• 한국분말재료학회지
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• 제6권4호
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• pp.301-306
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• 1999

Mechanical properties of oxide based materials could be improved by nanocomposite processing. To investigate optimum route for fabrication of nanocomposite enabling mass production, high energy ball milling and Pulse Electric Current Sintering (PECS) were adopted. By high energy ball milling, the $Al_2O_3$-based composite powder with dispersed Cu grains below 20 nm in diameter was successfully synthesized. The PECS method as a new process for powder densification has merits of improved sinterability and short sintering time at lower temperature than conventional sintering process. The relative densities of the $Al_2O_3$-5vol%Cu composites sintered at $1250^{\circ}C$ and $1300^{\circ}C$ with holding temperature of $900^{\circ}C$ were 95.4% and 95.7% respectively. Microstructures revealed that the composite consisted of the homogeneous and very fine grains of $Al_2O_3$ and Cu with diameters less than 40 nm and 20 nm respectively The composite exhibited enhanced toughness compared with monolithic $Al_2O_3$. The influence of the Cu content upon fracture toughness was discussed in terms of microstructural characteristics.

• 한국분말재료학회지
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• 제15권4호
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• pp.302-307
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• 2008

$Gd_2O_3$-doped $CeO_2$(GDC) solid solutions have been considered as a promising materials for electrolytes in intermediate-temperature solid oxide fuel cells. In this study, the nano-sized GDC powder with average panicle size of 69nm was prepared by a high energy ball milling process and its sintering behavior was investigated. Heat-treatment at $1200^{\circ}C$ of nano-sized GDC powder mixture led to GDC solid-solution. The enhanced densification over 96% of relative density was obtained after sintering at $1300^{\circ}C$ for 2h. It was found that the sinterability of GDC powder could be significantly improved by the introduction of a high energy ball milling process.

• 한국세라믹학회지
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• 제47권2호
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• pp.183-188
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• 2010

$Ce_{0.8}Gd_{0.2}O_{1.9}$(GDC20) powder was synthesized by milling of $CeO_2$ slurry and Gd oxalate precipitation. The mixture of $CeO_2$ powder and Gd precipitates calcined at $600^{\circ}C$ for 2 h showed the particle size distribution similar to that of $CeO_2$ powder, which had been milled during the synthesis process. Attrition milling of the calcined powder with an average particle size of $0.36\;{\mu}m$ for 2 h resulted in a decrease in the particle size to $0.24\;{\mu}m$. Although the milled powder consisted of small particles(<$1\;{\mu}m$), a small amount of fine platy $Gd_2O_3$ particles, which had been survived in the milling process, was observed. Sintering of the powder compacts for 4 h showed relative densities of 80.7% at $1300^{\circ}C$ and 97% at $1400^{\circ}C$, respectively. Densification was found to almost complete at $1500^{\circ}C$, resulting in a dense and homogeneous microstructure with a relative density of 99.5%.

• 한국재료학회지
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• 제10권8호
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• pp.532-539
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• 2000

Diamond 공구용 Co-0.5C-(15∼20)Cr-20Ni-8W-(2∼7)Fe 합금 결합제를 볼밍링(ball-milling)법과 기계적 합금화(mechanical alloying) 법으로 합성하였다. stearic acid의 첨가 유무에 상관없이 Co-0.5C-(15∼20)Cr-20Ni-8W-(2∼7)Fe 합금의 경우 6시간 동안 합금화된 금속 분말에서 미세 접합(micro welding) 형상이 균일하게 관찰되었다. stearic acid를 첨가하지 않을 때는 부분적으로 조대화된 분말이 형성되었으나 2% 첨가한 경우 미세하고 판상의 분말이 얻어졌다. stearic acid가 첨가된 복합분말을 열간 압축하여 기계적 성질을 평가한 결과 굽힘강도 1100MPa, 경도 46H(sub)Rc의 특성을 나타냈다.

• 한국세라믹학회지
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• 제42권12호
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• pp.821-826
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• 2005

Gadolinia-doped ceria nanopowder was prepared by glycine-nitrate combustion method with different glycine/nitrate mixing ratio. The characteristics of the synthesized powder were investigated by X-ray diffraction method, transmission electron microscopy, thermal gravity, differential thermal analysis and thermo-mechanical analysis. The smallest powder was obtained with glycine/nitrate ratio 1.00 and the lowest organic and water vapor contained powder was made with glycine/nitrate ratio 1.75. According to dilatometry, fast densification was occurred around $1000^{\circ}C$ and shows full density over $1300^{\circ}C$. Finally near-fully dense ceria electrolyte was fabricated with conventional sintering technique. Glycine-nitrate process yields fine nanopowders which enable low temperature sintering and fabrication of fully dense and nanostructured oxide electrolyte.

