Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2000.11a
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- Pages.51-54
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- 2000
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- 2005-8446(pISSN)
Surface measurement using Confocal principle
공초점 원리를 이용한 표면 현상 측정
Abstract
The traditional surface measuring method using confocal principle requires much time to measure an object surface since it is a scanning tool. In this paper, the upgraded confocal microscope is introduced. It is also a scanning tool but it requires 2D-scanning while the traditional one requires 3D-scanning. It means the time for measuring is considerably reduced. In addition, the measuring system is configured to increase the efficiency of beam. He-Ne laser whose frequency is 632.8nm is used for the laser source. An example of measuring result through the upgraded confocal microscope is showed.
Keywords