• 제목/요약/키워드: Dense plasma

검색결과 205건 처리시간 0.033초

Cu Reflow를 이용한 Pd-Cu-Ni 합금 수소분리막 특성 (Characteristic of Pd-Cu-Ni Alloy Hydrogen Membrane using the Cu Reflow)

  • 김동원;김흥구;엄기연;김상호;이인선;박종수;이신근
    • Korean Chemical Engineering Research
    • /
    • 제44권2호
    • /
    • pp.160-165
    • /
    • 2006
  • 니켈 분말을 이용하여 제조된 다공성 니켈 지지체 위에 팔라듐-구리-니켈 합금 수소 분리막을 제조하였다. 다공성 니켈 지지체는 열적안정성과 수소취성에 강한 모습을 나타내었으며, 다공성 니켈 지지체에 기존의 습식 방식인 염산에 의한 표면 전처리 방식을 건식 방식인 플라즈마 표면개질로 대체하였다. 다공성 니켈 지지체의 기공을 매립하기 위해 전해도금방식으로 $2{\mu}m$의 두께로 코팅하였으며, 그 후 니켈 도금된 지지체 위에 스퍼터 방식으로 팔라듐을 $4{\mu}m$, 구리를 $0.5{\mu}m$의 두께로 코팅하였다. 이와 같이 제조된 시편을 $700^{\circ}C$에서 1시간 구리 리플로우를 통해 미세기공이 없는 매우 치밀한 팔라듐-구리-니켈 합금 분리막을 제조하였다. 그 결과 팔라듐-구리-니켈 합금 수소분리막은 다공성 니켈지지체와 좋은 접착성을 가지고 있으며 수소-질소 혼합가스에서 무한대의 분리도 값을 나타내었다.

골융합 촉진을 위한 Ti Gr4의 HA 코팅에 대한 물리적 특성과 생체안정성에 대한 융합적 연구 (Convergence study of mechanical properties and biocompatability of Ti Gr4 surface coated with HA using plasma spray for ossoeintegration)

  • 황갑운
    • 한국융합학회논문지
    • /
    • 제12권12호
    • /
    • pp.145-151
    • /
    • 2021
  • Ti Gr4에 TPS 법을 이용하여 HA 코팅을 수행하여 코팅층에 대한 물리적특성 및 생체적합성을 판단하여 의료용 부품으로서의 활용성에 대한 평가를 하였다. 직경 25mm Ti Gr4 합금 시험편을 기계가공 후 #120, #400, #1,000 샌드페이퍼 및 바렐 연마로 표면을 연마를 하여 ASTM F1185-88로 HA 코팅은 한 후 HA 코팅층의 두께, 표면조도, 강도 및 접착력 측정 시험과 세포독성 시험을 하였다. Ti Gr4에 대한 HA 코팅 결정도는 75.51%, Ca/P 비는 1.67의 값을 얻을 수 있었다. HA 코팅층의 두께는 Ti 소재의 표면거칠기가 거칠수록 증가하고, 코팅의 강도 및 접착력은 시험장치의 지그 형상, 에폭시 성분, 크로스헤드 속도 등에 따라 변화가 있을 것으로 예측된다. 세포독성 시험은 Grade 3의 반응성으로 적합한 것으로 나타났다. 본 실험 결과 TPS에 의한 Ti Gr4 소재의 HA 코팅 두께 향상과 골융합을 촉진이 가능할 것으로 확인되어 인체삽입용으로 상용화가 가능할 것으로 판단된다.

바퀴의 後腸 上皮細胞들에 대한 微細構造 (Ultrastructure of the Hindgut Epithelial Cells in the Cockroach, Blattella germanica L.)

