• Korean Journal of Materials Research
• /
• v.14 no.6
• /
• pp.443-450
• /
• 2004

Parylene polymer thin film shows excellent homogeneous coverage chracteristics when it was deposited onto very complex three dimensional solid matters, such as deep hole and micro crack. The parylene deposition process can be conducted at room temperature although most of chemical vapor deposition processes request relatively high processing temperature. Therefore, the parylene coating process does not induce any thermal problems. Parylene thin film is transparent and has extremly high chemical stability. For example, it shows high chemical stability with high reactive chemical solutions such as strong acid, strong alkali and acetone. The bio-stability of this material gives good chances to use for a packaging of biomedical devices and electronic devices such as display. In this review article, principle of deposition process, properties and application fields of parylene polymer thin film are introduced.

• Journal of the Optical Society of Korea
• /
• v.18 no.5
• /
• pp.531-537
• /
• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• Proceedings of the Computational Structural Engineering Institute Conference
• /
• 2003.10a
• /
• pp.403-409
• /
• 2003

The finite element method is one of the most widely used method of structural analysis that has wide applications in diverse fields of engineering and science. The method has been proven effective and reliable in many practical problems. One of the reasons for the methods' popularity is its ease of use, but still the user has to input the finite element mesh which affects the accuracy of the results. The knowledge required to form an effective mesh for a given problem is somewhat complex and for sometime there has been research effort to automate the generation of the mesh and this is called the adaptive mesh generation scheme. A good adaptive mesh scheme seemed to require an accurate assessment of error and generally this requires some additional computation. This paper looks into the possibility of generating adaptive meshes based on representative strain values in each finite element method. The proposed adaptive scheme does not require additional computations other that looking up the data values already computed as finite element analysis results and simple manipulations of these data. Two plane stress problems, a plate with a hole and a deep beam with a concentrated load at the end are considered to show the progress of the improved generation of adaptive meshes using the scheme.

• Transactions on Electrical and Electronic Materials
• /
• v.2 no.4
• /
• pp.24-29
• /
• 2001

GaN films were grown for various Mg doping concentrations in metal-organic chemical vapor deposition. Below the Mg concentration of 10$^{19}$ ㎤, the thermally annealed sample shows the compensated phase to n-type GaN in Hall measurement. In the MB concentration of 4$\times$10$^{19}$ ㎤ corresponding to the hole carrier concentration of 2.6$\times$1$^{19}$ ㎤ there exists a photoluminescence center of the donor and the acceptor pair transition of the 3.28-eV band. This center is correlated with the defects for a shallow donor of the $V_{Ga}$ and for an acceptor of $Mg_{Ga}$ . The acceptor level shows the binding energy of 0.2-0.25 eV, which was observed by the photon energy of the photocurrent signal of 3.02-3.31 eV. Above the Mg concentration of 4$\times$10$^{19}$ ㎤, both the Mg doping level and Mg concentration were saturated and there Is a photoluminescence center of a deep donor and an acceptor pair transition of the 2.76-eV blue band.

• Journal of the Korean Institute of Landscape Architecture
• /
• v.31 no.3
• /
• pp.107-113
• /
• 2003

Ecological control can contribute to the sustainibility of vegetation management systems by reducing the input currently derived from non-renewable fossil energy sources. The use of turfgrass mixtures is an important tool in turf management. Turfgrass mixtures of two or more compatible and adapted species provide improved tolerance to pest and environmental stress, more so than monostands. The objectives of this study were to evaluated turf insects, pests and zoysia large patch control by turgrass mixtures. In April 2001 and 2002, plots were inoculated with 50g of Rhizoctonia solani AG2-2LP inoculum. Inoculum were treated within a 29cm diamater circle at Zoysia japonica, Zoysia japonica, Poa pratenis, or Festuca arundinacea mixtures. After four weeks, disease severity in each plot was determined. plot area visual ratings were assessed visually on a linera 0 to 100%. In August 2001 and October 2002, turf insects and pests in each plot were investigated in 10cm deep soil cores with 8cm diameters using hole cut. Zoysia large patch affected zoysiagrass monostands more severly than zoysiagrass and cool-season turfgrasses mixtures. It was suggested that the barrier effect of cool-season turfgrass suppressed zoysia large patch in the mixture of zoysiagrass and cool-season turfgrasses. Also, warm-season and cool-season turfgrasses mixtures suppressed insect populations more efficiently than warm-season turfgrass monostands.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.63-63
• /
• 2000

