• 대한안전경영과학회지
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• 제7권5호
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• pp.255-273
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• 2005

Overlay parameter control of the semiconductor photolithography process is researched in this paper. Overlay parameters denote the error in superposing the current pattern to the pattern previously created. The reduction of the overlay deviation is one of the key factors in improving the quality of the semiconductor products. The semiconductor process is affected by numerous environment and equipment factors. Through process condition prediction and control, the overlay inaccuracy can be reduced. Generally, three types of process condition change exist; uncontrollable white noise, slowly changing drift, and abrupt condition shift. To effectively control the aforementioned process changes, control scheme using adaptive deadband is proposed. The suggested approach and existing control method are cross evaluated through simulation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.456-460
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• 1996

A nonlinear control scheme for preventing limit cycle due to the nonlinearity of themulti-step bang-bang actuator in mechanical position control systems is proposed. A linearized model, SIDF, fora multi-step bang-bang actuator is introduced to compensate the nonlinearity of the multi-step bang-bang actuator. Using that model, a $H_{\infty}$robust controller for position control systms with a bang-bang actuator is proposed by loop shaping tecniques with normalized coprime factorization stabilization to address the robustness. The proposed scheme needs a smaller deadband as a result of compensating the nonlinearity of the bang-bang actuator. A single-axis servo system is served in order to verify the proposed control scheme experimentally. Experimental results show that the controller can satisfy the special intersts, silent contact switching of the actuator.r.

• 제어로봇시스템학회논문지
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• 제2권4호
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• pp.257-263
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• 1996

본 논문에서는 기계적 위치 제어계에서 다단계 뱅-뱅 액츄에이터의 비선형성에 의한 목표 위치에서의 리미트 사이클을 방지하는 제어방법을 제안한다. 다단계 뱅-뱅 액츄에이터의 선형화된 모델인 기술함수를 이용하여 비선형성을 보상한다. 강인성을 확보하기 위해 루프 형성 기법에 의한 H/sub .inf./ 제어기가 설계된다. 제안된 제어방법은 기존의 선형제어기보다 비선형성이 보상되어 사역대가 작아지므로 최소 제어 가능 구간을 줄일 수 있다. 1축 위치 제어계의 실험을 하여 제안된 제어방법이 리미트 사이클을 줄이고 제어정도를 향상 시키는데 유효함을 입증하였다.

• 한국초전도ㆍ저온공학회논문지
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• 제15권1호
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• pp.19-24
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• 2013

In this paper, the Superconductor flywheel energy storage system (SFESS) was used for the load frequency control (LFC) of an interconnected 2 area power system. The robust SFESS controller using quantitative feedback theory (QFT) was designed to improve control performance in spite of parameter uncertainty and unexpected disturbances. An overlapping decomposition method was applied to simplify SFESS controller design for the interconnected 2 area power system. The model for simulation of the interconnected 2 area power system included the reheat steam turbine, governor, boiler dynamics and nonlinearity such as governor deadband and generation rate constraint (GRC). To verify robust performance of proposed SFESS controller, dynamic simulation was performed under various disturbances and parameters variation of power system. The results showed that the proposed SFESS controller was more robust than the conventional method.

• Journal of Biosystems Engineering
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• 제14권3호
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• pp.168-180
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• 1989

This study was attempted to develop the electronic-hydraulic hitch control system for position control of tractor plow and investigate the control performance of the system through experiments. Experiments were carried out to investigate the responses of the system to the step and sinusoidal inputs in position control. The effects of control mode, hydraulic flow rate, reference deadband, and proportional constant on control performance of the system were investigated. The following conclusions were derived from the study; 1. For the position control system operated on on-off control mode, positions of implement were controlled within ${\pm}0.73^{\circ}{\sim}{\pm}1.46^{\circ}$ in rockshaft angle to the reference position when the hydraulic flow rates were 5~15 l/min. For the position control system operated on PWM control mode, positions of implement were controlled within ${\pm}0.73^{\circ}$ to the reference position regardless of hydraulic flow rates. It means that the implement could be positioned more accurately to the reference position on PWM control mode than on on-off control mode. 2. As results of the frequency responses of the position control systems, no clear difference in control performance between on-off control and PWM control modes was found. As the hydraulic flow rates increased, the corner frequencies of amplitude attenuation and phase-angle change increased. It means that the control performance of the system could be improved as the hydraulic flow rate increases.

