Non-contact Transportation of Flat Panel Substrate by Combined Ultrasonic Acoustic Viscous and Aerostatic Forces |
Isobe, Hiromi
(Department of Mechanical Engineering, Nagano National College of Technology)
Fushimi, Masaaki (Business Generalization Division, Produce Co., Ltd.) Ootsuka, Masami (Project Development Division, Produce Co., Ltd.) Kyusojin, Akira (Department of Mechanical Engineering, Nagaoka University of Technology) |
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