• 한국세라믹학회지
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• 제49권6호
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• pp.556-560
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• 2012

Nanocrystalline CrN coatings were deposited by DC and ICP-assisted magnetron sputtering on Si (100) substrates. The influences of the ICP power on the microstructural and crystallographic properties of the coatings were investigated. For the generation of the ICP, radio frequency was applied using a dielectric-encapsulated coil antenna installed inside the deposition chamber. As the ICP power increased from 0 to 500W, the crystalline grain size decreased. It is believed that the decrease in the crystal grain size at higher ICP powers is due to resputtering of the coatings as a result of ion bombardment as well as film densification. The preferential orientation of CrN coatings changed from (111) to (200) with an increase in the ICP power. The ICP magnetron sputtering CrN coatings showed excellent surface roughness compared to the DC magnetron sputtering coatings.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 방전 플라즈마 유기절연재료 초전도 자성체연구회
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• pp.61-64
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• 2004

Recently, the RF inductive discharge or inductively coupled plasma (ICP) continues to attract growing attention as an effective plasma source in many industrial applications, the best known of which are plasma processing and lighting technology. To the point of lighting sources, the electrodeless fluorescent lamps utilizing an inductively coupled plasma (ICP) have been objects of interest and research during the last decades, mainly because of their potential for extremely long life, high lamp efficacies, rapid power switching response. The electrodeless fluorescent lamp that is dealt with in this work comprises a bulb filled with rare gas and amalgam of vaporizable metal and has a coil provided with a winding around the ferrite. Current through a coil produces a magnetic field in the discharge space. The changing magnetic flux then produces an azimuthal electric field E around the coil, according to Faraday's laws of magnetic induction.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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• pp.285-288
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• 2004

Recently, the RF inductive discharge or inductively coupled plasma(ICP) continues to attract growing attention as an effective plasma source in many industrial applications, the best known of which are plasma processing and lighting technology. To the point of lighting sources, the electrodeless fluorescent lamps utilizing an inductively coupled plasma(ICP) have been objects of interest and research during the last decades, mainly because of their potential for extremely long life, high lamp efficacies, rapid power switching response. The electrodeless fluorescent lamp that is dealt with in this work comprises a bulb filled with rare gas and amalgam of vaporizable metal and has a coil provided with a winding around the ferrite. Current through a coil produces a magnetic field in the discharge space The changing magnetic flux then produces an azimuthal electric field E around the coil, according to Faraday's laws of magnetic induction.

• 한국정밀공학회지
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• 제28권1호
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• pp.19-23
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• 2011

Recently, focused ion beam (FIB) applications have been investigated for the modification of VLSI circuit, the MEMS processing, and the localized ion doping, A multi aperture FIB system has been introduced as the demands of FIB applications for high speed and large area processing increase. A liquid metal ion source has problems, a large angular divergence and a metal contamination into a substrate. In this study, a gas ion source was introduced to replace a liquid metal ion source. The gas ion source generated inductively coupled plasma (ICP) in a quartz tube (diameter: 45 mm). Ar gas fed into the quartz was ionized by a 2 turned radio frequency antenna. The Ar ions were extracted by 2 extraction grids. The maximum extraction voltage was 10 kV. A numerical simulation was used to optimize the design of extraction grids and to predict an ion trajectory. As a result, the maximum ion current density was 38 $mA/cm^2$ and the spread of ion energy was 1.6 % for the extraction voltage.

• 한국초전도ㆍ저온공학회논문지
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• 제20권1호
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• pp.23-27
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• 2018

As the wireless power transfer (WPT) technology based on strongly resonance coupled method realizes large power charging without any wires through the air, there are advantages compared with the wired counterparts, such as convenient, safety and fearless transmission of power. From this reason, the WPT systems have started to be applied to the wireless charging for various power applications such as train, underwater ship, electric vehicle. This study aims for the effect and characteristics of different inserted resonance coil between Tx and Rx coils for charging system of superconducting magnetic levitation (MAGLEV) train. The transfer efficiency and effect are evaluated with helix type, rectangular type copper resonance coil, and HTS resonance coil under bulb and HTS magnet load, respectively. The input power is adapted with radio frequency (RF) power of 370 kHz below 500 W.

