• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.28-28
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• 2015

현재 인쇄전자 소자 생산을 위해 사용되고 있는 대부분의 그라비아 롤러는 미세 패턴의 보호와 인쇄 중 마찰에 대한 내구성을 향상시키기 위해 경질 크롬 도금 막이 사용되고 있다. 그러나 경질 크롬 도금 막의 경우 구현할 수 있는 경도(~1000 HV)와 이형성, 내마찰(마찰계수: ~ 0.6) 특성 등에 한계가 있다. 이러한 경질 크롬 도금이 적용된 그라비아 롤은 그 수명과 내구성, 구현할 수 있는 인쇄 품질 및 신뢰성 그리고 인쇄처리 속도 등에 있어 여러 문제가 있다. DLC(Diamond Like amorphous Carbon)는 낮은 마찰계수 값인 0.2 이하와 뛰어난 내마모성, 상대재료에 대한 이형성 등을 겸비한 표면강화 기술로 경질 크롬 도금막 대비 우수한 표면 경도(>1,800 HV) 특성을 갖으며, 합성된 DLC 코팅 막의 경우 정밀 인쇄 제판이 요구하는 표면거칠기를 구현할 가능성이 높다는 장점이 있다. 특히 실리콘이 첨가 된 Si-DLC의 경우 표면의 마찰계수를 0.1 이하까지 낮출 수 있는데 닥터블레이드 및 잉크, 인쇄 기재와의 마찰 훼손을 최소화시켜 그라비아 인쇄 롤의 수명을 향상시킬 수 있다. 또한 PECVD 공정을 이용하여 합성한 Si-DLC는 표면거칠기를 10nm 이하의 경면으로 구현할 수 있으며, 높은 접촉각에 의한 우수한 이형성을 통해 미세 패턴 내부에 전자잉크/페이스트가 잔류되는 현상을 억제할 수 있다. 이는 기존 경질 크롬 도금이 적용된 그라비아 롤에서 발생하는 패턴 내 잉크 잔류-고형화와 그에 의한 사용수명 단축현상을 현저히 개선시킬 수 있다.

• Journal of the Korean Society for Heat Treatment
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• v.31 no.2
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• pp.63-67
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• 2018

Recent mold industry uses many roll-to-roll processes that can produce high production speed and precision machining and automation process. In the circular cylinder mold, however, patterns of less than $10{\mu}m$ are difficult to manufacture and maintain. In this study, we fabricated a circular cylindrical mold with a DLC thin film which have high hardness, low coefficient of friction and high releasability by using lithography and lift-off process. The height, line width, and pitch of the fabricated DLC macro pattern are $3.1{\mu}m$, $9.1{\mu}m$ and $20.2{\mu}m$, respectively. The pattern size is finer than the current applied to the aluminum cylinder type, and this shows the possibility of practical use of DLC micro pattern roll mold.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.34 no.1
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• pp.16-20
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• 2021

In this study, we tried finding new materials to improve the stain resistance properties of polymer insulating materials. Using the filtered vacuum arc source (FVAS) with a graphite target source, DLC thin films were deposited on silicon and polymer insulator substrates depending on their thickness to confirm the surface properties, physical properties, and structural properties of the thin films. Subsequently, the possibility of using a DLC thin film as a protective coating material for polymer insulators was confirmed. DLC thin films manufactured in accordance with the thickness of various thin films exhibited a very smooth and uniform surface. As the thin film thickness increased, the surface roughness value decreased and the contact angle value increased. In addition, the elastic modulus and hardness of the DLC thin film slightly increased, and the maximum values of elastic modulus and hardness were 214.5 GPa and 19.8 GPa, respectively. In addition, the DLC thin film showed a very low leakage current value, thereby exhibiting electrical insulation properties.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2001.06a
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• pp.54-54
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• 2001