Deep submicron device contact hole에서의 bottom step coverage의 향상 및 SALICIDE공정의 필요성에 의해 collimated sputtering 및 ionized sputtering 등의 다양한 증착방법이 연구되어왔다. 반도체소자의 고집적화 및 미세화에 따라서 기존의 증착방법보다 더 높은 throughput을 가진 새로운 증착방법의 필요성이 대두되고 있다. Collimated sputtering방식으로 증착한 박막의 경우에는 증착속도가 느리고 collimator의 사용기간에 따른 공정조건의 변화가 단점으로 작용하였고 새로이 ionzied sputtering방식이 개발되었다. ionzied sputtering방식은 증착되는 금속 입자를 이온화시키고 기판에 바이어스를 걸어서 증착되는 입자의 방향성 및 증착속도의 향상을 얻을 수 있었다. 하지만 고집적도가 더욱 증가함에 따라서 더 높은 박막의 증착속도, bottom step coverage의 향상, 방향성의 향상과 더불어 증착되는 입자의 이온화 율의 증가 및 기존의 증착방식에 의한 박막보다 향상된 물성을 가진 박막증착의 필요성에 의해 hollow cathode magnetron sputtering방식이 연구되었다. HCM방식으로 titanium 박막을 증착하여 collimated sputtering 및 ionize sputtering 방식으로 증착한 titanium 박막과 물성을 비교해서 증착방식에 따른 박막물성의 차이를 연구하였다. 증착전에 기판온도는 30$0^{\circ}C$를 유지하였고 base pressure는 5.0$\times$10-9torr, working pressure는 5.7m torr로 유지하였다. power는 30kW를 가하여 50nm두께의 titanium박막을 증착하였다. 증착된 박막의 미세구조는 TEM 및 XRD로 분석하였다. HCM방식으로 증착한 titanium박막은 5nm두께의 비정질 층이 관찰되었고 ionized sputtering방식으로 증착한 titatnium박막에서 나타나는 것으로 보고된 silicon (002)와 titanium (0002) eledtron diffraction spot사이의 (10-10)spot은 관찰되지 않았다. 박막은 크고 작은 grain의 연속적 분포를 가졌고 HCM방식으로 증착한 titanium박막의 in-plane grain size가 다른 증착방식으로 증착한 박막에 비해 크게 관찰됨을 Plan-view TEM 분석을 통해서 확인되었다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.244.2-244.2
• /
• 2013

Contact Pattern을 Plasma Etching을 통해 Pattering 공정을 진행함에 있어서 Plasma 내에 존재하는 High Energy Ion 들의 Bombardment 에 의해, Contact Bottom 의 Silicon Lattice Atom 들은 Physical 한 Damage를 받아 Electron 의 흐름을 방해하게 되어, Resistance를 증가시키게 된다. 또한 Etchant 로 사용되는 Fluorine 과 Chlorine Atom 들은, Contact Bottom 에 Contamination 으로 작용하게 되어, 후속 Contact 공정을 진행하면서 증착되는 Ti 나 Co Layer 와 Si 이 반응하는 것을 방해하여 Ohmic Contact을 형성하기 위한 Silicide Layer를 형성하지 못하도록 만든다. High Aspect Ratio Contact (HARC) Etching 을 진행하면서 Contact Profile을 Vertical 하게 형성하기 위하여 Bias Power를 증가하여 사용하게 되는데, 이로부터 Contact Bottom에서 발생하는 Etchant 로 인한 Damage 는 더욱 더 증가하게 된다. 이 Damage Layer를 추가적인 Secondary Damage 없이 제거하기 위하여 본 연구에서는 원자층 식각방법(Atomic Layer Etching Technique)을 사용하였다. 실험에 사용된 원자층 식각방법을 이용하여, Damage 가 발생한 Si Layer를 Secondary Damage 없이 효과적으로 Control 하여 제거할 수 있음을 확인하였으며, 30 nm Deep Contact Bottom 에서 Damage 가 제거될 수 있음을 확인하였다. XPS 와 Depth SIMS Data를 이용하여 상기 실험 결과를 확인하였으며, SEM Profile 분석을 통하여, Damage 제거 결과 및 Profile 변화 여부를 확인하였으며, 4 Point Prove 결과를 통하여 결과적으로 Resistance 가 개선되는 결과를 얻을 수 있었다.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
• /
• v.21 no.4
• /
• pp.517-529
• /
• 2023

