• 비파괴검사학회지
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• 제24권6호
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• pp.581-589
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• 2004

본 연구는 선행연구의 결과를 바탕으로 cMUT를 개발하여 그 특성을 분석하기 위하여 수행되었다. 미세 반도체 제작공정을 적용하여 cMUT를 제작하여 단면특성을 측정하여 분석하였다. 제작된 cMUT의 미소 진동 막의 변위를 측정할 수 있는 마이켈슨 위상변조 간섭계를 구성하여 측정결과와 이론적인 해석결과와 비교하였다. cMUT의 초음파 특성을 분석하기 위하여 송수신 시스템을 구성하였다 비접촉 방법으로 cMUT에 의해 발생되는 초음파 신호를 수신하여 수신파형의 특성을 분석한 결과 양호한 주파수 특성을 나타내었다. 본 연구에서 개발된 cMUT는 향후 비접촉식 초음파 응용분야에 다양하게 활용될 것으로 판단된다.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.44-48
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• 2007

In recent years, the size of plane substrates and semiconductor wafers has increased. As conventional contact transportation systems composed of, for example, carrier rollers, belt conveyers, and robot hands carry these longer and wider substrates, the increased weight results in increased potential for fracture. A noncontact transportation system is required to solve this problem. We propose a new noncontact transportation system combining acoustic viscous and aerostatic forces to provide damage-free transport. In this system, substrates are supported by aerostatic force and transported by acoustic viscous streaming induced by traveling wave deformation of a disk-type stator. A ring-type piezoelectric transducer bonded on the stator excites vibration. A stator with a high Q piezoelectric transducer can generate traveling vibrations with amplitude of $3.2{\mu}m$. Prior to constructing a carrying road for substrates, we clarified the basic properties of this technique and stator vibration characteristics experimentally. We constructed the experimental equipment using a rotational disk with a 95-mm diameter. Electric power was 70 W at an input voltage of 200 Vpp. A rotational torque of $8.5\times10^{-5}Nm$ was obtained when clearance between the stator and disk was $120{\mu}m$. Finally, we constructed a noncontact transport apparatus for polycrystalline silicon wafers $(150(W)\times150(L)\times0.3(t))$, producing a carrying speed of 59.2 mm/s at a clearance of 0.3 mm between the stator and wafer. The carrying force when four stators acted on the wafer was $2\times10^{-3}N$. Thus, the new noncontact transportation system was demonstrated to be effective.

• Journal of Welding and Joining
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• 제23권5호
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• pp.37-42
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• 2005

The non-destructive Inspection of the fillet weldment has difficulties due to its geometrical complexity and uneasy access. The surface shear horizontal wave (SH-wave), however, has been successfully applied to the detection of cracks on the surface and sub-surface of the filet weldment heel part. The conventional ultrasonic inspection using the surface SH-wave is usually a contact method using piezoelectric transducer. Thus, it is not suitable for a field application because the reliability and repeatability of inspection are significantly affected by test conditions such as couplant, contact pressure and pre-process. In order to overcome this problem, a non-contact SH-wave inspection method using EMAT is propose. The experimental results with this non-contact method are compared with those with a conventional ultrasonic method in fillet weldment with slit type defects. It is shown that the non-contact inspection technique requires simple procedure and less time in the fillet weldment inspection.

• 한국생산제조학회지
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• 제25권1호
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• pp.48-53
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• 2016

An EMAT can be used to reliably detect defects as it serves as a non-contact transducer with the ability to transmit ultrasonic waves into specimens without couplant. Moreover, an EMAT can easily generate desired waves by altering the design of the coil and magnet. This study proposes an SH-EMAT to evaluate the integrity of the TIG welding part. A stainless steel was welded using the TIG welding method. The welding current was varied to create artificial defects. Both the PA-UT and the RT were applied to verify the defect size. The experimental results generated by using the EMAT were compared with those methods. The amplitude was observed to decrease with an increase in the defect size. These results confirmed that the presence of defects can be reliably detected by attenuation of signal amplitude. The results demonstrated that the proposed method is suitable for evaluating the integrity of TIG welding.

• 비파괴검사학회지
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• 제32권4호
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• pp.388-392
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• 2012

본 연구에서는 표면파의 음향비선형 특성 측정을 위해 선 배열 레이저 빔을 이용하여 협대역의 표면파를 발생시키고 레이저 TWM(Two-Wave Mixing) 방식으로 수신하는 완전 비접촉 측정 방법이 도입되었다. 이 기술은 알루미늄 합금의 소성변형과 음향비선형 특성과의 상관성을 조사하는데 적용되었다. 그 결과, 재료의 소성변형에 따라 음향 비선형성이 비례적으로 증가하는 것으로 나타났으며, 이는 접촉식 PZT 탐촉자 수신 방법으로 측정한 결과와 동일한 경향이다.

