• Journal of the Microelectronics and Packaging Society
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• v.13 no.3 s.40
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• pp.13-17
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• 2006

Dense and periodic arrays of holes and tungsten none dots were fabricated on silicon oxide and silicon. The holes were approximately 25 nm wide, 40 nm deep, and 60 nm apart. To obtain nano-size patterns, self-assembling resists were used to produce layer of hexagonally ordered parallel cylinders of polymethylmethacrylate(PMMA) in polystyrene(PS) matrix. The PMMA cylinders were degraded and removed with acetic acid rinse to produce a PS mask for pattern transfer. The silicon oxide was removed by fluorine-based reactive ion etching(RIE). Selectively deposited tungsten nano dots were formed inside nano-sized trench by using a low pressure chemical vapor deposition(LPCVD) method. Tungsten nano dot and trenched silicon sizes were 26 nm and 30 nm, respectively.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1968-1970
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• 1996

We investigate a surface-micromachined polysilicon microgyroscope, whose resonant frequencies are electrostatically-tunable after fabrication. The microgyroscope with two oscillation nudes has been designed so that the resonant frequency in the sensing mode is higher than that in the actuating mode. The microgyroscope has been fabricated by a 4-mask surface-micrormachining process, including the deep RIE of a $6{\mu}m$-thick LPCVD polycrystalline silicon layer. The resonant frequency in the sensing mode has been lowered to that in actuating mode through the adjustment of an inter-plate bias voltage; thereby achieving a frequency matching at 5.8kHz under the bias voltage of 2V in a reduced pressure of 0.1torr. For an input angular rate of $50^{\circ}/sec$, an output signal of 20mV has been measured from the tuned microgyroscope under an AC drive voltage of 2V with a DC bias voltage of 3V.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.508-515
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• 2005

We propose a fabrication method for refractive lens by variable velocity moving mask lithography and slit pattern. Distribution of exposure dose should be controlled for the curved photoresist surface that works as a refractive surface. We analyze theoretically the distribution of exposure dose by change of moving velocity, moving direction of mask and the shape of mask pattern, and confirm for the curved surface experimentally. The lens could have sag height of a few of hundreds ${\mu}m$, by using thick photoresist or Deep RIE process.

• Fire Science and Engineering
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• v.29 no.2
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• pp.13-19
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• 2015

Real scale fire tests was carried out for extinguishing performance evaluation of the wetting agent. The experiment was conducted in accordance with a Class A fire extinguishing test methods specified in the 'Type Approval of the Manual System Fire Extinguisher and Technical Standards of Test'. In addition, the subjects of this experiment were the wood flour and rice husk. Fire-fighting water, the three kinds of wetting agents used in the country and this study was used, was undertaken to determine a clear discrimination of the water and wetting agent. In the experimental results, it was confirmed that the internal temperature is maintained long time in the case of water. The internal temperature were rapidly lowered in the experiment of wetting agents. Therefore, the discrimination of extinguishing ability was confirmed by the temperature distribution in accordance with time. Based on the results of this experiment, this study is expected to be used as a underlying material on presenting a method of optimized performance evaluation of wetting extinguishing agent.

• Fire Science and Engineering
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• v.28 no.2
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• pp.14-19
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• 2014

A current standard exist only on the surface tension in the current domestic wetting agent technology standards, so it is difficult to the performance evaluation of the wetting agent through the standard. So this study presents the optimized performance evaluation methods by scale model experimental equipment in order to present techniques for performance evaluation of wetting agents. The purpose of this study is to investigate validity of experimental results of the self-designed scale model experiment equipment by a comparative analysis of experimental results of the NFPA 18 experiment and the experiment using the self-designed scale model experiment equipment. As a result of a comparative analysis of experimental results of the NFPA 18 experiment that evaluate only the permeation performance on the contton and the experiment using the self-designed scale model experiment equipment that evaluate the permeation performance and fire extinguishing performance on wood flour, the discrimination of the permeation performance was confirmed in both the NFPA 18 experiment and the self-designed scale model experiment equipment. And a result of self-designed experiment equipment have clear discriminatory more than NFPA 18 by internal temperature measurement using the thermocouples.