End hall type 이온건을 이용하여 다층 다이아몬드상 차본(DLC) 필름을 M2 steel 기판 위에 합성하였다. 다충 다이아몬드상 카본 필름은 순수 DLC 필름과 실라콘 함유 D DLC 필름의 조합으로 구성되어 있으며, $C_6H_6$ 및 수소 희석된 30% 를 사용하여 증착 하였다. 생성된 DLC 박막의 조성은 $C_6H_6$과 $SiH_4$ 가스의 비를 조절함으로써 변화시켰으며, 250 kHz의 고주파 전원을 바이어스 전원으로 사용하여 박막의 물성을 변화시켰다. DLC 박막의 두께와 다층의 구조 및 종류(2충, 4충)는 코팅 공정의 실험 변수로서 변화시켰다. 직경 3 mm의 루비볼을 사용하여 ball-on-disk 방식으로 마모 시험을 행하였으며, 하중은 490 g, 500 rpm에서 상대습도를 5 % 이하와 80 % 이상으로 변화시켜가며 시행하였다. 100,000 cycle 회전 후 측정된 시편의 마모상태는 5 % 이하의 습 도에서 4층 구조의 박막이 2충 구조의 박막보다 2배 이상 낮은 마모률을 보였으며 그 값은 각각 $2~3{\times}\;10^{-8}\;\textrm{mm}^3/rev$와 $1~2{\times}\;10^{-7}\;\textrm{mm}^3/rev$로 나타내었다. 80% 이상의 습도에서도 마모률의 변화는 저습에서의 경우와 유사하였다. 또한 Si함유 DLC 다층 박막이 저습 및 고습에서 더욱 안정한 마찰 마모 거동을 보였다.

• KSTLE International Journal
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• v.3 no.1
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• pp.38-42
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• 2002

Diamond-like Carbon(DLC) films were deposited on Si wafers by an RF-plasma-assisted CVD using CH$_4$gas. Tribological tests were conducted with the use of a rotating type ball on a disk friction tester with dry air. This study made use of four kinds of mating balls that were made with stainless steel but subjected to different annealing conditions in order to achieve different levels of hardness. In all load conditions, testing results demonstrated that the harder the mating materials, the lower the friction coefficient was. The friction coefficients were fecund to be lower with austenite mating balls than with fully annealed martensite balls. Conversely, the high friction coefficient found in soft martensite balls appeared to be caused by the larger contact area between the DLC film and the ball. The wear tracks on DLC films and mating balls could prove that effect. Measuring the wear track of both DLC films and mating balls revealed a similar tendency compared to the results of friction coefficients. The wear rate of austenite balls was also less than that of fully annealed martensite balls. Friction eoefficients decrease when applied leads exceed critical amount. The wear track on mating balls showed that a certain amount of material transfer occurs from the DLC film to the mating ball during a high friction process. Raman Spectra analysis Showed that the transferred materials were a kind of graphite and that the contact surface of the DLC film seemed to undergo a phase transition from carbon to graphite during the high friction process.

• KSTLE International Journal
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• v.9 no.1_2
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• pp.22-25
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• 2008

This paper investigated the wetting and adhesion property of undulated DLC film with surface morphology controlled for a reduced real area of contact. The undulated DLC Films were prepared by 13.56 MHZ radio frequency plasma enhanced chemical vapor deposition (r.f. PECVD) by using nanoscale Cu dots surface on a Si (100) substrate. FE-SEM, AFM analysis showed that the after repeated deposition and plasma induced damage with Ar ions, the surface was nanoscale undulated. This phenomenon changed the surface morphology of DLC surface. Raman spectra of film with changed morphology revealed that the plasma induced damage with Ar ions significantly suppressed the graphitization of DLC structure. Also, it was observed that while the untreated flat DLC surfaces had wetting angle starting ranged from $72^{\circ}$ and adhesion force of 333ni. Had wetting angle the undulated DLC surfaces, which resemble the surface morphology of a cylindrical shape, increased up to $104^{\circ}$ and adhesion force decreased down to 11 nN. The measurements agree with Hertz and JKR models. The surface undulation was affected mainly by several factors: the surface morphology affinity to cylindrical shape, reduction of the real area of contact and air pockets trapped in cylindrical asperities of the surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.496-496
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• 2011

A very simple and cost-effective method for fabrication of SiOx-incorporated diamond-like carbon (DLC) thin films at a preparation temperature of less than $200^{\circ}C$ was developed. Since DLC coating can be prepared not under vacuum but atmospheric conditions without any carrier gas flow, not only wafers but also powderic substrates can be used for DLC coating. Formation of DLC coating could result in appearance of superhydrophobic behaviors, which was sustained in a wide range of pH (1~14). DLC-coated surfaces selectively interacted with toluene in a toluene/water mixture. These results imply that our preparation method of the DLC coating can be useful in many application fields such as creating self-cleaning surfaces, and water and air purification filters.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.1
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• pp.33-40
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• 2014