  • 유재혁
    • 한국동물학회지
    • /
    • 제28권1호
    • /
    • pp.44-59
    • /
    • 1985
  • 가옥내에 서식하는 바퀴 (Blattella germanica Linne)의 後腸을 回腸과 直腸部로 구분하여, 그들을 구성하는 上皮細胞의 微細構造를 관찰하였다. 回腸은 扁平 혹은 立方型의 細胞들이 單層上皮를 만들며 그 內面은 cuticular intima로 덮여 있었다. 細胞들은 細胞器官이 고르게 발달하여 吸收細胞의 形態를 하였으며, 細胞質內에서 동심원적인 環狀構造를 하는 層板狀 結晶體, "spherites"가 많이 관찰됨이 특징이었다. 直腸은 圓柱狀인 圓柱狀吸收細胞의 尖端部原形質膜은 微細絨毛로 변형되었고, 側部原形質膜은 약 200$\\AA$간격으로 심하게 주름이 잡혔으며 그 사이에는 크게 발달한 mitochondria가 밀착하여 mitochondrial-scalarifrom complexes를 형성하였다. 그리고 인접 細胞間에는 많은 細胞間隙을 만들며, 그 사이 사이에는 septate junction과 desmosomes 등으로 연접된 것이 여러 곳에서 관찰되었다. 基底細胞는 납작한 杯모양으로서 細胞質의 電子密度가 높아 검게 보였으며, 그 내에는 Golgi complex, endoplasmic reticulum 그리고 mitochondria 등 細胞器官들이 발달되었고 膜의 구조 등으로 미루어 보아 역시 吸收機能을 가진 細胞임을 확인하였다. 한편 直腸의 上皮層과 hemolymph 사이에서 壁의 역할을 하는 basal sheath가 基底面을 따라 평행하게 부착되어 있고, 그 basal sheath와 근육층 사이에는 結合組織이 넓은 subepithelial space를 만들어서 그 내에는 많은 氣官小支들과 밀도가 높은 顆粒들을 갖는 軸索이 분포하고 있었다.

  • PDF

Synthesis and Sinterability of Hydroxyapatite from Fishery by-products

  • Wibisono, Yusuf;Dwijaksara, Ni Luh Bella;Widayatno, Wahyu Bambang;Wismogroho, Agus Sukarto;Amal, Muhamad Ikhlasul;Rochman, Nurul Taufiqu;Nishimura, Toshiyuki;Noviyanto, Alfian
    • 한국세라믹학회지
    • /
    • 제55권6호
    • /
    • pp.570-575
    • /
    • 2018
  • Hydroxyapatites (HAps) were synthesized using the powdered waste of fishery products, i.e., fish scales and crab shells, as starting materials. HAp was synthesized by a wet-chemistry method followed by calcination at 600 and $800^{\circ}C$. Calcined crabshell powder revealed a single HAp phase and fine powder, while calcined fish-scale powder showed a ${\beta}-TCP$ secondary phase, even at the higher calcination temperature. Dense HAp pellets were obtained from the crab-shell powder by spark plasma sintering at $1000^{\circ}C$ for 10 min under applied pressures of 40 and 80 MPa in a vacuum state, giving sample densities of 2.93 and $3.06g/cm^3$, respectively. The estimated grain size of HAp was $448{\pm}96$ and $283{\pm}59nm$ for applied pressures of 40 and 80 MPa, respectively. In contrast, the HAp obtained using the pressureless sintering technique showed excessive grain growth without further densification.

무당거미(Nephila clavata L. Koch) 병상선(甁狀腺)의 미세구조(微細構造) I. 대병상선(大甁狀腺)의 분비관(分泌管) (Ultrastructure of the Ampullate Gland in the Orb Web Spider, Nephila clavata L. Koch I. Excretory Duct of the Large Ampullate Gland)

  • 문명진;김창식;김우갑
    • Applied Microscopy
    • /
    • 제18권2호
    • /
    • pp.77-90
    • /
    • 1988
  • The ultrastructure of the excretory duct of the large ampullate gland in the orb web spider, Nephila clavain L. Koch are studied with light and electron microscopes. The excretory ducts of the large ampullate glands connected with the large spinning tubes(spigots) on the anterior spinnerets are basically composed of three superposed types of the layers which are inner cuticles, monolayered epithelial cells and peripheral connective cells. According to the morphological characteristics of the cuticles and internal textures of the epithelial cells, the long excretory ducts are subdivided into three(distal, middle and proximal) portions. Especially, at the distal portion of the ducts near the spinning tubes, the electron lucent subcuticles which had the functions of water removal and orientation of silk fibers are well distributed, whereas at the middle and proximal portions these layers disappeared and instead of these, endocuticles are developed. The endocuticle contains two types of bands, which are electron dense and electron lucent. And along the length of the cuticular stem in the excretory duct, these two alternating bands are twisted spirally. In the cytoplasm of the columnar epithelial cells of the distal portion, rough endoplasmic reticula and Golgj complexes, related to the production of the cuticular materials are well developed. Between the adjacent epithelial cells, specialized septate junctions and desmosomes are formed along the plasma membranes. At the proximal portion of the duct, densely accumulated secretory materials appeared, and these are released to the inner canal by the apocrine secretion.

