• 한국응용과학기술학회지
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• 제26권4호
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• pp.434-439
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• 2009

This paper is a new method for prevent. The particulate scale. stero-microscope were used for the scale removal experiment to improve mineralogical characteristics and the reduction of scales in heat pipe. Generally, the scale in the heat pipe consists of calcium carbonate minerals, such as calcite and aragonite which are precipitated by the reaction of Ca and $CO_2$ in the water. Copper alloy metal could eliminate the scale and prevent the production of scale in the heat pipe.

• 한국표면공학회지
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• 제17권1호
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• pp.1-6
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• 1984

The fluidized bed electrode reactor(FBER) with conducting particles has been made use of the removal of metals from dilute electroplating rinse water. The electrolysis was carried out under the conditions of diaphragm current density with 2~28A/$dm^2$ and bed expansion with 20~50%. Recirculating batch operations have been shown that the metal concentration dropped exponentially and may be taken down to 10 ppm. And then, the current efficiency at a concentration of 10 ppm copper was 37% under the conditions of 30% bed expansion and 6 A/$dm^2$, and at concentrated electrolyte (2000ppm copper) was over 80% in the range of 8~28A/$dm^2$ and 20~50% bed expansion. One of the technical possibilities of fluidized bed electrolysis is the separation of copper and nickel from a mixed solution of copper and nickel.

• Korean Chemical Engineering Research
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• 제54권4호
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• pp.548-554
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• 2016

Damascene 구조를 갖는 반도체소자의 구리금속배선 식각공정에서 배선재료에 의해서 발생되는 구리 식각잔류물을 제거하기 위해 oxalic acid (OA), lactic acid (LA) 및 citric acid (CA)의 카르복시산 함유된 반수계 혼합세정액을 제조하고 특성을 분석하였다. 카르복시산은 pH에 따라 카르복실기와 구리이온들과의 다양한 복합체를 형성하며 세정특성의 변화를 준다. 카르복시산들이 함유된 각각의 세정액의 세정특성평가결과 10 wt% CA를 함유한 반수계 세정액의 식각잔류물 세정특성은 pH 2에서 7까지의 영역에서 가장 낮은 구리 식각률을 보였으며 pH 2에서 4까지 구리에 대한 구리산화물의 가장 높은 식각 선택도를 나타내었으나 pH 5에서 7 범위에서는 10 wt% LA가 함유된 세정액이 더 높은 선택도를 보였다. 따라서 표면세정효과는 pH에 따라 변화하며 적절한 카르복시산을 사용함이 요구된다. CA가 함유된 세정액의 경우에 CA 농도와 구리에 대한 구리산화물의 식각 선택도의 증가특성을 보이며 CA가 5 wt%이상 함유된 경우에는 세정 후 구리배선의 표면이 88 %이상의 금속구리로 분석되어 구리산화물로 구성된 식각 잔류물의 제거에 효과적임을 알 수 있었다.

• 한국자원리싸이클링학회:학술대회논문집
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• 한국자원리싸이클링학회 1993년도 EARTH 발표논문초록
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• pp.24.2-24
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• 1993

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2004년도 추계학술대회 논문집
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• pp.465-466
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• 2004

• Journal of Electrochemical Science and Technology
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• 제11권4호
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• pp.346-351
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• 2020

The removal characteristics of copper (Cu) from electrochemical surface by voltage-activated reaction were reviewed to assess the applicability of electrochemical-mechanical polishing (ECMP) process in three types of electrolytes, such as HNO₃, KNO₃ and NaNO₃. Electrochemical surface conditions such as active, passive, transient and trans-passive states were monitored from its current-voltage (I-V) characteristic curves obtained by linear sweep voltammetry (LSV) method. In addition, the oxidation and reduction process of the Cu surface by repetitive input of positive and negative voltages were evaluated from the I-V curve obtained using the cyclic voltammetry (CV) method. Finally, the X-ray diffraction (XRD) patterns and energy dispersive spectroscopy (EDS) analyses were used to observe the structural surface states of a Cu electrode. The electrochemical analyses proposed in this study will help to accurately control the material removal rate (MRR) from the actual ECMP process because they are a good methodology for predicting optimal electrochemical process parameters such as current density, operating voltage, and operating time before performing the ECMP process.

• 한국재료학회지
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• 제9권6호
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• pp.583-588
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• 1999

The characteristics of copper thin films and pattern filling capability were investigated by ECD. Prior to deposition of copper film, seed-Cu/Ta(TaN)/$SIO_2$(BPSG)/Si structure was manufactured. Copper deposition was performed with various current waveforms(DC/PC, 1~10,000Hz) and current densities(10~60 mA/$\textrm{cm}^2$) after pretreatment (Oxident removal, wetting) of seed-layer. Conformal pattern filling was performed using PC method with fast deposition rate of 6,000~8,000$\AA$/min. Heat-treated($450^{\circ}C$, 30min) copper films showed good resistivities of 1.8~2.1$\mu$$\Omega$.cm. According to the XRD analysis, (111)-preferred orientation of copper film was found in ECD-Cu/seed-Cu/Ta/$Sio_2$/Si structure. Also, we have successfully achieved to fill via holes with 0.35$\mu\textrm{m}$ width and 4:1 aspect ratio.

• 한국안전학회지
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• 제6권3호
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• pp.5-11
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• 1991

To remove NO from flue gas, a direct decomposition method to $N_2$ and $O_2$ was investigated by using copper / zeolite catalyst. The copper ion-exchanged HY type zeolite has high activity on NO decomposition. The decomposition activity was increased with the increase of ion-exchange level, contacting time and reaction temperature in the range of 30$0^{\circ}C$ -50$0^{\circ}C$ , and decreased with the oxygen addition.

• 자원리싸이클링
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• 제20권5호
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• pp.64-68
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• 2011

망간단괴는 높은 비표면적과 주 구성성분이 ${\delta}$-MnO$_2$ 이기 때문에 폐수 중의 중금속 흡착제로서 적합하다. 본 연구에서는 구리 함유 폐수를 이용하여 고정형 컬럼과 bed형 흡착장치를 사용하여 현장에서 망간단괴의 중금속 흡착제로서 사용 가능성에 대하여 검토하였다. l kg의 망간단괴 (입자크기 1-3 cm)를 사용하여 구리이온을 0.97 g/L 함유한 폐수를 3시간 처리한 결과 고정형 칼럼과 고정형 bed에서 각각 4.0g과 2.3g의 구리가 흡착, 제거되었다.

• 한국환경보건학회지
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• 제27권3호
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• pp.99-106
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• 2001

A laboratory experiment was performed to investigate phosphorus and nitrogen removal from synthetic wastewater by intermittently activated sludge process packed with aluminium plate. Three continuous experimental systems, I. e. an intermittently activated sludge process(Run A), an intermittently activated sludge process with an aluminium plate packed into the reactor(Run B), and a reactor post stage(Run C) were compared. In the batch experiments, the phosphorus removal time in the reactor packed with copper and aluminium plate simultaneously was faster than that of the reactor packed with only an aluminium plates. However, the reactor packed with only an aluminium plate could be used for phosphorus removal. Move phosphorus was removed with an increase of surface area of aluminium plate and electrolysis(NaCl) concentration. The efficiency of COD and nitrogen removal was not affected in Run B. However, the phosphrus removal efficiency decreased because of reaction products and activated sludge which gradually covered gradually the surface of the aluminium plate. The efficiency of phosphorus removal in Run C was 86.3% at the HRT of 3.2 hours. Especially, the efficiency of phosphorus removal in Run C was higher than that in Run B.