• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.51-54
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• 2008

A novel stereolithography method using evanescent light has been proposed as a means to realize 100-nanometer resolution. An in-process measurement system with high accuracy has been introduced to the nanostereolithography apparatus. Specifically, an optical microscopic system was developed to monitor the exposure process and a confocal positioning system was established to improve the longitudinal positioning accuracy in the layer-by-layer process. A high-power objective lens, a tube lens, and a charge coupled device (CCD) were included in the optical microscopic system, whereas a laser, a high-power objective lens, a piezoelectric (PZT) stage, a condenser lens, a pinhole, and a photomultiplier (PMT) made up the confocal microscopic system. Two verification experiments were conducted, and the results indicated that the optical microscopic system had a horizontal resolution of 200 nm and that the confocal positioning system provided a depth resolution of 30.8 nm. These results indicate that nanostereolithography can be successfully performed with this system.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.99.3-99
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• 2001

In fluorescence mode confocal scanning microscope, level of detected signal is very low. In object scanning type confocal scanning microscope, the additional optical system with objective lens and plane mirror was proposed to increase signal intensity, but there was none for beam scanning type confocal scanning microscope. We propose reflecting optical systems which improve signal intensity in beam scanning type confocal scanning microscope. We choose one of the proposed optical systems and design the optical system, i.e., select optical components and assign distances between the selected components. To design the optical system, we use finite ray tracing method and make cost function to be minimized.

• 정보저장시스템학회논문집
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• 제11권2호
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• pp.22-25
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• 2015

In this paper, we demonstrate solid-immersion lens based confocal microscopy using super-continuum generation effect. Using super-continuum generation effect, we could diversify the excitation wavelength of confocal microscopy. Further, high refractive index of solid-immersion lens would increase the resolution of confocal microscopy. As a result, by applying the super-continuum generation effect and solid-immersion lens to confocal microscopy, some problems of confocal fluorescent microscopy, the excitation wavelength and the resolution, could be overcome. To verify it, we made home-built solid-immersion lens based confocal microscopy using super-continuum generation effect, and evaluate the performance of the system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.187-190
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• 2002

Confocal microscopy is very popular technology in bio-medical inspection due to its ability to reject background signals and to measure very thin slide of thick specimens, which is called optical sectioning. But intensity of detected signal in fluorescence type confocal microscopy is so small that only 0.2% of emitted fluorescence light can be detected in the best case. In this paper, we proposed the reflecting optical system to improve the detection intensity and designed the optical system by optimal design method. At the end of the paper, we analyzed the characteristics of the proposed reflecting optical system.

• 정보저장시스템학회논문집
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• 제6권1호
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• pp.25-30
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• 2010

In this paper, we investigate the confocal filter for high quality reading signal of micro holographic data storage system. The confocal filter is used to remove crosstalk effects of adjacent recording-layer by multi-layer multiplexing method. To remove a noise of reading signal, we consider size and geometrical structure of filter. From the obtained results, we present optical characteristics including Fresnel and Fraunhofer diffraction effects. Finally, we propose the optimal confocal filter for good image quality and increased reflection power.

• 한국정밀공학회지
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• 제21권2호
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• pp.92-99
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• 2004

The errors can cause the serious loss of the performance of a precision machine system. In this paper, we proposed the method of allocating the alignment tolerances of the parts and applied this method to get the optimal tolerances of a Confocal Scanning Microscope. In general, tight tolerances are required to maintain the performance of a system, but a high cost of manufacturing and assembling is required to preserve the tight tolerances. The purpose of allocating the optimal tolerances is minimizing the cost while keeping the high performance of the system. In the optimal problem, we maximized the tolerances while maintaining the performance requirements. The Monte Carlo Method, a statistical simulation method, is used in tolerance analysis. Alignment tolerances of optical components of the confocal scanning microscope are optimized to minimize the cost and to maintain the observation performance of the microscope. We can also apply this method to the other precision machine system.

• 한국가시화정보학회지
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• 제1권1호
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• pp.28-33
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• 2003

This paper presents the visualization method in which 3-dimensional(3D) microchannel flow can be detected using a confocal scanning microscope. By soft-lithography, we fabricated various Bio-MEMS(Micro Electro-Mechanical System) devices such as a disposable microchip for a flow cytometer and a micro-mixer, which have 3D structures. Injecting aqueous fluorescent solution in the microfluidic devices, we measured the flow in a steady state by the confocal scanning microscope. At first, we explain the principle of the confocal scanning microscope. And then we show the results from 3D visualization of microscopic flow structures using the confocal scanning microscope.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.576-580
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• 2005

New real-time confocal microscopy using spectral encoding technique and slit confocal aperture is proposed and designed. Spectral encoding technique, which encodes one-dimensional spatial information of a specimen in wavelength, and slit aperture make it possible to obtain two-dimensional lateral image of the specimen simultaneously at standard video rates without expensive scanning units such as polygon mirrors and galvano mirrors. The working principle and the configuration of the system are explained. The variation in axial responses for the simplified model of the system with normalized slit width is numerically analyzed based on the wave optics theory. Slit width that directly affects the depth discrimination of the system is determined by a compromise between axial resolution and signal intensity from the simulation result. On the assumption of the lateral sampling resolution of 50 nm, design variables and governing equations of the system are derived. The system is designed to have the mapping error less than the half pixel size, to be diffraction-limited and to have the maximum illumination efficiency. The designed system has the FOV of $12.8um{\times}9.6um$, the theoretical axial FWHM of 1.1 um and the lateral magnification of-367.8.

• 제어로봇시스템학회논문지
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• 제21권12호
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• pp.1130-1135
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• 2015

The bond pull test is the most widely used technique for the evaluation and control of wire bond quality. The wire being tested is pulled upward until the wire or bond to the die or substrate breaks. The inspector test strength of wire by manually and it takes around 3 minutes to perform the test. In this paper, we develop a 3D vision system to measure 3D position of wire. It gives 3D position data of wire to move a hook into wires. The 3D measurement method to use here is a confocal imaging system. The conventional confocal imaging system is a spot scanning method which has a high resolution and good illumination efficiency. However, a conventional confocal systems has a disadvantage to perform XY axis scanning in order to achieve 3D data in given FOV (Field of View) through spot scanning. We propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array to remove XY scan. 2D imaging system can detect 2D location of wire and it can reduce time to measure 3D position of wire. In the experimental results, the proposed system can measure 3D position of wire with reasonable accuracy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.51-54
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• 2000

The traditional surface measuring method using confocal principle requires much time to measure an object surface since it is a scanning tool. In this paper, the upgraded confocal microscope is introduced. It is also a scanning tool but it requires 2D-scanning while the traditional one requires 3D-scanning. It means the time for measuring is considerably reduced. In addition, the measuring system is configured to increase the efficiency of beam. He-Ne laser whose frequency is 632.8nm is used for the laser source. An example of measuring result through the upgraded confocal microscope is showed.