• 제목/요약/키워드: Copper Effect

검색결과 1,339건 처리시간 0.036초

Effect of Microstructure of Substrate on the Metallization Characteristics of the Electroless Copper Deposition for ULSI Interconnection Effect of Plasma

  • 홍석우;이용선;박종완
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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    • pp.86-86
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    • 2003
  • Copper has attracted much attention in the deep submicron ULSI metallization process as a replacement for aluminum due to its lower resistivity and higher electromigration resistance. Electroless copper deposition method is appealing because it yields conformal, high quality copper at relatively low cost and a low processing temperature. In this work, it was investigated that effect of the microstructure of the substrate on the electroless deposition. The mechanism of the nucleation and growth of the palladium nuclei during palladium activation was proposed. Electroless copper deposition on TiN barriers using glyoxylic acid as a reducing agent was also investigated to replace toxic formaldehyde. Furthermore, electroless copper deposition on TaN$\sub$x/ barriers was examined at various nitrogen flow rate during TaN$\sub$x/ deposition. Finally, it was investigated that the effect of plasma treatment of as-deposited TaN$\sub$x/ harriers on the electroless copper deposition.

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Effect of Copper Retention on Copper Leaching in Wood Treated with Copper-based Preservatives

  • Ra, Jong-Bum;Kang, Sung-Mo;Kang, Shin-Kwon
    • Journal of the Korean Wood Science and Technology
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    • 제37권5호
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    • pp.421-425
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    • 2009
  • This research investigates the effect of copper retention on copper leaching in wood treated with copper-based preservatives. Radiata pine (Pinus radiata D. Don) sapwood samples were ground in a Wiley mill equipped with a 20-mesh screen. The ground wood was vacuum-treated with various concentrations of alkaline copper quat (ACQ), bis-(N-cyclohexyl-diazeniumdioxy)-copper (CB-HDO), and copper azole (CUAZ). The treated samples were conditioned at $70^{\circ}C$ and 100% RH for 72 hours. The samples were leached by using the distilled water for four weeks, and the copper contents in each sample were measured by X-ray spectroscopy. As expected, the copper leaching was increased with increasing of copper retention. The copper leaching from the ACQ and CB-HDO treated samples were gradually decreased with increasing copper retention: however, the copper losses from the CUAZ treated samples appeared to be proportionally increased with the increase in copper retention in all retention levels tested. The results indicate that at the conditions of the same copper retention ACQ and CB-HDO treated wood have a better leaching resistance compared to CUAZ treated wood.

부유 성장식 생물학적 폐수처리에 미치는 구리의 영향 (Effect of Copper on the Suspended Growth Biological Wastewater Treatment)

  • 서정범;황창민
    • 대한환경공학회지
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    • 제35권7호
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    • pp.479-484
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    • 2013
  • 본 연구에서는 회분식 실험 및 $A_2/O$ 공법의 연속식 실험으로 구리가 생분해, 산소소모율 및 질산화에 미치는 영향을 검토하였다. 본 연구의 결과를 요약하면 다음과 같다. 구리 영향 실험 결과 유기물 분해는 회분식 실험의 경우 구리 농도 4.5 mg/L 이상, 연속식은 구리 농도 2.0 mg/L 이상일 때 영향을 미쳤다. 질산화 및 질소 제거의 경우 회분식은 구리 농도 4.5 mg/L 이상에서 질산화에 영향을 미쳤으며, 연속식의 경우 구리 농도 1 mg/L 이상일 때 질소 제거에 영향을 미쳤다. 인 제거의 경우 회분식은 구리 농도 4.5 mg/L, 연속식은 구리 농도 2 mg/L 이상일 때 영향을 미치는 것으로 나타났다. 산소소모율의 경우 회분식과 연속식 모두 구리 농도 1.5 mg/L 이상일 경우 미생물 활성에 나쁜 영향을 주어 산소소모율이 낮아졌다.