Poly vinylidene fluoride-co-hexafluoropropylene (PVdF-HFP) membrane were prepared by the electrospinning technique. We had applied a DLC coating process and then the surface of the membrane and the contact angle change was investigated. Electrospun fibrous PVdF-HFP membrane surface became to wrinkled shape by Ar plasma treatment and treatment conditions. The wrinkled surface of PVdF-HFP membrane became super-hydrophilic. However, after DLC coating process, it became super-hydrophobic. The resulting surfaces were characterized by water contact angle measurement, X-ray photoelectron spectroscopy (XPS) and field emission scanning electron microscopy (FE-SEM). Resultantly it was recognized that the wettability characteristics of the membrane surfaces depended on the chemical composition and surface morphology.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.181-181
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• 2008

DLC (Diamond-like Carbon) 박막은 높은 내마모성과 낮은 마찰 계수, 화학적 안정성 및 적외선 영역에서의 높은 투과율과 낮은 광 반사도, 높은 전기저항과 낮은 유전율, 전계방출특성 등 여러 가지 장점을 가진 물질이다[1]. 최근에는 DLC 박막의 여러 장점들과 산과 염기 유기용매에 대한 화학적 안정성으로 인하여 인조관절에서 인공심장의 판막에 이르기까지 의공학 관련 부품소재로 응용되고 있으며 내구성과 안정성에 있어서 탁월한 성능을 보여주고 있다. 또한 DLC 박막의 높은 경도와 낮은 마찰 계수, 부드러운 박막 표면 (수nm의 RMS 거칠기)의 장점을 살려 마그네틱 미디어와 하드디스크의 슬라이딩 표면에 사용되어지고, MEMS (Micro-Electro Mechanical System) 소자와 MMAs (Moving Mechanical Assemblies)의 고체윤활코팅으로 활용하여 미세기계의 내구성과 성능 향상을 도모할 수 있다. 이와 같이 DLC 박막은 다양한 분야에 응용되고 있으며, 박막이 지닌 여러 가지 장점들로 인하여 더 많은 분야에 응용될 가능성을 지닌 물질이다. 그러나 수 ${\mu}m$이상의 두께에서 박막이 높은 잔류응력 (residual stress)을 가지고, 열에 취약하여 이의 개선에 관한 연구들이 진행되어 지고 있다 [2]. 따라서 사용되는 목적에 따라 용도에 맞는 양질의 DLC 박막을 합성하기 위해선 합성 장치의 개발과 다양한 실험을 통한 최적의 합성조건 도출 등의 노력이 요구된다. 또한 DLC 박막 합성시의 여러 가지 증착 방법에 따른 박막 물성에 대한 재현성 확보 및 박막 증착에 관한 명확한 메커니즘 규명이 아직까지는 불분명하여 이에 관한 연구가 시급하다. 따라서 본 연구에서는 MEMS 소자와 MMAs의 고체윤활코팅으로 사용가능한 DLC 박막을 RF PECVD (Plasma Enhanced Vapor Deposition) 방식으로 합성하고 후열처리 온도에 따른 DLC 박막의 마찰계수 변화를 박막에 훼손을 주지 않는 FFM (Friction Force Microscopy) 방식을 사용하여 분석하였다.

• Tribology and Lubricants
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• v.33 no.4
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• pp.127-133
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• 2017

In order to characterize the adhesive properties and failure mechanisms of diamond-like carbon (DLC) films of two different thicknesses (130 nm and $1.2{\mu}m$), deposited by plasma-enhanced chemical vapor deposition on a Si substrate, scratch testing with a micro-indenter ($12.5{\mu}m$ tip radius) was performed under a linearly increasing load. These scratch tests were conducted under the same test conditions for both films. The critical load of each film was estimated from the scratch test results, based on a sharp increase in the coefficient of friction and a clear distinction of failure modes. The critical load was the basis for evaluating the adhesion strength of the films, and the $1.2{\mu}m-thick$ DLC film had superior adhesion strength. For better understanding of the failure modes, the following analyses were conducted: friction behavior and scratch tracks analysis using scanning electron microscopy, energy-dispersive spectroscopy, and 3-D profilometry. The scratch test results showed that failure modes were related to the thickness of the films. The 130 nm-thick DLC film underwent cohesive failure modes (cracks and chipping) before reaching to a gross failure stage. On the other hand, the thicker DLC film ($1.2{\mu}m-thick$) did not exhibit micro cracks before a sudden gross failure of the film together with the evidence of cracking and chipping of the Si substrate.