• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.315.1-315.1
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• 2014

The use of cellulose papers has recently attracted much attention in various device applications owing to their natural advantageous properties of earth's abundance, bio-friendly, large-scale production, and flexibility. Conventional metal oxides with novel structures of nanorods, nanospindles, nanowires and nanobelts are being developed for emerging electronic and chemical sensing applications. In this work, both ZnO (n-type) nanorod arrays (NRAs) and CuO (p-type) nanospindles (NSs) were synthesized on cellulose papers and the p-n junction property was investigated using the electrode of indium tin oxide coated polyethylene terephthalate film. To synthesize ZnO and CuO nanostructures on cellulose paper, a simple and facile hydrothermal method was utilized. First, the CuO NSs were synthesized on cellulose paper by a simple soaking process, yielding the well adhered CuO NSs on cellulose paper. After that, the ZnO NRAs were grown on CuO NSs/cellulose paper via a facile hydrothermal route. The as-grown ZnO/CuO NSs on cellulose paper exhibited good crystalline and optical properties. The fabricated p-n junction device showed the I-V characteristics with a rectifying behaviour.

• 한국재료학회지
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• 제30권8호
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• pp.435-440
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• 2020

The relationship between the precipitation of secondary phase and the thermal properties of Al-4.5%Cu alloy (in wt.%) after various heat treatments has been studied. Solid solution treatment of alloy was performed at 808 K for 6 hours, followed by warm water quenching; then, the samples were aged in air at 473 K for different times. The thermal diffusivity of the Al-4.5%Cu alloy changed with the heat treatment conditions of the alloy at temperatures below 523 K. The as-quenched specimen had the lowest thermal diffusivity, and as the artificial aging time increased, the thermal diffusivity of the specimen increased in the temperature range between 298 and 523 K. For the specimen aged for five hours, the thermal conductivity was 12% higher than that of the as-quenched specimens at 298 K. It is confirmed that the thermal diffusivity and thermal conductivity of the Al-4.5%Cu alloy significantly depend on their thermal history at temperatures below 523 K. The precipitation and dissolution of the Al₂Cu phase were confirmed via DSC for the alloys, and the formation of coefficient of thermal expansion peaks in TMA was caused by precipitation. The precipitation of supersaturated solid solution of Al-4.5%Cu alloys had an additional linear expansion of ≈ 0.05 % at 643 K during thermal expansion measurement.

• 마이크로전자및패키징학회지
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• 제20권4호
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• pp.81-85
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• 2013

웨이퍼 적층 기술은 반도체 전 후 공정을 이용한 효과적인 방법으로 향후 3D 적층 시스템의 주도적인 발전방향이라고 할 수 있다. 웨이퍼 레벨 3D 적층 시스템을 제조하기 위해서는 TSV (Through Si Via), 웨이퍼 본딩, 그리고 웨이퍼 thinning의 단위공정 개발 및 웨이퍼 warpage, 열적 기계적 신뢰성, 전력전달, 등 시스템적인 요소에 대한 연구개발이 동시에 진행되어야 한다. 본 연구에서는 웨이퍼 본딩에 가장 중요한 역할을 하는 Cu CMP (chemical mechanical polishing) 공정에 대한 특성 분석을 진행하였다. 8인치 Si 웨이퍼에 다마신 공정으로 Cu 범프 웨이퍼를 제작하였고, Cu CMP 공정과 oxide CMP 공정을 이용하여 본딩 층 평탄화에 미치는 영향을 살펴보았다. CMP 공정 후 Cu dishing은 약 $180{\AA}$이었고, 웨이퍼 표면부터 Cu 범프 표면까지의 최종 높이는 약 $2000{\AA}$이었다.

• Progress in Superconductivity
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• 제7권2호
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• pp.145-151
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• 2006

