• Tribology and Lubricants
• /
• v.31 no.6
• /
• pp.239-244
• /
• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• Archives of Reconstructive Microsurgery
• /
• v.14 no.2
• /
• pp.144-151
• /
• 2005

Purpose: Disaster as traffic accident, industrial disaster, high voltage electrical bum and flame burn of extremity have a destructive effect because of the involvement of deep structure. Generally, such injury may result in decreased function or loss of limb. In this study the successful use of the combined scapular/parascapular flap as microsurgical transfer to cover extensive defect of electrical and flame bum is reported. Material and Method: Between January 2000 and June 2001, the combined scapular and parascapular flap was used for the coverage of soft tissue defect for 7 patients were admitted to our department with high voltage electrical bum and flame burn. The recipient site were the wrist joint in 2 cases, the forearm in 1 case, the ankle joint in 1 case, the foot dorsum in 1 case, the heel in 1 case. Result: Flap survival was complete in all patients. The result of flap coverage for these deep wound was successful. Conclusion: The advantages of scapular/parascapular combined flap were coverage of the large defect, easy shaping of the flap to fit the required three dimensional configuration around the joint, non hair bearing skin of uniform thickness, minimal donor site morbidity.

• Archives of Craniofacial Surgery
• /
• v.12 no.1
• /
• pp.37-42
• /
• 2011

Purpose: Cancer arising from the external auditory canal is a rare disease. A lesion that seems harmless in someway, can be lethal when inadequately excised, the tumor may infiltrate nerves, the parotid and auditory tissues before re-invading the skin. Wide resection of the lesion surrounding the structure and reconstruction with an adequate plan is crucial for the treatment of this disease. Methods: Two patients with external auditory canal cancer were treated with muscle flaps and skin grafts. Lateral temporal bone resection (LTBR) was performed for complete resection of the cancer. The defect cavity was obliterated with highly vascularized tissue using pedicled sternocleidomastoid muscle, and temporalis muscle individually, combined with full thickness skin graft for covering the skin defect of the ear. Results: Clear resection margin was obtained, and both patients showed disease free survival during the follow up. There was no complications of hematoma, infection, flap loss, or wound problem in both patients. Both patient received radiation therapy, there was no osteoradionecrosis or any other complication related to radiation therapy. Conclusion: Utilizing pedicled muscle flaps for managing defects after wide resection of the external auditory canal cancer is an effective method for managing this difficult disease.

• Proceedings of the Korea Information Processing Society Conference
• /
• 2022.11a
• /
• pp.625-627
• /
• 2022

In the construction and development of modern industrial production technology, the traditional technology management mode is faced with many problems such as low qualification rates and high application costs. In the research, an improved workpiece defect detection method based on deep learning is proposed, which can control the application cost and improve the detection efficiency of irregular defects. Based on the research of the current situation of deep learning applications, this paper uses the improved Faster R-CNN network structure model as the core detection algorithm to automatically locate and classify the defect areas of the workpiece. Firstly, the robustness of the model was improved by appropriately changing the depth and the number of channels of the backbone network, and the hyperparameters of the improved model were adjusted. Then the deformable convolution is added to improve the detection ability of irregular defects. The final experimental results show that this method's average detection accuracy (mAP) is 4.5% higher than that of other methods. The model with anchor size and aspect ratio (65,129,257,519) and (0.2,0.5,1,1) has the highest defect recognition rate, and the detection accuracy reaches 93.88%.

• Korean Journal of Materials Research
• /
• v.4 no.7
• /
• pp.792-797
• /
• 1994

Force fields of syndiotactic isoregic PVF crystal have been extracted by optimizing a structure of 2,4,6-trifluoroheptane with ab initio Quantum mechanical method with 6-31G * * basis set, and applied to calculate the structure parameters and elastic constants of the material. The cell parameters turned out to be 5.205$\AA$, of a axis(chain axis), 8.457$\AA$, of b axis and 4.621$\AA$ of c axis. These parameters are in fair agreement with those of the atactic X-ray structure(5.04$\AA$, 8.57$\AA$, and 4.95$\AA$,respectively). The young's modulus of defect free syndiotactic PVF crystal was computed to be 267 GPa comparable to those of polyvinilidene fluoride(277-293 GPa) and polyethylene(264-337 GPa) crystals. Bulk modulus value obtained at optimum geometry is more than twice greater than that obtained at experimental geometry due to large difference of elastic compliance constant (especially Sgj element) at these two different geometries.