• Journal of electromagnetic engineering and science
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• 제13권1호
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• pp.38-43
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• 2013

We derive the Z-parameters for the two coupled antennas used for wireless power transfer under the assumption that the antennas are canonical minimum scattering antennas. Using the Z-parameter and the maximum power transfer efficiency formula, we determine the maximum power transfer efficiency of wireless power transfer systems. The results showed that the maximum power transfer efficiency increases as the mode number or the radiation efficiency increases. To verify the theory, we fabricate and measure two different power transfer systems: one comprises two antennas generating $TM_{01}$ mode; the other comprises two antennas generating $TM_{02}$ mode. When the distance between the centers of the antennas was 30 cm, the maximum power transfer efficiency of the antennas generating the $TM_{02}$ mode increased by 62 % compared to that of the antennas generating the $TM_{01}$ mode.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1593_1594
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• 2009

RFID system had used same frequency for transmit and receive signal. RFID recognize range is restrict, because of receive and transmit signal coupled each other. That cause directional coupler is not ideal isolation characteristic and antenna missmatching. So we proposed lambda/8 section directional coupler and design high isolation to use RFID.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1872-1874
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• 2001

This paper presents an implantable telemetry LC resonance-type pressure sensor to measure the cerebral ventricle pressure. The sensor consists of an inductor and a capacitor. The LC resonant circuit consists of the sensor and an external antenna coil that are coupled magnetically. The resonance frequency of the circuit decreases as the applied pressure increases the capacitance of the sensor. The sensor is designed in consideration of the biocompatibility and long lifetime for continuous monitoring of the ventricle pressure. The sensor is simple to fabricate and small in comparison with others reported previously. The inductor is fabricated by electroplating and the variable capacitor is constructed with a flexible p+ diaphragm. Also, the deflection of the diaphragm, the variation of the capacitance and the resonance frequency are analyzed and calculated.

• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2000년도 종합학술발표회 논문집 Vol.10 No.1
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• pp.377-380
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• 2000

본 논문에서는 개구 결합 방식의 마이크로스트립 안테나에 U 슬롯과 turning stub를 동시에 사용하여 넓은 대역폭을 갖는 안테나를 설계 및 제작하였다. 상대 유전율이 2.2이고 두께가 61mil인 duroid 5880기판을 사용하여 ITS(Intelligent Transport System)대역인 5.77GHz에서 동작하는 안테나를 설계하였고, VSWR$\leq$2를 기준으로 하여 약 12.4%의 대역폭을 얻을 수 있었다. 그리고 약 7GHz에서 동작하는 안테나에서는 상대 유전율이 2.2이고 두께가 31mil인 5880기판과 1.6mm인 form을 사용하여 VSWR$\leq$1.5를 기준으로 약 11.7%의 대역폭을 얻을 수 있었다. 각각의 경우 U 슬롯만을 사용한 경우와 비교할 때 5.77 GHz에서는 5.7% 7GHz대역에서는 약 4%의 대역폭 개선 효과를 확인할 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1452-1453
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• 2008

본 논문에서는 RF MEMS 패키징 플랫폼을 활용한 안테나 구조를 제안하고, 이를 바탕으로 마이크로머시닝 공정을 이용한 슬롯 결합형 원형 패치 안테나를 제작하였다. 제안된 안테나는 RF MEMS 패키징 플랫폼 상에서 패키징 물질을 안테나의 유전 물질로 이용하기 위하여 슬롯 결합형 급전 구조를 사용하였다. 한편, BCB를 이용한 폴리머 접착 접합 공정의 RF MEMS 패키징 플랫폼을 기반으로, 하판 유리기판과 상판 수정 기판을 일체화한 형태로 마이크로 스트립라인 안테나를 제작하였다. 최종 제작된 안테나는 20.36-GHz에서 -21 dB의 반사 손실 값을 나타내며, 1.7-GHz, 즉 8.3 %의 주파수 대역을 가진다.