• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.425-428
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• 1997

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective lapping work to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13pm of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07pm of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by the unskilled person after he experienced a little of preliminary machining. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.62-68
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• 2004

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.380-384
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• 1997

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. Reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, correctwe machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysls method proposed in the previous paper. These processes can be rtcrated if the analized motion errors are worse than target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail after corrective machining are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm IS effective to acquire the corrective machming information to improve the accuracy of hydrostatic table.

• 한국정밀공학회지
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• 제19권6호
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• pp.62-69
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• 2002

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, corrective machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysis method proposed in the previous paper. These processes can be iterated until the analized motion errors are satisfied with target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail, after corrective machining, are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm is effective to acquire the corrective machining information to improve the accuracy of hydrostatic table.

• International Journal of Precision Engineering and Manufacturing
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• 제5권2호
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• pp.60-67
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• 2004

For improving the motion accuracy of hydrostatic tables, a corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. The reverse analysis is performed firstly to estimate the rail profile from the measured linear and angular motion error, in the algorithm. For the next step, the corrective machining information is obtained based upon the estimated rail pronto. Finally, the motion errors on the correctively machined rail are analyzed by using the motion error analysis method. These processes are iterated until the analyzed motion errors are satisfactory within the target accuracy. In order to verify the validity of the algorithm theoretically, the motion errors calculated by the estimated rail after the corrective machining process, are compared with those by the true rail which is previously assumed as the initially measured value. The motion errors calculated using the estimated rail show good agreement with the assumed values, and it is shown that the algorithm is effective in acquiring the corrective machining information to improve the accuracy of hydrostatic tables.

• 한국정밀공학회지
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• 제19권6호
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• pp.70-76
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• 2002

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective machina work practically to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13$\mu$m of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07$\mu$m of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by an unskilled person after he experienced a little of preliminary machining training. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• 한국정밀공학회지
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• 제19권1호
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• pp.99-106
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• 2002

For the development of a ultra-precision CNC polishing system including on-machine measurement system, we study a corrective polishing algorithm. We calculated unit removal profiles for various flat type polishing tools and polishing tool positions. Using these results we simulate the corrective polishing process based on dwell time control. We calculate dwell time distributions and residual error of the polishing simulation method and the FFT calculation method. We test corrective polishing algorithm with an optical glass. The target removal shape is a sine wave that has amplitude 0.3 micro meters. We find this polishing process has a machining resolution of nanometer order and is effective for sub-micrometer order machining. This result will be used for the software development of the CNC polishing system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.950-955
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• 2001

For the development of an ultra-precision CNC polishing system including on-machine measurement system, we study a corrective polishing algorithm. We analyze and test the unit removal profiles for a ball type polishing tool. Using these results we calculate dwell time distributions and residual errors for a target removal shape. We use the polishing simulation method and feed rate calculation method for the dwell time calculation. We test corrective polishing algorithm with an optical glass. The target removal shape is a sine wave that has amplitude 0.3 micro meters. We find this polishing process has a machining resolution of nanometer order and is effective for sub-micrometer order machining. This result will be used for the software development of the CNC polishing system.

• 한국정밀공학회지
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• 제19권6호
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• pp.77-85
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• 2002

An analysis method which calculates corrective machining information for improving the motion accuracy of linear motion guide Is proposed in this paper. The method is composed of two algorithms. One is the algorithm fur prediction of the motion errors from rail form error. The other is the algorithm for prediction of rail form error from the motion errors of table. Transfer function is utilized in each algorithm, which represents the ratio of bearing reaction force variation to unit magnitude of spatial frequencies of raid from error. As the corrective machining information is acquired from the measured motion errors of table, the method has a merit not to measure rail form error directly. Validity of the method is verified both theoretically and experimentally. By applying the method, linear motion error of test equipment is reduced from 5.97$\mu$m to 0.58$\mu$m, and reduced from 32.78arcsec to 6.21 arcsec in case of angular motion error. From the results, it is confirmed that the method is very effective to improve the motion accuracy of linear motion guide.