[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4313/TEEM.2006.7.6.297

Statistical Modeling of Pretilt Angle Control using Ion-beam Alignment on Nitrogen Doped Diamond-like Carbon Thin Film

Kang, Hee-Jin (Department of Electrical and Electronics Engineering, Yonsei University)
Lee, Jung-Hwan (Department of Electrical and Electronics Engineering, Yonsei University)
Han, Jung-Min (Department of Electrical and Electronics Engineering, Yonsei University)
Yun, Il-Gu (Department of Electrical and Electronics Engineering, Yonsei University)
Seo, Dae-Shik (Department of Electrical and Electronics Engineering, Yonsei University)

Publication Information

Transactions on Electrical and Electronic Materials / v.7, no.6, 2006 , pp. 297-300 More about this Journal

Abstract

The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. This modeling is used to analyze the variation of the pretilt angle under various process conditions. IB exposure angle and IB exposure time are considered as input factors. The analysis of variance technique is settled to analyze the statistical significance, and effect plots are also investigated to examine the relationships between the process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.

Keywords

Response surface model; Pretilt angle; Nitrogen doped DLC (NDLC); Ion beam (IB) alignment; Nematic liquid crystal (NLC);

Citations & Related Records

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