• 대한산업공학회지
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• 제32권3호
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• pp.210-218
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• 2006

Traditional statistical process control (SPC) applied to discrete part industry in the form of control charts can look for and eliminate assignable causes by process monitoring. On the other hand, engineering process control (EPC) applied to the process industry in the form of feedback control can maintain the process output on the target by continual adjustment of input variable. This study presents controlling and monitoring rules adopted by variable sampling interval (VSI) to change sampling intervals in a predetermined fashion on the predicted process levels under integrated EPC and SPC systems. Twelve rules classified by EPC schemes(MMSE, constrained PI, bounded or deadband adjustment policy) and type of sampling interval combined with EWMA chart of SPC are proposed under IMA (1,1) disturbance model and zero-order (responsive) dynamic system. Properties of twelve control rules under three patterns of process change (sudden shift, drift and random shift) are evaluated and discussed through simulation and control rules for integrated VSI EPC and SPC systems are recommended.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2375-2380
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• 2008

Controlling of thermal environment and flow in nanoimprint process chamber is important to ensure high precision levels of products. The purpose of this paper is to build optimal nanoimprint process environment. Because of this, Optimum PI control parameter for precise temperature control has been examined. Also porous medium of ventilation system is simulated for uniform flow in the equipment chamber. The porous medium consists of mesh structure, and is installed to place which flow the influx of the air flows. PID control parameter is based on the data obtained by experiment. And then heating and cooling method which simultaneously operated was used for decreasing an error. In conclude temperature in the equipment chamber was able to control precisely in the range of ${\pm}0.1^{\circ}C$ by the PID control parameter and Deadband.

• 전기학회논문지
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• 제62권1호
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• pp.8-20
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• 2013

This paper deals with the concept design of HVDC system for controlling AC network reactive power. HVDC system can control active power and reactive power and the control concept of reactive power is similar to SVC(Static Var Compensator). Reactive power is controlled by adjusting firing angle of HVDC system under the condition that AC filters are switched. Reactive power depends on AC voltage condition, considering the steady-state and transient state to maintain the stable operation of AC network in the viewpoint of voltage stability. Therefore, in the design stage of HVDC, the reactive power required in the AC network must be considered. For the calculation of operation angle in HVDC system, the expected reactive power demand and supply status is examined at each AC system bus. The required reactive power affects the determination of the operation angle of HVDC. That is, the range of "control deadband" of operation angle should have the capability supplying the required reactive power. Finally, the reactive power control concepts is applied to 1GW BTB Pyeongtaek-Dangjin HVDC system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 B
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• pp.600-602
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• 1999

원자력발전 비율이 증가함에 따라 전기에너지의 효율적인 이용과 원자력발전의 경쟁력 제고를 위하여 원자력발전소(이하 원전)의 부하추종운전 필요성이 점점 커지고 있다. G7과제의 하나로 개발되고 있는 차세대원자로(KNGR, Korean Next Generation Reactor)는 경쟁력 있는 원전의 설계를 위하여 "일일부하추종운전 능력의 확보"를 기본 성능요건의 하나로 하여 개발되고 있다. 그러나 수동으로 원자로출력분포를 제어하는 기존 원전의 제어방식으로는 상기목표를 충족시키기 어려워 원자로의 출력분포와 출력을 동시에 제어하는 새로운 자동 제어방식을 도입하였다. 본 논문에 기술된 제어방법은 원자로 출력분포 상태에 따른 비선형 제어방법이 적용되며 목표출력 부근에서의 Oscillatory Behavior 방지를 위해 설정된 Deadband 내에서의 다른 상태변수를 제어하기 위한 알고리즘도 포함된다. 개발된 제어방법의 성능을 확인하기 위해 원자로 증기공급계통 전체를 모델링한 성능분석 Simulator를 이용한 Numerical Simulation을 수행하였다. 일일부하추종운전은 100-50-100%P[$(10{\sim}16)-2-(10{\sim}4)-2$ hr] power cycle over a 24-hour period, 주파수제어는 일반적인 Grid Follow에 대해 Simulation하였다.

• Journal of Biosystems Engineering
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• 제14권4호
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• pp.229-241
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• 1989

The purposes of this study were to develop an electronic-hydraulic draft control system for tractor implements, to investigate the control performance of the system and the possibility of adaptation to the conventional tractor. Experiments were carried out to investigate the responses of the system to the step and sinusoidal inputs in draft control. The effects of control mode, hydraulic flow rate, reference deadband, and proportional constant on control performance of the system were investigated. Moreover, the effects of filtering signals from draft sensor were also investigated. The following conclusions were derived from the study; 1. In draft control, there were hunting problems in controlling the implement without filtering the draft signals. Filtering was performed by a control program of electronic controller and the control performance and stability of the system were improved significantly. 2. For the draft control system operated on on-off control mode, draft was controlled within ${\pm}27-{\pm}55kg_f$ to the reference draft when the hydraulic flow rates were 5-15 l/min. For the draft control system operated on PWM control, draft was controlled within ${\pm}27kg_f$ to the reference draft regardless of hydraulic flow rates. 3. In the frequency responses of the draft control system, control performance on PWM control mode was not better than on on-off control mode because of characteristics of hydraulic valve and drafe sensor. As the hydraulic flow rates increased for the system operated on on-off control mode, the corner frequency of amplitude attenuation increased, but the corner frequency of phase-angle change remained nearly the same. But, the system was unstable beyond the frequency of 3.1 rad/s. 4. The electronic-hydraulic hitch control system developed in this study showed superior control performance, stability and convenience compared to conventional mechanical-hydraulic hitch control system. It is considered to be a superior replacement for the conventional mechanical-hydraulic hitch control system.