Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Characteristics of Parylene Polymer and Its Applications

파릴렌 고분자의 특성 및 응용

  • Yoon Young-Soo (Department of Advanced Fusion Technology, Konkuk University) ;
  • Choi Sun-Hee (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
  • Kim Joo-Sun (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
  • Nam Sang-Cheol (Microcell Center, Nuricell Inc.)
  • 윤영수 (건국대학교 신기술융합과) ;
  • 최선희 (한국과학기술연구원 나노재료연구센터) ;
  • 김주선 (한국과학기술연구원 나노재료연구센터) ;
  • 남상철 ((주)누리셀 마이크로셀 센터)
  • Published : 2004.06.01
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Abstract

Parylene polymer thin film shows excellent homogeneous coverage chracteristics when it was deposited onto very complex three dimensional solid matters, such as deep hole and micro crack. The parylene deposition process can be conducted at room temperature although most of chemical vapor deposition processes request relatively high processing temperature. Therefore, the parylene coating process does not induce any thermal problems. Parylene thin film is transparent and has extremly high chemical stability. For example, it shows high chemical stability with high reactive chemical solutions such as strong acid, strong alkali and acetone. The bio-stability of this material gives good chances to use for a packaging of biomedical devices and electronic devices such as display. In this review article, principle of deposition process, properties and application fields of parylene polymer thin film are introduced.

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