• Smart Structures and Systems
• /
• v.21 no.5
• /
• pp.687-694
• /
• 2018

The problem of wheel tread defects has become a major challenge for the health management of high-speed rail as a wheel defect with small radius deviation may suffice to give rise to severe damage on both the train bogie components and the track structure when a train runs at high speeds. It is thus highly desirable to detect the defects soon after their occurrences and then conduct wheel turning for the defective wheelsets. Online wheel condition monitoring using wheel impact load detector (WILD) can be an effective solution, since it can assess the wheel condition and detect potential defects during train passage. This study aims to develop an FBG-based track-side wheel condition monitoring method for the detection of wheel tread defects. The track-side sensing system uses two FBG strain gauge arrays mounted on the rail foot, measuring the dynamic strains of the paired rails excited by passing wheelsets. Each FBG array has a length of about 3 m, slightly longer than the wheel circumference to ensure a full coverage for the detection of any potential defect on the tread. A defect detection algorithm is developed for using the online-monitored rail responses to identify the potential wheel tread defects. This algorithm consists of three steps: 1) strain data pre-processing by using a data smoothing technique to remove the trends; 2) diagnosis of novel responses by outlier analysis for the normalized data; and 3) local defect identification by a refined analysis on the novel responses extracted in Step 2. To verify the proposed method, a field test was conducted using a test train incorporating defective wheels. The train ran at different speeds on an instrumented track with the purpose of wheel condition monitoring. By using the proposed method to process the monitoring data, all the defects were identified and the results agreed well with those from the static inspection of the wheelsets in the depot. A comparison is also drawn for the detection accuracy under different running speeds of the test train, and the results show that the proposed method can achieve a satisfactory accuracy in wheel defect detection when the train runs at a speed higher than 30 kph. Some minor defects with a depth of 0.05 mm~0.06 mm are also successfully detected.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2004.08a
• /
• pp.1229-1232
• /
• 2004

The ratio of optimized concentration on optical characteristics for phase-separated composite organic films (PSCOF) liquid crystal display is 30% of pre-polymer (NOA65) and 70% of ferroelectric liquid crystal (Felix). The layer structure in ferroelectric liquid crystal cell made by 30% NOA65 and 70% Felix materials is tilt-bookshelf layer structure. The angle of tilt-bookshelf structure are 17$^{\circ}$, 12$^{\circ}$ which are almost same of tilt angle of ferroelectric liquid crystal in Sm $C^{\ast}$ phase. We know that this result is from compensating the layer buckling. In this paper, we will discuss the effect of layer structure in PSCOF cell on ratio of concentration between pre-polymer and liquid crystal by x-ray measurements. We believe that technology of PSCOF is a good solution to solve the problems of align-defect and mechanical shock for future TV application and plastic LCD.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2006.08a
• /
• pp.1756-1760
• /
• 2006

LTPS technology based on SLS Crystallization was intensively reviewed. LTPS structure produced by SLS crystallization is composed of much larger grains compared with conventional ELA crystallization structure, which can give higher TFT performances. However, TFT performance uniformity and anisotropy problem should be solved for it to be used in mass production. TFT performance uniformity was from main grain boundary position and could be solved by equal defect area structure $(EDAS^{TM})$. TFT performance anisotropy could be also solved by multi-channel (MC) structure that can make parallel component in perpendicular channel direction. The higher TFT performances from SLS technology can make superior optical and/or electrical properties and has been adopted in mass production successfully.

• Sleep Medicine and Psychophysiology
• /
• v.9 no.1
• /
• pp.9-13
• /
• 2002

Alzheimer's disease (AD) is one of the most common and devastating dementing disorders of old age. Most AD patients showed significant alternation of sleep structure as well as cognitive deficit. Typical findings of sleep architecture in AD patients include lower sleep efficiency, higher stage 1 percentage, and greater frequency of arousals. The slowing of EEG activity is also noted. Abnormalities in REM sleep are of particular interest in AD because the cholinergic system is related to both REM sleep and AD. Several parameters representing REM sleep structure such as REM latency, the amount of REM sleep, and REM density are change in patients with AD. Especially, measurements of EEG slowing during tonic REM sleep can be used as an EEG marker for early detection of possible AD. In addition, a structural defect in the suprachiasmatic nucleus is suggested to cause various chronobiological alternations in AD. Most of alternations related to sleep make sleep disturbances common and disruptive symptoms of AD. In this article, the author reviewed the alternation of sleep structure and circadian rhythm in AD patients.

• Transactions on Electrical and Electronic Materials
• /
• v.18 no.6
• /
• pp.359-363
• /
• 2017

A slotted implantable patch antenna with microstrip feeding is proposed for industrial, scientific, and medical band applications. The result is verified by implanting the antenna in animal tissue. Further, by varying the ground width and introducing a defect into the ground structure, the antenna becomes applicable for worldwide interoperability for microwave access operations. A simulation is performed using Empire XCcel software. An Agilent vector network analyzer is used for analyzing the return loss performance. Simulated and measured results are compared. Antennas with and without defected ground structure both have key advantages including low profile, desirable return loss, good impedance matching and required bandwidth.