 808 nm) and a polysilaethylene precursor. (111)-oriented SiC films were formed at a deposition temperature ($T_{dep}$) range of 1150 - 1422 K. At $T_{dep}=1262K$, the SiC film with a high Lotgering factor of above 0.96 showed an exhibited pyramid-like surface morphology and flower-like grains. The highest deposition rate ($R_{dep}$) was $220{\mu}m\;h^{-1}$ at $T_{dep}=1262K$.

고준위폐기물 처분장의 최적 공동간격 및 처분공간격을 결정하기 위한 역학적 안정성 해석 (Mechanical Stability Analysis of a High-Level Waste Repository for Determining Optimum Cavern and Deposition Hole Spacing)

  • 박병윤;권상기
    • 터널과지하공간
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    • 제10권2호
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    • pp.237-248
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    • 2000
  • 역학적으로 안정한 공동 및 처분공 간격을 결정하기 위해, 현재 수행 중인 열 해석의 중간 결과를 근거로 범용 해석 프로기램인 ABAQUS 버전 5.8을 이용해 3차원 유한요소해석을 수행하였다. 세 가지 초기지압을 조건으로 공동간격과 처분공 간격을 바꿔가면서 선형탄성해석을 수행하였고. 그 결과를 분석하여 굴착 후 응력재분배에 의한 암반의 거동은 어떤 경향을 가지고 있으며, 적절한 공동 간격 및 처분공 간격은 어느 정도가 좋은지를 분석하였다. 또한 각 경우 역학적인 안전계수는 어느 정도인지도 계산하였다. 국내지압분포를 근거로 도출한 초기지압 하에서는 공동간격 40m, 처분공간격 3m인 경우 안전계수 3.42가 계산되어 아주 안정한 결과를 얻었고, 스웨덴이나 캐나다의 초기지압 경힘식의 경우의 안전계수는 각각 1.19와 1.27로 비교적 낮은 값이지만 1 이상의 값이므로 응력재분배로 인한 파괴는 일어나지 않는다는 결과를 얻었다.

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β-catenin protein utilized by Tumour necrosis factor-α in porcine preadipocytes to suppress differentiation

  • Luo, Xiao;Li, Hui-Xia;Liu, Rong-Xin;Wu, Zong-Song;Yang, Ying-Juan;Yang, Gong-She
    • BMB Reports
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    • 제42권6호
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    • pp.338-343
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    • 2009
  • The Wnt/$\beta$-catenin signaling pathway alters adipocyte differentiation by inhibiting adipogenic gene expression. $\beta$-catenin plays a central role in the Wnt/$\beta$-catenin signaling pathway. In this study, we revealed that tumour necrosis factor-$\alpha$ (TNF-$\alpha$), a potential negative regulator of adipocyte differentiation, inhibits porcine adipogenesis through activation of the Wnt/$\beta$-catenin signaling pathway. Under the optimal concentration of TNF-$\alpha$, the intracellular $\beta$-catenin protein was stabilized. Thus, the intracellular lipid accumulation of porcine preadipocyte was suppressed and the expression of important adipocyte marker genes, including peroxisome proliferator-activated receptor-$\gamma$ (PPAR$\gamma$) and CCAAT/enhancer binding protein-$\alpha$ (C/EBP$\alpha$), were inhibited. However, a loss of $\beta$-catenin in porcine preadipocytes enhanced the adipogenic differentiation and attenuated TNF-$\alpha$ induced anti-adipogenesis. Taken together, this study indicated that TNF-$\alpha$ inhibits adipogenesis through stabilization of $\beta$-catenin protein in porcine preadipocytes.