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http://dx.doi.org/10.7735/ksmte.2014.23.6.636

Development of Nipkow Disk for High-Speed Confocal Probe Using Micro-lens and Pinhole Disks  

Kim, Gee Hong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials)
Lee, Hyung Seok (NanoSystem Co. LTD.)
Kim, Chang Kyu (NanoSystem Co. LTD.)
Lim, Hyung Jun (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials)
Lee, Jae Jong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials)
Choi, Kee Bong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.23, no.6, 2014 , pp. 636-641 More about this Journal
Abstract
This paper discusses the fabrication process for a Nipkow disk using micro-lens and pinhole disks. The confocal measuring system that uses the Nipkow disk has the advantage in measuring speed, because the Nipkow disk can simultaneously provide confocal images of all pixels in a CCD camera without requiring a lateral scanning unit. A micro-lens configuration, which focuses illumination on a pinhole, overcomes the low optical efficiency of the Nipkow disk system and allows its use in practical applications. This paper describes how to design the Nipkow disk in terms of numerical aperture, particularly for measuring the height of solder bumps in packaging application and for hybrid processes combining mechanical and semiconductor processes.
Keywords
Nipkow disk; Confocal measurement; Micro-lens disk; Pinhole disk; 3-dimensional measurement;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Tiziani, H. J., Achi, R., Kramer, R. N., Wiegers, L., 1996, Theoretical analysis of confocal microscopy with microlenses, Appl. Opt. 35:1 120-125.   DOI
2 Daly, D., 2001, Microlens Arrays, CRC Press, New York.
3 Pawley, J. B., 2006, Handbook of Biological Confocal Microscopy 3rd Ed., Springer, Germany.
4 Corle, T. R., Kino, G. S., 1996, Confocal Scanning Optical Microscopy and Related Imaging Systems, Academic Press, San Diego.
5 Tanaami, T., Otsuki, S., Tomosada, N., Kosugi, Y. Shimizu, M., Ishida, H., 2002, High-speed 1-frame/ms scanning confocal microscope with a microlens and Nipkow disks, Appl. Opt. 41:22 4704-4708.   DOI
6 Ishihara, M., Sasaki, H., 1999, High-speed surface measurement using a nonscanning multiple-beam confocal microscope, Opt. Eng. 38:6 1035-1040.   DOI
7 Kim, G. H., Lim, H. J., Jeong, M. R., Lee, J. J., Choi, K. B., Lee, H. S., Do, L. M., Fabrication of Micro-Lens Array with Long Focal Length for Confocal Microscopy, J. KSMTE 20:4 472-477.   과학기술학회마을
8 Eisner, M., Lindlein, N., Schwider, J., 1998, Confocal microscopy with a refractive microlens-pinhole array, Opt. Lett. 23:10 748-749.   DOI
9 Ishihara, M., 1999, Three-dimensional shape measuring apparatus, US patent : 5946100.