• Tribology and Lubricants
• /
• 제25권1호
• /
• pp.20-24
• /
• 2009

TiC-derived carbon coatings have been synthesized at $600^{\circ}C$ temperature treatment with $H_2/Cl_2$ mixture gases. From Raman spectroscopy measurements, the modified layer was covered with carbon and the thick-ness of the layer was increased with increasing reaction time. And $I_D/I_G$ ratio was decreased with increasing reaction time. The superior tribological property was obtained from TiC reacted with $Cl_2$ gas for 2 hrs. And the tribological property measurements indicate that TiC-derived carbon layer has $0.9{\times}10_{-6}mm^3/Nm$ in wear coefficient and 0.13 in friction coefficient.

• The Korean Journal of Ceramics
• /
• 제3권3호
• /
• pp.173-176
• /
• 1997

Direct metal ion beam deposition is considered to be a whole new thin film deposition technique. Unlike other conventional thin film deposition processes, the individual deposition particles carry its own ion beam energies which are directly coupled for the formation of this films. Due to the nature of ion beams, the energies can be controlled precisely and eventually can be tuned for optimizing the process. SKION's negative C- ion beam source is used to investigate the initial nucleation mechanism and growth. Strong C- ion beam energy dependence has been observed. Complete phase control of sp3 and sp3, control of the C/SiC/Si interface layer, control of crystalline and amorphous mode growth, and optimization of the physical properties for corresponding applications can be achieved.

• Transactions on Electrical and Electronic Materials
• /
• 제7권6호
• /
• pp.297-300
• /
• 2006

The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. This modeling is used to analyze the variation of the pretilt angle under various process conditions. IB exposure angle and IB exposure time are considered as input factors. The analysis of variance technique is settled to analyze the statistical significance, and effect plots are also investigated to examine the relationships between the process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
• /
• pp.284-284
• /
• 2013

중 에너지 이온 산란 분석법(Medium Energy Ion Scattering Spectrometer, MEIS)은 50~500 keV로 이온을 가속 후 시료에 입사시켜 시료의 원자와 핵간 충돌로 산란되는 일차이온의 에너지를 측정하여 시료를 분석하는 기법으로, 원자층의 깊이 분해능으로 초박막의 표면 계면의 조성과 구조를 분석 할수 있는 유용한 미세 분석기술이다. 본 실험에서 에너지 70~100 keV의 He+ 이온을 사용하여 Pulse Width 1 ns의 Pulsed ion beam을 만들어 Start 신호로 사용하고 Delay-line-detector에 검출된 신호를 End 신호를 이용한 TOF-MEIS System을 개발하였다. 활용 가능한 분석시편으로 Ultra thin film 시편으로 1, 1.5, 2, 2.5, 3, 4 nm의 HfO2, 1.8, 4nm의 SiO2 시편을 분석 하였으며 Ultra Shallow Junction 시편으로 As Doped Si, Cs Doped Si 시편 및 Composition, Core/shell 구조의 Q-dot 시편으로 CdSe, CdSe/ZnS등 다양한 분석 실험을 진행 하였다. Composition, Core/shell 구조의 Q-dot 시편은 Diamond Like Carbon(DLC)의 Substrate에 Mono-layer로 형성하여 분석하였다.

• 한국정밀공학회지
• /
• 제22권6호
• /
• pp.159-167
• /
• 2005

This work focuses on the effects of crack free friction on Mode II stress intensity factors, $K_{II}$, for a vertical surface crack in a two-dimensional finite element model of TiN/steel subject to rolling contact. Results indicate that maximum $K_{II}$ values, which occur when the load is adjacent to the crack, may be significantly reduced in the presence of crack face friction. The reduction is more significant for thick coatings than for thin. Crack extension and increased layer thickness result in increased $K_{II}$ values. The effect of crack face friction on compressive $K_I$ values appears negligible. Comparative results are presented for $MoS_2/steel$ and diamond-like carbon(DLC)/Ti systems.

• Korean Chemical Engineering Research
• /
• 제62권1호
• /
• pp.7-12
• /
• 2024

고분자 전해질 연료전지(PEMFC) 내구성에 촉매 지지체 내구성이 미치는 영향이 크다. 촉매 지지체의 가속 내구 평가는 높은 전압(1.0~1.5 V)에서 진행되어 촉매층의 촉매와 이오노머 바인더도 같이 열화되어 지지체 내구성 평가에 방해가 된다. 내구성 평가대상인 지지체가 더 열화되는 조건을 찾고자 기존의 프로토콜 (DOE 프로토콜)을 개선하였다. 상대습도를 35% 낮추고 전압변화 횟수를 감소시킨 프로토콜 (MDOE)을 개발하였다. 1.0 ↔ 1.5 V 전압변화 사이클 반복 후에 촉매 비활성도 (MA)와 전기화학적 활성면적 (ECSA), 전기이중층 용량 (DLC), Pt 용해와 입자 성장 등을 분석하였다. 비활성도 감소 40% 도달하는데 MDOE 프로토콜은 500 사이클 밖에 안되어 DOE방법보다 전압변화 횟수를 감소시키면서 카본 지지체 열화를 DOE 프로토콜보다 50% 증가시킬 수 있었다.