• 한국생산제조학회지
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• 제20권6호
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• pp.773-777
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• 2011

Conventional ultrasonic thickness measurement is to be considered as the assumption that the ultrasonic velocity is known. In actual applications the velocity is often not well known and access is often limited to one side. This paper aims at determining the ultrasonic velocity and thickness of plates with parallel or wedged surfaces using contact measurements made on one surface only. For wedged plates the thickness at one point and the wedge angle are determined. Equations are used for determining the ultrasonic velocity, thickness and wedge angle of the plate based on the times-of-flight measured by two contact transducers coupled to one surface. The time-of-flight of the obliquely reflected longitudinal wave echo was measured as a function of the separation between the two transducers. In addition, a simulation was made for comparing the experimental data and a FEM image. Experiments and simulations were performed on flat and wedged plates of aluminium materials; the calculated results for the unknown quantities are generally agreed with them to some degree.

• Smart Structures and Systems
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• 제17권1호
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• pp.31-43
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• 2016

Applications of ultrasonic tomography to concrete structures have been reported for many years. However, practical and effective application of this tool for nondestructive assessment of internal concrete condition is hampered by time consuming transducer coupling that limits the amount of ultrasonic data that can be collected. This research aims to deploy recent developments in air-coupled ultrasonic measurements of solids, described in Part 1 of this paper set, to concrete in order to image internal inclusions. Ultrasonic signals are collected from concrete samples using a fully air-coupled (contactless) test configuration. These air coupled data are compared to those collected using partial semi-contact and full-contact test configurations. Two samples are considered: a 150 mm diameter cylinder with an internal circular void and a prism with $300mm{\times}300mm$ square cross-section that contains internal damaged regions and embedded reinforcement. The heterogeneous nature of concrete material structure complicates the application and interpretation of ultrasonic measurements and imaging. Volumetric inclusions within the concrete specimens are identified in the constructed velocity tomograms, but wave scattering at internal interfaces of the concrete disrupts the images. This disruption reduces defect detection accuracy as compared with tomograms built up of data collected from homogeneous solid samples (PVC) that are described in Part 1 of this paper set. Semi-contact measurements provide some improvement in accuracy through higher signal-to-noise ratio while still allowing for reasonably rapid data collection.

• 비파괴검사학회지
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• 제22권6호
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• pp.621-626
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• 2002

The amplitude of a back-wall echo depends on the reflection coefficient of the interface between a transducer and a test material when using contact pulse-echo ultrasonic testing. A couplant is used to transmit ultrasonic energy across the interface, but has an influence on the amplitude of the pulse-echo signal. To investigate the couplant effect on pulse-echo ultrasonic testing, back-wall echoes are measured by using various couplants made of water and glycerine in a carbon and austenitic stainless steel specimens. The amplitude of the first back-wall echo and the apparent attenuation coefficient increases with the acoustic impedance of the couplant. The couplant having a higher value of the transmission coefficient is more effective for flaw detection. The reflection coefficient should be known in order to measure the attenuation coefficient of the test material.

• Journal of Welding and Joining
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• 제30권6호
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• pp.36-41
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• 2012

General condensers consist of many tubes supported by tube sheets and support plates to prevent the deflection of the condenser tubes. When a fluid at high pressure and temperature runs over the tubes for the purpose of transferring heat from one medium to another, the tubes vibrate and their surface comes into contact with the support plates. This vibration causes damage to the tubes, such as cracks and wear. We propose an ultrasonic guided wave technique to detect the above problems in the support plate region. In the proposed method, the ultrasonic guided wave mode, L(0,1), is excited using an internal transducer probe from a single position at the end of the tube. In this paper, we present a preliminary experimental verification using a super stainless tube and show that the defects can be discriminated from the support signals in the support region.

• Smart Structures and Systems
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• 제17권1호
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• pp.17-29
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• 2016

Ultrasonic tomography is a powerful tool for identifying defects within an object or structure. But practical application of ultrasonic tomography to solids is often limited by time consuming transducer coupling. Air-coupled ultrasonic measurements may eliminate the coupling problem and allow for more rapid data collection and tomographic image construction. This research aims to integrate recent developments in air-coupled ultrasonic measurements with current tomography reconstruction routines to improve testing capability. The goal is to identify low velocity inclusions (air-filled voids and notches) within solids using constructed velocity images. Finite element analysis is used to simulate the experiment in order to determine efficient data collection schemes. Comparable air-coupled ultrasonic signals are then collected through homogeneous and isotropic solid (PVC polymer) samples. Volumetric (void) and planar (notch) inclusions within the samples are identified in the constructed velocity tomograms for a variety of transducer configurations. Although there is some distortion of the inclusions, the experimentally obtained tomograms accurately indicate their size and location. Reconstruction error values, defined as misidentification of the inclusion size and position, were in the range of 1.5-1.7%. Part 2 of this paper set will describe the application of this imaging technique to concrete that contains inclusions.