• 한국세라믹학회지
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• 제34권8호
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• pp.811-816
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• 1997

SiO2-P2O5-B2O3 glass soot was fabricated by flame hydrolysis deposition and their properties by SEM, XRD, TGA-DSC were investigated., The mechanism of consolidation process of a glass soot as a function of consolidation temperature was analyzed by SEM observations. In the XRD patterns, the crystalline peaks which seem to be generated from B2O3 and BPO4 were observed. When the temperature of heat treatment exceeded 105$0^{\circ}C$, the non-crystalline state of SiO2-P2O5-B2O3 glass was observed. In the TGA-DSC curves, the evaporation of water molecule by a sudden endothermic reaction was observed at 128$^{\circ}C$ and a broad endothermic peak was seen in the temperature range of 40$0^{\circ}C$-95$0^{\circ}C$, without any weight loss. Finally, this peak was began to recover its baseline at 953$^{\circ}C$. This point is equal to the temperature at which the densification begins. Furthermore, we observed that the addition of dopants such as P2O5 and B2O3 decrease the onset of consolidation temperature till 95$0^{\circ}C$.

• 한국분말재료학회지
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• 제9권4호
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• pp.235-244
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• 2002

The effects of residual impurities on solid state sintering of the powder injection molded (PIMed) W-15wt%Cu nanocomposite powder were investigated. The W-Cu nanocomposite powder was produced by the mech-ano-chemical process consisting of high energy ball-milling and hydrogen reduction of W blue powder-cuO mixture. Solid state sintering of the powder compacts was conducted at $1050^{\circ}C$ for 2~10 h in hydrogen atmosphere. The den-sification of PIM specimen was slightly larger than that of PM(conventional PM specimen), being due to fast coalescence of aggregate in the PIM. The only difference between PIM and PM specimens was the amount of residual impurities. The carbon as a strong reduction agent effectively reduced residual W oxide in the PIM specimen. The $H_2O$ formed by $H_2$ reduction of oxide disintegrated W-Cu aggregates during removal process, on the contrary to this, micropore volume rapidly decreased due to coalescence of the disintegrated W-Cu aggregates during evolution of CO.It can be concluded that the higher densification was due to the earlier occurred Cu phase spreading that was induced by effective removal of residual oxides by carbon.

• 한국세라믹학회지
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• 제53권6호
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• pp.622-627
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• 2016

The effects of the debinding atmosphere on the properties of sintered reaction-bonded $Si_3N_4$ (SRBSN) ceramics prepared by tape casting method were investigated. Si green tape was produced from Si slurry of Si powder, using 11.5 wt% polyvinyl butyral as the organic binder and 35 wt% dioctyl phthalate as the plasticizer. The debinding process was conducted in air and $N_2$ atmospheres at $400^{\circ}C$ for 4 h. The nitridation process of the debinded Si specimens was performed at $1450^{\circ}C$, followed by sintering at $1850^{\circ}C$ and 20 MPa. The results revealed that the debinding atmosphere had a significant effect on $Si_3N_4$ densification and thermal conductivity. Owing to the higher sintered density and larger grain size, the thermal conductivity of $Si_3N_4$ specimens debinded in air was higher than that of the samples debinded in $N_2$. Thus, debinding in air could be suitable for the manufacture of high-performance SRBSN substrates by tape casting.

• 한국기계가공학회지
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• 제12권6호
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• pp.23-29
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• 2013

In this paper, pure $I_{ph}$ and hybrid carbon nanotube reinforced $I_{ph}$ were sintered using the SPS(spark plasma sintering) method for high densification. A nanosecond laser (${\lambda}=1063nm$, ${\tau}P=10ns$) and a femtosecond laser (${\lambda}=1027nm$, ${\tau}P=380fs$) were installed on an optical system for the micromachining test. The ablation characteristics of the pure $I_{ph}$ and CNT/$I_{ph}$ composites, such as thermal effect and ablation depth, were investigated using FE-SEM and a confocal microscope device. Laser machining results for the two mating materials showed improved performances: CNT/$I_{ph}$ composites showed good surface morphology of hole drilling without a melting zone due to the composites' high thermal properties; also, the ablated depth of CNT/$I_{ph}$ was higher than that of pure $I_{ph}$.

• 한국표면공학회지
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• 제57권3호
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• pp.208-213
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• 2024

With the development of industry, miniaturization and densification of semiconductor components are rapidly progressing. Particularly, as demand surges across various sectors, efficiency in productivity has emerged as a crucial issue in semiconductor component manufacturing. Maximizing semiconductor productivity requires real-time monitoring of semiconductor processes and continuous reflection of the results to stabilize processes. However, various unexpected variables and errors in judgment that occur during the process can cause significant losses in semiconductor productivity. Therefore, while the development of a reliable manufacturing system is important, the importance of developing sensor technology that can complement this and accurately monitor the process is also growing. In this study, conducted a basic research on the concept of diagnostic sensors for thickness based on the physical changes of thin films due to etching. It observed changes in resistance corresponding to variations in thin film thickness as etching processes progressed, and conducted research on the correlation between these physical changes and thickness variations. Furthermore, to assess the reliability of thin film thickness measurement sensors, it conducted multiple measurements and comparative analyses of physical changes in thin films according to various thicknesses.