• 한국응용과학기술학회지
• /
• 제41권1호
• /
• pp.46-57
• /
• 2024

In this study, the various process conditions for high-power DC Magnetron Sputtering (DCMS) on the surface roughness of carbon thin films were investigated. The optimal conditions for Si/C coating were 40min for deposition time, which does not deviate from normal plasma, to obtain the maximum deposition rate, and the conditions for the best surface roughness were -16volt bias voltage and 400watt DC power with 1.3x10-3torr chamber pressure. Under these optimal conditions, an excellent carbon thin film with a surface roughness of 1.62nm and a thickness of 724nm was obtained. As a result of XPS analysis, it was confirmed that the GLC structure (sp² bonding) was more dominant than the DLC structure (sp³ bonding) in the thin film structure of the carbon composite layer formed by DC sputtering. Except in infrequent cases of relatively plasma instability, the lower bias voltage and applied power induces smaller surface roughness value due to the cooling effect and particle densification. For the optimal conditions for Graphite/C composite layer coating, a roughness of 36.3 nm and a thickness of 711 nm was obtained under the same conditions of the optimal process conditions for Si/C coating. This layer showed a immensely low roughness value compared to the roughness of bare graphite of 242 nm which verifies that carbon coating using DC sputtering is highly effective in modifying the surface of graphite molds for glass forming.

• Tribology and Lubricants
• /
• 제23권6호
• /
• pp.261-265
• /
• 2007

Carbide-derived carbon coating has been synthesized by low temperature treatment of TiC disk with $H_2/Cl_2$ mixture gases. A variety of physical measurements indicated that Ti was extracted and carbon layer was formed by exposure of $Cl_2$ gas. The $I_D/I_G$ ratio increased with increasing $Cl_2$ gas concentration. Wear coefficient and frictional coefficient varied with $Cl_2$ gas concentration. When the $Cl_2$ gas concentration decreased to 3.3 vol%, the friction coefficient approach a minimum. The results showed that degree of graphite crystallinity and variation of porosity due to the $Cl_2$ gas content were responsible for different tribology performance.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
• /
• pp.302-303
• /
• 2006

The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. The response surface model is used to analyze the variation of the pretilt angle under various process conditions IB exposure angle and IB exposure time are considered as Input factors. The analysis of variance technique is used to analyze the statistical significance, and effect plots are also investigated to examine the relationships betweenthe process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.

• Korean Chemical Engineering Research
• /
• 제61권3호
• /
• pp.341-347
• /
• 2023

PEMFC(Proton Exchange Membrane Fuel Cells)에서 PtCo/C 합금 촉매가 성능이나 내구성에서 우수하여 많이 사용되고 있다. 그러나 높은 전압에서(1.0~1.5 V) 평가되는 촉매 지지체 내구성에 관한 연구는 별로 보고 되지 않았다. 본 연구에서는 PtCo/C 촉매와 Pt/C 촉매에 촉매 지지체 가속 열화 프로토콜을 적용한 후 내구성을 비교하였다. 1.0↔1.5V 전압 변화 사이클 반복 후에 촉매 비활성도(Mass activity)와 전기화학적 활성면적(ECSA), 전기이중층 용량(DLC), Pt 용해와 입자 성장 등을 분석하였다. 전압변화 2,000 사이클 후 PtCo/C 촉매는 Pt/C 촉매에 비해 0.9 V에서 촉매 무게당 전류밀도가 1.5배 이상 감소하였다. 이와 같은 결과는 PtCo/C 촉매의 카본지지체의 열화 속도가 Pt/C 촉매보다 높기 때문이었다. Pt/C 촉매는 PtCo/C 촉매보다 촉매층의 ECSA 감소가 1.5배 이상 높았지만 Pt/C 촉매의 카본 지지체 부식이 작아 I-V 성능 감소가 작았다. PtCo/C 촉매의 고전압 내구성 향상을 위해서는 카본 지지체 내구성 향상이 필수적임을 보였다.