• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.817-818
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• 2010

• 한국생산제조학회지
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• 제23권6호
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• pp.636-641
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• 2014

This paper discusses the fabrication process for a Nipkow disk using micro-lens and pinhole disks. The confocal measuring system that uses the Nipkow disk has the advantage in measuring speed, because the Nipkow disk can simultaneously provide confocal images of all pixels in a CCD camera without requiring a lateral scanning unit. A micro-lens configuration, which focuses illumination on a pinhole, overcomes the low optical efficiency of the Nipkow disk system and allows its use in practical applications. This paper describes how to design the Nipkow disk in terms of numerical aperture, particularly for measuring the height of solder bumps in packaging application and for hybrid processes combining mechanical and semiconductor processes.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
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• pp.123-128
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• 2006

We constructed a micro-patterning system that build patterns on a photoresist coated wafer using laser direct writing system. Confocal microscope system was adapted for real-time auto-focusing of the laser writing lens to generate lines of uniform width.

• International Journal of Precision Engineering and Manufacturing
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• 제7권4호
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• pp.3-7
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• 2006

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

• 제어로봇시스템학회논문지
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• 제19권11호
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• pp.979-983
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• 2013

The three-dimensional measurement method of confocal systems is a spot scanning method which has a high resolution and good illumination efficiency. However, conventional confocal systems had a weak point in that it has to perform XY axis scanning to achieve FOV (Field of View) vision through spot scanning. There are some methods to improve this problem involving the use of a galvano mirror [1], pin-hole array, etc. Therefore, in this paper we propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array in a dual microscope configuration. We made an area scan possible by using a combination MLA (Micro Lens Array) and pin-hole array, and used an objective lens to improve the light transmittance and signal-to-noise ratio. Additionally, we made it possible to change the objective lens so that it is possible to select a lens considering the reflection characteristic of the measuring object and proper magnification. We did an experiment using 5X, 2.3X objective lens, and did a calibration of height using a VLSI calibration target.

• Current Optics and Photonics
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• 제4권1호
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• pp.44-49
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• 2020

In this paper, a new method is presented to measure the refractive index of single plain glass or multilayered materials, based on a laser frequency-shifted confocal feedback microscope. Combining the laser frequency-shifted feedback technique and the confocal effect, the method can attain high axial-positioning accuracy, stability and sensitivity. Measurements of different samples are given, including N-BK7 glass, Silica plain glass, and a microfluidic chip with four layers. The results for N-BK7 glass and Silica plain glass show that the measurement uncertainty in the refractive index is better than 0.001. Meanwhile, the feasibility of this method for multilayered materials is tested. Compared to conventional methods, this system is more compact and has less difficulty in sample processing, and thus is promising for applications in the area of refractive-index measurement.

• 한국광학회지
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• 제10권3호
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• pp.201-207
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• 1999

단일모드 광섬유와 결합기를 이용하여 간결한 구조의 광섬유 공초점 간섭 현미경을 구성하였으며, 위상 변위법을 응용한 표면 검색 방법을 제안하여 통신용의 반도체 레이저와 같이 비교적 긴 파장의 광원과, 낮은 NA의 대물렌즈를 사용하더라도 정밀한 시료 표면 검색이 가능함을 보였다. 이때 시료 표면의 높낮이는 시료로부터 반사된 빛의 위상으로부터 결정되며, 종래의 공초점 현미경에 비하여 주사시간을 크게 단축할 수 있었다. 끝으로 종래의 방법에 비해 제안된 방법은 시료의 반사율 변화에 덜 민감함을 확인할 수 있었다.

• 한국가시화정보학회지
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• 제8권1호
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• pp.46-52
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• 2010

In the present study, we employed the confocal laser scanning microscopy (CLSM) system to visualize the blood flow field with $1{\times}1{\mu}m^2$ spatial resolution. Based on the confocal microscopic image of red blood cells (RBCs), we performed the velocity vector field measurement and evaluated characteristics of cell migration from the cell depleted layer thickness calculation. The rat and mouse's blood were supplied into a micro glass tubes in vitro. The line scanning rate of confocal microscopy was 15 kHz for a $500{\times}500$ pixels image. As a result, the red blood cell itself can be used as a tracer directly without any kind of invasive tracer particle to get the velocity vector field of blood flow by performing particle image velocimetry (PIV) technique.

• 대한소아치과학회지
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• 제33권1호
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• pp.1-12
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• 2006

최근 새로 개발된 DIFOTI(Digital Imaging Fiber-Optic Transillumination) 시스템의 초기 법랑질 우식증 진단 능력을 평가하고 임상 적용의 가능성을 타진해 보고자 본 연구를 시행하였다. 임상 연구는 유치 탈락 시기에 근접한 학령기 아동 23명을 대상으로 DIFOTI 이미지 촬영을 시행하고 자연 탈락된 유치 20개를 수거하여 CLSM 촬영 결과를 바탕으로 민감도(sensitivity)와 특이도(specificity)를 산출하였으며 실험실 연구에서는 수거된 40개의 유치를 대상으로 Carbopol 인공 우식 용액으로 1, 2, 4 그리고 8일간 탈회시킨 후 각각 방사선 사진, DIFOTI 이미지 그리고 CLSM와 비교 분석하여 다음과 같은 결론을 얻었다. 1. 구내에서 촬영한 DIFOTI 이미지의 민감도는 0.61이었고, 특이도는 0.63이었다. 2. 실험실에서 인공 탈회시킨 유치의 협설면 초기 우식증에 대한 DIFOTI 이미지의 민감도는 0.71였고, 특이도는 0.75였다.

• Journal of the Optical Society of Korea
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• 제9권1호
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• pp.26-31
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• 2005

We describe the design and the implementation of video-rate reflection confocal scanning microscopy (CSM) using an acousto-optical deflector (AOD) for the fast horizontal scan and a galvanometer mirror (GM) for the slow vertical scan. Design parameters of the optical system are determined for optimal resolution and contrast. The OSLO simulations show that the performances of CSM are not changed with deflection angle and the wavefront errors of the system are less than 0.012λ. To evaluate the performances of designed CSM, we do a series of tests, measuring lateral and axial resolution, real time image acquisition. Due to a higher axial resolution compared with conventional microscopy, CSM can detect the surface of sub-micrometer features. We detect 138㎚ line shape pattern with a video-rate (30 frm/sec). And 10㎚ axial resolution is archived. The lateral resolution of the topographic images will be further enhanced by differential confocal microscopy (DCM) method and computational algorithms.