Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Statistical Modeling of Pretilt Angle Control using Ion-beam Alignment on Nitrogen Doped Diamond-like Carbon Thin Film

  • Kang, Hee-Jin (Department of Electrical and Electronics Engineering, Yonsei University) ;
  • Lee, Jung-Hwan (Department of Electrical and Electronics Engineering, Yonsei University) ;
  • Han, Jung-Min (Department of Electrical and Electronics Engineering, Yonsei University) ;
  • Yun, Il-Gu (Department of Electrical and Electronics Engineering, Yonsei University) ;
  • Seo, Dae-Shik (Department of Electrical and Electronics Engineering, Yonsei University)
  • Published : 2006.12.30
Download PDF
⟨ Previous Next ⟩

Abstract

The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. This modeling is used to analyze the variation of the pretilt angle under various process conditions. IB exposure angle and IB exposure time are considered as input factors. The analysis of variance technique is settled to analyze the statistical significance, and effect plots are also investigated to examine the relationships between the process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.

Keywords

References

  1. D.-S. Seo, H.-K. Kim, and H.-J. Jeon, 'Pretilt angle generation by UV exposure during imidization of polyimide', Liquid Crystals, Vol. 28, p. 313, 2001 https://doi.org/10.1080/02678290010015306
  2. J.- Y. Hwang, S.-H. Lee, S. K. Paek, and D.-S. Seo, 'Tilt angle generation for nematic liquid crystal on blended homeotropic polyimide layer containing trifluoromethyl moieties', Jpn. J. Appl. Phys., Vol. 42, p. 1713, 2003 https://doi.org/10.1143/JJAP.42.1713
  3. J.-Y. Hwang, D.-S. Seo, J.-H. Son, and D.-H. Suh, 'Pretilt angles of vertically aligned nematic liquid crystal (NLC) with the application of copolymers possessing chalconyl and cholesteryl moiety', Jpn. J. Appl. Phys., Vol. 39, p. L1108, 2000 https://doi.org/10.1143/JJAP.39.L1108
  4. D.-S. Seo, 'Invesitgation of surface anchoring strength and pretilt angle in NLC on rubbed polythiophene surface with alkyl chain lengths', Liquid Crystals, Vol. 26, p. 1621, 1999 https://doi.org/10.1080/0267829992035991621
  5. G. S. may, J. Huang, and C. J. Spanos, 'Statistical experimental design in plasma etch modeling', IEEE Trans. Semiconduct. Manufact., Vol. 4, p. 83, 1991 https://doi.org/10.1109/66.79720
  6. L. K. Garling and G. P. Woods, 'Enhancing the analysis of variance (ANOVA) technique with graphical analysis and its application to wafer processing equipment', IEEE Trans. Comp., Hybrids, Manufact. Technol., Vol. 17, p. 149, 1994 https://doi.org/10.1109/95.296382
  7. C. Hu, C. Tsay, and A. Bai, 'Optimization of the hydrogen evolution activity on zinc-nickel deposits using experimental strategies', Electrochimica Acta, Vol. 48, p. 907, 2003 https://doi.org/10.1016/S0013-4686(02)00788-0
  8. R. R. Hocking, 'The analysis and selection of variables in linear regression', Biometrics, Vol. 32, p. 1, 1976 https://doi.org/10.2307/2529336
  9. D. K. Lee, S. J. Rho, H. K. Baik, J.-Y. Hwang, Y.-M. Jo, D.-S. Seo, S. J. Lee, and K. M. Song, 'Study on liquid crystal alignment characteristics by the surface treatment of hydrogenated amorphous carbon thin films', Jpn. J. Appl. Phys., Vol. 41, p. L1399, 2002 https://doi.org/10.1143/JJAP.41.L1399