  • PDF

유도결합플라즈마의 전력이 TiCrN 코팅층에 미치는 영향 (Effects of ICP Power on the Properties of TiCrN Films)

  • 차병철;김준호;이병석;김선광;김대욱;김대일;유용주
    • 열처리공학회지
    • /
    • 제22권5호
    • /
    • pp.307-311
    • /
    • 2009
  • In this study, TiCrN films were deposited on STS 316 Land Si (100) wafer by inductively coupled plasma (ICP) assisted D.C. magnetron sputtering. The effect R.F. power for ICP discharge on the mechanical properties of TiCrN films was investigated. XRD, XPS and FE-SEM were used for the structure analysis. Also the Micro-Knoop hardness tester and profilometer were used for measuring hardness of coatings and film stress respectively. As increasing the R.F. power for ICP discharge, thickness of coating was decreased from 1633 nm to 1288 nm but hardness was increased about $Hk_{5g}$ 4200 at 400 W. All of the XRD patterns showed (111), (200) and (220) peaks of TiCrN films. Surface morphology was studied using the profilometer. FE-SEM was used to know morphology and cross-section of the films. Structure of the films was changed dense as increased ICP power.

Fabrication of IGZO-based Oxide TFTs by Electron-assisted Sputtering Process

  • 윤영준;조성환;김창열;남상훈;이학민;오종석;김용환
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
    • /
    • pp.273.2-273.2
    • /
    • 2014
  • Sputtering process has been widely used in Si-based semiconductor industry and it is also an ideal method to deposit transparent oxide materials for thin-film transistors (TFTs). The oxide films grown at low temperature by conventional RF sputtering process are typically amorphous state with low density including a large number of defects such as dangling bonds and oxygen vacancies. Those play a crucial role in the electron conduction in transparent electrode, while those are the origin of instability of semiconducting channel in oxide TFTs due to electron trapping. Therefore, post treatments such as high temperature annealing process have been commonly progressed to obtain high reliability and good stability. In this work, the scheme of electron-assisted RF sputtering process for high quality transparent oxide films was suggested. Through the additional electron supply into the plasma during sputtering process, the working pressure could be kept below $5{\times}10-4Torr$. Therefore, both the mean free path and the mobility of sputtered atoms were increased and the well ordered and the highly dense microstructure could be obtained compared to those of conventional sputtering condition. In this work, the physical properties of transparent oxide films such as conducting indium tin oxide and semiconducting indium gallium zinc oxide films grown by electron-assisted sputtering process will be discussed in detail. Those films showed the high conductivity and the high mobility without additional post annealing process. In addition, oxide TFT characteristics based on IGZO channel and ITO electrode will be shown.

  • PDF

습도에 따른 다이아몬드성 카본필름의 잔류응력 변화에 대한 연구 (Humidity Dependence of the Residual Stress of Diamond-like Carbon Film)

  • 이영진;김태영;이광렬;양인상
    • 한국진공학회지
    • /
    • 제13권4호
    • /
    • pp.157-163
    • /
    • 2004
  • 라디오파 플라즈마 화학증착법 (radio frequency plasma assisted chemical vapor deposition: r.f.-PACVD) 법으로 증착된 다이아몬드성 카본 (Diamond-like Carbon : DLC) 필름에서 나타나는 습도에 따른 압축 잔류 응력의 변화 거동을 체계적으로 조사하였다. 합성에 사용된 탄화수소 가스의 종류와 -100V에서 -800V 범위의 기판 바이어스 전압의 조절을 통해 폴리머성 필름에서 흑연성 필름까지 광범위한 구조의 DLC 필름을 합성하였다. 상대습도가 10%-90% 범위에서 변화하는 분위기 챔버 내에서 박막의 잔류응력의 변화를 실시간으로 측정하였다 박막의 경도와 잔류응력이 최고 값을 가지는 합성조건에서 얻어진 치밀한 DLC박막에서는 습도에 따른 잔류응력의 변화가 관찰되지 않았다. 그러나, 폴리머상이나 흑연상의 박막에서는 두 경우 모두 습도가 높아짐에 따라 압축 잔류응력이 증가함을 관찰할 수 있었으며, 습도의 변화에 대해 잔류응력이 즉각적으로 변화하였다. 한편, 동일한 습도에서 압축 잔류응력의 증가량은 필름의 두께에 반비례하는 것이 관찰되었다. 이 결과는 물분자가 필름의 구조내로 침투하면서 생기는 변화가 아니라, 박막의 표면에서 일어나는 물분자와의 반응에 의해 필름의 잔류응력이 변할 수 있음을 의미한다.