• Fire Science and Engineering
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• v.28 no.2
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• pp.20-25
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• 2014

In this study, the extinguishing performance evaluation of wetting agent for wood crib was conducted by using a scale model equipment that we designed. To confirm the optimal conditions of the experiment, a test was changed amount of fire extinguishing water and the number of timber. As a result, the discrimination of the fire extinguishing performance was seen only when 20 pieces of wood and the extinguishing water of 100 mL were used. After evaluating the extinguishing performance of domestic and foreign wetting extinguishing agents under these conditions, a reignition was occurred in only when we used water. In addition, the discrimination of extinguishing performance was seen through the temperature distribution according to the time of watering. Based on the results of this experiment, this study is expected to be able to use as a basis on presenting a method of optimized performance evaluation of wetting extinguishing agent.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.4
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• pp.169-174
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• 2002

This paper presents a high-resolution capactive microaccelerometer using branched finger electrodes with high-amplitude sense voltage. From the fabricated microacceleromcter, the total noise is obtained as 9 $\mu\textrm{g}$/√Hz at the sense voltage of 16.5V, while the conventional microaccelerometers have shown the noire level of 25~800 $\mu\textrm{g}$/√Hz. We reduce the mechanical noise level of the microaccelerometer by increasing the proof-class based on deep RIE process of an SOI wafer. We reduce the electrical noise level by increasing the amplitude of AC sense voltage. The nonlinearity problem caused by the high-amplitude sense volage has been solved by a new electrode design of branched finger type, resulting in self force-balancing effects for the enhanced linearity and bandwidth. The fabricated microaccelerometer shows the electrical noise of 2.4 $\mu\textrm{g}$/√Hz at the sense voltage of 16.5V, which is an order of magnitude reduction of the electrical noise of 24.3 $\mu\textrm{g}$/√Hz measured at 0.9V. For the sense voltage higher than 2V, the electrical noise of the microaccelerometer is lower than the voltage-independent mechanical noise of 11 $\mu\textrm{g}$/√Hz. Total noise, composed of the electrical noise and the mechanical noire, has been measured as 9 $\mu\textrm{g}$/√Hz at the sense voltage of 16.5V, which is 31% of the total noise of 28.6 $\mu\textrm{g}$/√Hz at the sense voltage 0.9V. The self force-balancing effect in the blanched finger electrodes increases the stiffness of the microaccelerometer from 1.1N/m to 1.61N/m as the sense voltage increases from 0V to 17.8V, thereby generating additional stiffness at the rate of 0.0016$\pm$0.0008 N/m/V$^2$.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.11
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• pp.1-5
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• 2010

We developed a novel micro-electro mechanical systems (MEMS) test socket using silicon on insulator (SOI) substrate with the cantilever array structure. We designed the round shaped cantilevers with the maximum length of $350{\mu}m$, the maximum width of $200{\mu}m$ and the thickness of $10{\mu}m$ for $650{\mu}m$ pitch for 8 mm x 8 mm area and 121 balls square ball grid array (BGA) packages. The MEMS test socket was fabricated by MEMS technology using metal lift off process and deep reactive ion etching (DRIE) silicon etcher and so on. The MEMS test socket has a simple structure, low production cost, fine pitch, high pin count and rapid prototyping. We verified the performances of the MEMS test sockets such as deflection as a function of the applied force, path resistance between the cantilever and the metal pad and the contact resistance. Fabricated cantilever has 1.3 gf (gram force) at $90{\mu}m$ deflection. Total path resistance was less than $17{\Omega}$. The contact resistance was approximately from 0.7 to $0.75{\Omega}$ for all cantilevers. Therefore the test socket is suitable for BGA integrated circuit (IC) packages tests.