The objectives of this paper are: (1) to conduct the thermal analyses of the disposal cell using COMSOL Multiphysics; (2) to determine whether the design of the disposal cell satisfies the thermal design requirement; and (3) to evaluate the effect of design modifications on the temperature of the disposal cell. Specifically, the analysis incorporated a heterogeneous model of 236 fuel rod heat sources of spent nuclear fuel (SNF) to improve the reality of the modeling. In the reference case, the design, featuring 8 m between deposition holes and 30 m between deposition tunnels for 40 years of the SNF cooling time, did not meet the design requirement. For the first modified case, the designs with 9 m and 10 m between the deposition holes for the cooling time of 40 years and five spacings for 50 and 60 years were found to meet the requirement. For the second modified case, the designs with 35 m and 40 m between the deposition tunnels for 40 years, 25 m to 40 m for 50 years and five spacings for 60 years also met the requirement. This study contributes to the advancement of the thermal analysis technique of a disposal cell.

• Geophysics and Geophysical Exploration
• /
• v.25 no.4
• /
• pp.167-176
• /
• 2022

We designed a borehole deviation survey tool applicable for steel-cased holes, K-DEV, and developed a prototype for a depth of 500 m aiming to development of own equipment required to secure deep subsurface characterization technologies. K-DEV is equipped with sensors that provide digital output with verified high performance; moreover, it is also compatible with logging winch systems used in Korea. The K-DEV prototype has a nonmagnetic stainless steel housing with an outer diameter of 48.3 mm, which has been tested in the laboratory for water resistance up to 20 MPa and for durability by running into a 1-km deep borehole. We confirmed the operational stability and data repeatability of the prototype by constantly logging up and down to the depth of 600 m. A high-precision micro-electro-mechanical system (MEMS) gyroscope was used for the K-DEV prototype as the gyro sensor, which is crucial for azimuth determination in cased holes. Additionally, we devised an accurate trajectory survey algorithm by employing Unscented Kalman filtering and data fusion for optimization. The borehole test with K-DEV and a commercial logging tool produced sufficiently similar results. Furthermore, the issue of error accumulation due to drift over time of the MEMS gyro was successfully overcome by compensating with stationary measurements for the same attitude at the wellhead before and after logging, as demonstrated by the nearly identical result to the open hole. We believe that the methodology of K-DEV development and operational stability, as well as the data reliability of the prototype, were confirmed through these test applications.

• Journal of the Mineralogical Society of Korea
• /
• v.17 no.1
• /
• pp.99-114
• /
• 2004

Mineralogical characteristics of fracture-filling minerals from deep borehole in the Yuseong area were studied for the radioactive waste disposal project. There are many fracture zones in the deep drill holes of the Yuseong granite, which was locally affected by the hydrothermal alteration. According to the results of hole rock analysis of drill core samples, $SiO_2$ contents are distinctly decreased, whereas $Al_2$$O_3$ and CaO contents and L.O.I. values are increased in the -90 m∼-130 m and -230 m∼-250 m zone, which is related to the formations of filling minerals. Fracture-filling minerals mainly consist of zeolite minerals (laumontite and heulandite), calcite, illite ($2M_1$ and 1Md polytypes), chlorite, epidote and kaolinite. The relative frequency of occurrence among the fracture-filling minerals is calcite zeolite mineral > illite > epidote chlorite kaolinite. Judging from the SEM observation and EPMA analysis, there is no systematic change in the texture and chemical composition of the fracture-filling minerals with depth. In the study area, low temperature hydrothermal alteration was overlapped with water-rock interactions for a long geological time through the fracture zone developed in the granite body. Therefore the further study on the origin and paragenesis of the fracture-filling minerals are required.