a-C:H Films Deposited in the Plasma of Surface Spark Discharge at Atmospheric Pressure. Part I: Experimental Investigation

  • Chun, Hui-Gon;K.V. Oskomov;N.S. Sochungov;Lee, Jing-Hyuk;You, Yong-Zoo
    • 한국표면공학회지
    • /
    • 제36권5호
    • /
    • pp.357-363
    • /
    • 2003
  • The aim of this work is the synthesis of a-C:H films from methane gas using surface spark discharge at the atmospheric pressure. Properties of these films have been investigated as functions of energy W delivered per a methane molecule in the discharge. The method enables the coatings to be deposited with high growth rates (up to $100 \mu\textrm{m}$/hour) onto large-area substrates. It is shown that the films consist of spherical granules with diameter of 20∼50 nm formed in the spark channel and then deposited onto the substrate. The best film characteristics such as minimum hydrogen-to-carbon atoms ratio H/C=0.69, maximum hardness $H_{v}$ =3 ㎬, the most dense packing of the granules and highest scratch resistance has been obtained under the condition of highest energy W of 40 eV. The deposited a-C:H coatings were found to be more soft and hydrogenated compared to the diamond-like hydrogenated (a-C:H) films which obtained by traditional plasmaenhanced chemical vapor deposition methods at low pressure (<10 Torr). Nevertheless, these coatings can be potentially used for scratch protection of soft plastic materials since they are of an order harder than plastics but still transparent (the absorption coefficient is about $10^4$$10^{5}$ $m^{-1}$ At the same time the proposed method for fast deposition of a-C:H films makes this process less expensive compared to the conventional techniques. This advantage can widen the application field of. these films substantially.y.

Formation of Anodic Films on Pure Mg and Mg alloys for Corrosion Protection

  • Moon, Sungmo;Nam, Yunkyung
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2012년도 추계총회 및 학술대회 논문집
    • /
    • pp.16-16
    • /
    • 2012
  • Mg and its alloys have been of great interest because of their low density of 1.7, 30% lighter than Al, but their wide applications have been limited because of their poor resistances against corrosion and/or abrasion. Corrosion resistance of Mg alloys can be improved by formation of anodic films using anodic oxidation method in aqueous electrolytes. Plasma electrolytic oxidation (PEO) is one of anodic oxidation methods by which hard anodic films can be formed as a result of micro-arc generation under high electric field. PEO method utilize not only substrate elements but also chemical components in electrolytes to form anodic films on Mg alloys. PEO films formed on AM50 magnesium alloy in an acidic fluozirconate electrolyte were observed to consist of mainly $ZrO_2$ and $MgF_2$. Liu et al reported that PEO coating on AM30 Mg alloy consists of $MgF_2$-rich outer porous layer and an MgO-rich dense inner layer. PEO films prepared on ACM522 Mg die-casting alloy in an aqueous phosphate solution were also reported to be composed of monoclinic $Mg_3(PO_4)_2$. $CeO_2$-incorporated PEO coatings were also reported to be formed on AZ31 Mg alloys in $CeO_2$ particle-containing $Na_2SiO_3$-based electrolytes. Magnesium tin hydroxide ($MgSn(OH)_6$) was also produced on AZ91D alloy by PEO process in stannate-containing electrolyte. Effects of $OH^-$, $F^-$, $PO{_4}^{3-}$ and $SiO{_3}^{2-}$ ions and alloying elements of Al and Sn on the formation of PEO films on pure Mg and Mg alloys and their protective properties against corrosion have been investigated in this work. $PO{_4}^{3-}$, $F^-$ and $SiO{_3}^{2-}$ ions were observed to contribute to the formation of PEO films but $OH^-$ ions were found to break down the surface films under high electric field. The effect of pulse current on the formation of PEO films will be also reported.

  • PDF