전기투석을 이용한 구리이온의 제거 시 운전인자의 영향 (Effect of Operating Parameters on the Removal Performance of Copper Ion by Electrodialysis)

  • 정효상;이강춘
    • 한국물환경학회지
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    • 제27권1호
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    • pp.54-60
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    • 2011
  • To evaluate the feasibility of electrodialysis for copper removal from industrial wastewater, the effect of operating parameters on the removal of copper was experimentally estimated. The limiting current density (LCD) linearly increased with the copper concentration and the flow rate. The time when the copper concentration of diluate reaches to 3 mg/L was linearly proportional to initial concentration of diluate, and the concentration of concentrate did not affect the removal rate. Increase in the flow rate gave a positive effect on the removal rate and became insignificant at flow rates greater than 2.4 L/min. The removal rate increased with the applied voltage. From the operation of the electrodialysis module used in this research, the flow rate of 2.4 L/min and the voltage corresponding to the 80~90% of LCD were found be the optimum operating condition for the copper removal from highly concentrated copper solutions.

중금속이 애기장대의 생장과 종자발아에 미치는 영향 (Effects of Heavy Metals on Growth and Seed Germination of Arabidopsis thaliana)

  • 박영숙;박종범
    • 한국환경과학회지
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    • 제11권4호
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    • pp.319-325
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    • 2002
  • This experiment was carried out to investigate the effects of heavy metals (copper, cadmium, lead and chrome) on the growth of plant and seed germination of Arabidopsis thaliana treated with various concentrations of heavy metals. Cadmium and chrome among the 4 heavy metals had no effect on the growth of stem even in the concentration fifty times higher than the official standard concentration of pollutant exhaust notified by the Ministry of Environment. The official standard concentration of cadmium, however, stimulated the growth of stem in general, increasing leaf size and surface area, although it had no effect on the length of stem. But the growth of stem was decreased about 18% in the official standard concentration of pollutant exhaust of lead and copper. There was no growth of root in the concentration of lead and copper ten times higher than the official standard concentration. Cadmium and chrome had no effect on the seed germination, but lead and copper decreased the rate of seed germination. Seeds were not germinated in the concentration of copper ten times higher than the official standard concentration and in the concentration of lead fifty times higher than the official standard concentration. From this research three peculiar results were obtained. Chrome in the soil did not have much effect on the plant growth and seed germination of Arabidopsis thaliana. Cadmium stimulated the stem growth in an optimum concentration. But lead and copper reduced the plant growth and seed germination even in a small concentration, especially copper had the worse effect.

임신과 수유기간 동안 Alcohol과 저 Copper 식이가 어미와 새끼 쥐 간의 Copper 수준에 미치는 영향 (Influence of Alcohol and Low Dietary Copper on Copper Utilization of Maternal and Offspring Liver)

  • Lee, Jong Ho
    • Journal of Nutrition and Health
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    • 제23권6호
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    • pp.443-450
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    • 1990
  • 임신과 수유 기간 동안 alcohol의 섭취가 어미와 새끼 쥐의 간내 copper 유용에 미치는 영향을 연구하기 위하여 cthanol(0 혹은 30%의 Kcal)과 copper(0.75 혹은 3.75mg/l 식이) 함량에 차이를 둔 식이조성으로 alcohol과 copper의 상호작용을 규명하는 factorial experiment를 수행하였다. 어미 쥐의 열량 섭취와 체중은 식이들에 의해 영향을 받지 않았다. 식이내 copper양이 적을 경우 alcohal을 섭취하지 않은 실험군과 비교하여 alcohol을 섭취한 실험군인 어미 쥐의 간 copper농도가 더욱 감소됨으로써 alcohol과 copper의 상호작용을 보여주었다. 새끼 쥐에게서는 식이내 copper 수준에 관계 없이 어미쥐의 alchol 섭취가 간의 총coppernein의 copper 농도에 반영되었다. Metallothionein의 zinc 함량은 metallothionetin의 copper함량과 반비례적인 관계로 보여주었다. 이상의 결과로 임신과 수유기 동안 식이내 copper함량이 적을 경우 alchol 섭취는 어미와 새끼 모두에게 copper 결핍을 초래할 수 있다는 것을 시사해준다.