Nickel and nickel-tungsten alloy were electroplated on a cold rolled and heat treated copper(Cu) substrate. 4 mm-thick high purity commercial grade Cu was rolled to various thicknesses of 50, 70, 100 and 150 micron. High reduction ratio of 30% was applied down to 150 micron. Rolled texture was converted into cube texture via high temperature heat treatment at $400-800^{\circ}C$. Grain size of Cu was about 50 micron which is much smaller compared to >300 micron for the Cu prepared using smaller reduction pass of 5%. 1.5 km-long 150 micron Cu was fabricated with a rolling speed of 33 m/min and texture of Cu was uniform along length. Abnormal grain growth and non-cube texture appeared for the specimen anneal above $900^{\circ}C$. 1-10 micron thick Ni and Ni-W film was electroplated onto an annealed cube-textured Cu or directly on a cold rolled Cu. Both specimens were annealed and the degree of texture was measured. For electroplating of Ni on annealed Cu, Ni layer duplicated the cube-texture of Cu substrate and the FWHM of in plane XRD measurement for annealed Cu layer and electroplated layer was $9.9^{\circ}\;and\;13.4^{\irc}$, respectively. But the FWHM of in plane XRD measurement of the specimen which electroplated Ni directly on cold rolled Cu was $8.6^{\circ}$, which is better texture than that of nickel electroplated on annealed Cu and it might be caused by the suppression of secondary recrystallization and abnormal grain growth of Cu at high temperature above $900^{\circ}C$ by electroplated nickel.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.246-246
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• 2010

As the trench width in the interconnect technology decreases down to nano-scale below 50 nm, superconformal gap-filling process of Cu becomes very critical for Cu interconnect. Obtaining superconfomral gap-filling of Cu in the nano-scale trench or via hole using MOCVD is essential to control nucleation and growth of Cu. Therefore, nucleation of Cu must be suppressed near the entrance surface of the trench while Cu layer nucleates and grows at the bottom of the trench. In this study, suppression of Cu nucleation was achieved by treating the Ru barrier metal surface with capacitively coupled hydrogen plasma. Effect of hydrogen plasma pretreatment on Cu nucleation was investigated during MOCVD on atomic-layer deposited (ALD)-Ru barrier surface. It was found that the nucleation and growth of Cu was affected by hydrogen plasma treatment condition. In particular, as the plasma pretreatment time and electrode power increased, Cu nucleation was inhibited. Experimental data suggests that hydrogen atoms from the plasma was implanted onto the Ru surface, which resulted in suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. Due to the hydrogen plasma treatment of the trench on Ru barrier surface, the suppression of Cu nucleation near the entrance of the trenches was achieved and then led to the superconformal gap filling of the nano-scale trenches. In the case for without hydrogen plasma treatments, however, over-grown Cu covered the whole entrance of nano-scale trenches. Detailed mechanism of nucleation suppression and resulting in nano-scale superconformal gap-filling of Cu will be discussed in detail.

• 한국자기학회지
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• 제16권1호
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• pp.79-83
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• 2006

광전자 회절을 이용한 정량적 구조 결정이 Cu(100)/glycine $(NH_2CH_3COOH)$ 흡착 계에 대하여 얻어졌다. $Cu(100)(2\times4)$pg-glycine $(NH_2CH_3COOH)$에서 분자는 아미노기의 질소원자, 카복실기의 두 개의 산소원자가 기판원자와 결합에 참여하고 있음이 얻어졌다. 질소원자, 산소원자 모두 atop site에 흡착을 한다. 질소원자와 산소원자 모두 atop 정 위치에서 각각 $5^{\circ}\pm4^{\circ},\;9^{\circ}\pm2^{\circ}$ 벗어난 위치에 있는 사실을 얻었다. 화학결합 길이는 Cu-N와 Cu-O모두 $2.05\pm0.02\;{\AA}$ 결정되었다. 두 개의 산소가 화학결합에 개입된 것으로 보이며, 이 결과는 Cu(110)에서 얻은 결과와 유사하다. Cu(110)$(2\times3)$ pg-glycine에서 얻은 결과를 재해석한 결과 두 산소는 동등하지 않고 한 산소원자는 다른 산소원자 보다 $0.29\;{\AA}$ 결합 높이가 차이가 있음을 보였다.

• Journal of Welding and Joining
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• 제30권3호
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• pp.26-31
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• 2012

Three-dimensional integrated circuit (3D IC) technology has become increasingly important due to the demand for high system performance and functionality. We have evaluated the effect of Buffered oxide etch (BOE) on the interfacial bonding strength of Cu-Cu pattern direct bonding. X-ray photoelectron spectroscopy (XPS) analysis of Cu surface revealed that Cu surface oxide layer was partially removed by BOE 2min. Two 8-inch Cu pattern wafers were bonded at $400^{\circ}C$ via the thermo-compression method. The interfacial adhesion energy of Cu-Cu bonding was quantitatively measured by the four-point bending method. After BOE 2min wet etching, the measured interfacial adhesion energies of pattern density for 0.06, 0.09, and 0.23 were $4.52J/m^2$, $5.06J/m^2$ and $3.42J/m^2$, respectively, which were lower than $5J/m^2$. Therefore, the effective removal of Cu surface oxide is critical to have reliable bonding quality of Cu pattern direct bonds.

