Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.11a
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- Pages.302-303
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- 2006
Statistical modeling of pretilt angle control for NLC using ion beam alignment
이온빔 배향을 이용한 네마틱 액정의 프리틸트각 제어를 위한 통계적 모델링
- Kang, Hee-Jin (Yonsei Univ.) ;
- Kang, Dong-Hun (Yonsei Univ.) ;
- Lee, Jung-Hwan (Yonsei Univ.) ;
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Yun, Il-Gu
(Yonsei Univ.) ;
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Oh, Yong-Cheul
(Kwangwoon Univ.) ;
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Seo, Dae-Shik
(Yonsei Univ.)
- Published : 2006.11.09
Abstract
The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. The response surface model is used to analyze the variation of the pretilt angle under various process conditions IB exposure angle and IB exposure time are considered as Input factors. The analysis of variance technique is used to analyze the statistical significance, and effect plots are also investigated to examine the relationships betweenthe process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.
Keywords
- response surface model;
- pretilt angle;
- nitrogen doped DLC (NDLC);
- ion beam (IB) alignment;
- nematic liquid crystal (NLC)