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배추 엽록체의 광계II 활성에 미치는 구리이온의 영향 (Effect of Cupric Ion on the PSII Activity in Isolated Chinese Cabbage Chloroplasts)

  • 박인호
    • Journal of Plant Biology
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    • 제30권3호
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    • pp.181-187
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    • 1987
  • Copper inhibited PSII-mediated O2 evolution (H2OlongrightarrowDCIP, H2OlongrightarrowSiMo) but not PSImediated O2 uptake(DCIP. Asc.longrightarrowMV) in isolated Chinese cabbage chloroplasts. Copper toxicity on PSII-mediated O2 evolution was higher at alkaline condition than at acidic condition and was inhanced by light illumination after copper treatment. The increased toxicity by light illumination was not recovered by subsequent dark treatment. The inhibitory effect of copper on H2OlongrightarrowDCIP reaction was higher than that on H2OlongrightarrowSiMo reaction. This result suggests that there may be another inhibitory site of copper on PSII other than water oxidizing side of PSII.

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Effect of Zincate Treatment of As-Cast AZ91 Mg Alloy on Electrodeposition of Copper in a Copper Pyrophosphate Bath

  • Nguyen, Van Phuong;Park, Min-Sik;Yim, Chang Dong;You, Bong Sun;Moon, Sungmo
    • 한국표면공학회지
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    • 제49권5호
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    • pp.401-407
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    • 2016
  • In this work, effect of zincate treatment of AZ91 Mg alloy on the following electrodeposition of copper was examined in a non-cyanide bath containing pyrophosphate ions in view of surface morphology and adhesion of the electrodeposited copper layer. Without zincate treatment, the electrodeposited copper layer showed very porous structure and poor adhesion. On the other hand, the copper layer electrodeposited on the zincate-treated surface showed dense structure and good adhesion. The dissolution rate of AZ91 Mg alloy after the zincate treatment appeared to decrease about 40 times in the copper pyrophosphate bath, as compared to that of the surface without zincate treatment. The porous morphology and poor adhesion of a copper layer on the AZ91 Mg alloy surface without zincate treatment were attributed to small number of nucleation sites of copper because of rapid dissolution of the magnesium substrate in the pyrophosphate bath. Based on the experimental results, it is concluded that the zincate treatment to form a conducting and protecting layer on the AZ91 Mg alloy surface is essential for successful electrodeposition of a copper layer on AZ91 Mg alloy with good adhesion and dense structure in the copper pyrophosphate bath.

Copper-clad Aluminium 복합재료의 정수압 압출시 다이 각이 미치는 효과 (Effect of Die Angle in the Hydrostatic Extrusion of Copper-clad Aluminium Composites)

  • 한운용;박훈재;윤덕재;정하국;김승수;김응주;이경엽
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.414-417
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    • 2003
  • A copper-clad aluminium composite bar is lighter and less expressive than a commercial copper alloy bar. Copper-clad aluminium composite bar can be fabricated by hot hydrostatic extrusion process. In this work, the effect of die angle on the compressive properties of copper-clad aluminium composites fabricated using hydrostatic extrusion process was investigated experimentally. The results showed that optimum half die angle was in the range of 40$^{\circ}$ to 50$^{\circ}$ for an extrusion ratio of 19. The results also showed that the half die angle had little influence on the compressive strength of copper-clad aluminium composites. A diffusion layer increased with increasing die angle.

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용액 교반이 미세 패턴 내 무전해 구리 도금에 미치는 영향 (The Effect of Solution Agitation on the Electroless Cu Deposition Within Nano-patterns)

  • 이주열;김만;김덕진
    • 한국표면공학회지
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    • 제41권1호
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    • pp.23-27
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    • 2008
  • The effect of solution agitation on the copper electroless deposition process of ULSI (ultra large scale integration) interconnections was investigated by using physical, electrochemical and electrical techniques. It was found that proper solution agitation was effective to obtain superconformal copper configuration within the trenches of $130{\sim}80nm$ width. The transition of open potential during electroless deposition process showed that solution agitation induced compact structure of copper deposits by suppressing mass transfer of cuprous ions toward substrate. Also, the specific resistivity of copper layers was lowered by increasing agitation speed, which made the deposited copper particles smaller. Considering both copper deposit configuration and electric property, around 500 rpm of solution agitation was the most suitable for the homogeneous electroless copper filling within the ultra-fine patterns.