Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on Corrective Polishing Using a Small Flat Type Polisher

소형 평면공구를 이용한 형상수정 폴리싱에 관한 연구

  • Kim, Eui-Jung (Institute for Advanced Engineering, Dept.of System Engineering, Ajou University) ;
  • Shin, Keun-Ha (Dept.of Mechanical Industry Engineering, Ajou University)
  • 김의중 (고등기술연구원 생산기술센터 및 아주대 시스템공학과) ;
  • 신근하 (아주대 기계및산업공학부)
  • Published : 2002.01.01
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Abstract

For the development of a ultra-precision CNC polishing system including on-machine measurement system, we study a corrective polishing algorithm. We calculated unit removal profiles for various flat type polishing tools and polishing tool positions. Using these results we simulate the corrective polishing process based on dwell time control. We calculate dwell time distributions and residual error of the polishing simulation method and the FFT calculation method. We test corrective polishing algorithm with an optical glass. The target removal shape is a sine wave that has amplitude 0.3 micro meters. We find this polishing process has a machining resolution of nanometer order and is effective for sub-micrometer order machining. This result will be used for the software development of the CNC polishing system.

Keywords

References

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