• 한국세라믹학회지
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• 제36권8호
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• pp.835-842
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• 1999

본 연구에서는 Ag-Cu-Ti 와 Ag-Cu-In-Ti 를 사용하여 브레이징법으로 질화규소 간 접합체를 제작하고 $400^{\circ}C$와 $650^{\circ}C$에서 장시간(2000 h) 열처리 후 파괴 강도의 변화를 살펴보았다. 접합후 강도는 Ag-Cu-Ti 가 높게 나왔지만, 열처리 시간이 증가할수록 Ag-Cu-In-Ti 의 경우가 강도의 감소 정도가 작은 것으로 나타났다. 또한 고온 응용을 위해 개발된 새로운 접학 합금인 Au-Ni-Cr-Mo-Fe 계를 이용하여 질화 규소 간의 접합체를 제작하여 $650^{\circ}C$에서 100시간까지 장시간 열처리 하였다 접합 당시의 강도는 상용 접합 합금보다는 낮은 값을 보였지만, 열처리를 함에 따라 강도의 증가를 보였다 SUS316과의 접합시에는 중간재로 몰리브데늄 또는 구리를 사용하였으며 $400^{\circ}C$에서 1000시간 동안 열처리하였다. 강도는 몰리브데늄을 사용한 경우가 높게 나왔지만, 접합체의 형성이 어렵다는 단점이 있었다. 산화 실험에서는 Ti가 첨가된 접합 합금인 Ag-Cu-Ti 의 경우가 첨가되지 않은 Ag-Cu의 경우보다 산화가 잘 일어나며, 인듐을 첨가한 Ag-Cu-In-Ti 의 경우는 산화 억제의 효과가 나타났다. 전반적으로 In을 포함한 접합 합금이 고온 신뢰도 면에서 우수한 것으로 나타났다.

• 대한금속재료학회지
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• 제50권2호
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• pp.152-158
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• 2012

The effect of current waveform on Cu filling into TSV (through-silicon via) and the bottom-up ratio of Cu were investigated for three dimensional (3D) Si chip stacking. The TSV was prepared on an Si wafer by DRIE (deep reactive ion etching); and its diameter and depth were 30 and $60{\mu}m$, respectively. $SiO_2$, Ti and Au layers were coated as functional layers on the via wall. The current waveform was varied like a pulse, PPR (periodic pulse reverse) and 3-step PPR. As experimental results, the bottom-up ratio by the pulsed current decreased with increasing current density, and showed a value of 0.38 on average. The bottom-up ratio by the PPR current showed a value of 1.4 at a current density of $-5.85mA/cm^2$, and a value of 0.91 on average. The bottom-up ratio by the 3-step PPR current increased from 1.73 to 5.88 with time. The Cu filling by the 3-step PPR demonstrated a typical bottom-up filling, and gave a sound filling in a short time.

• Corrosion Science and Technology
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• 제18권2호
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• pp.39-48
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• 2019

The feasibility of using benzotriazole (BTAH) to inhibit pitting corrosion in the sprinkler copper tubes was investigated by filling the tubes with BTAH-water solution in 829 households at an eight-year-old apartment complex. The water leakage rate was reduced by approximately 90% following BTAH treatment during 161 days from the previous year. The leakage of one of the two sprinkler copper tubes was investigated with optical microscopy, scanning electron microscopy, energy dispersive spectroscopy, X-ray photoelectron spectroscopy, and X-ray diffraction analysis to determine the formation of Cu-BTA film inside the corrosion pits. All the inner components of the corrosion pits were coated with Cu-BTA films suggesting that BTAH molecules penetrated the corrosion products. The Cu-BTA film was about 2 nm in thickness at the bottom of a corrosion pit. A layer of CuCl and $Cu_2O$ phases lies under the Cu-BTA film. This complex structure effectively prevented the propagation of corrosion pits in the sprinkler copper tubes and reduced the water leakage.