• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

• Journal of Korean Society of Environmental Engineers
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• v.31 no.1
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• pp.1-8
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• 2009

This research was performed to assess a Fenton-like oxidation using naturally present iron in the field to treat remained oils throughout silty clay residues which finally resided even after a series of soil washing process. Biodegradability was thus tested for reaction products to investigate a possible treatment of the Fenton-like oxidation coupled with a biological treatment process. For those purposes, two types of field soil samples (e.g., dewatered cake after conditioning with a polymer and not-dewatered residue) were tested to remove TPH by adding the various concentration of hydrogen peroxide ($H_2O_2$). Moreover the biodegradability of treated samples was observed based on the ratio of $BOD_5/COD_{Cr}$ after Fenton-like oxidation. The Highest removal of TPH was at 1% of hydrogen peroxide ($H_2O_2$) when hydrogen peroxide ($H_2O_2$) was continuously injected for a period of time rather than that of spot introduction with the same amount of it. For the dewatered cake, TPH was effectively treated when the ratio of solid and water was mixed at 1 : 2. Employing cooking oil could increase solubility of TPH due to enhanced surface-active escalating TPH desorption from silty clay. Nonetheless, the biodegradability was decreased as long as the oxidation duration being extended regardless of operational conditions. It was therefore proved that Fenton-like oxidation using $H_2O_2$ and natural iron minerals was able to remove adsorbed oils in silty clay but the removal efficiency of TPH was low. And if a biological treatment process followed after Fenton-like oxidation, microorganisms would need enough time for acclimation.

• Economic and Environmental Geology
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• v.54 no.1
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• pp.77-89
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• 2021

In this study, a method has been proposed to improve the performance of hydraulic property estimation model developed by Jeong et al. (2020). In their study, low-dimensional features of the annual groundwater level (GWL) fluctuation patterns extracted based on a Denoising autoencoder (DAE) was used to develop a regression model for predicting hydraulic properties of an aquifer. However, low-dimensional features of the DAE are highly dependent on the precipitation pattern even if the GWL is monitored at the same location, causing uncertainty in hydraulic property estimation of the regression model. To solve the above problem, a process for generating the GWL fluctuation pattern for conditioning the precipitation is proposed based on a conditional variational autoencoder (CVAE). The CVAE trains a statistical relationship between GWL fluctuation and precipitation pattern. The actual GWL and precipitation data monitored on a total of 71 monitoring stations over 10 years in South Korea was applied to validate the effect of using CVAE. As a result, the trained CVAE model reasonably generated GWL fluctuation pattern with the conditioning of various precipitation patterns for all the monitoring locations. Based on the trained CVAE model, the low-dimensional features of the GWL fluctuation pattern without interference of different precipitation patterns were extracted for all monitoring stations, and they were compared to the features extracted based on the DAE. Consequently, it can be confirmed that the statistical consistency of the features extracted using CVAE is improved compared to DAE. Thus, we conclude that the proposed method may be useful in extracting a more accurate feature of GWL fluctuation pattern affected solely by hydraulic characteristics of the aquifer, which would be followed by the improved performance of the previously developed regression model.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.3
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• pp.277-284
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• 2012

In this study, a heat-transfer performance analysis is carried out for a multi-channel volumetric air receiver for a solar power tower. On the basis of a series of reviews regarding the relevant literature, a calculation process is proposed for the prediction of the wall- and air- temperature distributions of a single channel at given geometric and input conditions. Furthermore, a unique mathematical model of the receiver effectiveness is presented through analysis of the temperature profile. The receiver is made of silicon carbide. A total of 225 square straight channels per module are molded to induce the air flow, and each channel has the dimensions of $2mm(W){\times}2mm(H){\times}0.2mm(t){\times}320mm(L)$. The heat-transfer rate, temperature distribution and effectiveness are presented according to the variation of the channel and module number under uniform irradiation and mass flow rate. The available air outlet temperature applied to the solar power tower should be over $700^{\circ}C$. This numerical model was actually used in the design of a 200 kW-level commercial solar air receiver, and the required number of modules satisfying the thermal performance could be obtained for the specified geometric and input conditions.

• Korean Journal of Poultry Science
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• v.33 no.3
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• pp.239-248
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• 2006

Improvements in understanding the effects of dietary fermentable carbohydrates and their interaction with supplemental feed enzymes and the feed manufacturing process may lead to reductions in volatile organic compound (VOC) emissions from poultry manure. Starch digestibility has been improved by replacing ground wheat or barley with whole wheat or barley, but there was no consistent effect of cereal species or feed form on the pH value of the gizzard contents. Pelleting results in improvements in feed conversion from 0 to 12%. Starch digestibility has been reported to account for up to 35 % of the improvement in available metabolic energy as a result of xylase supplementation. Factors which affect starch utilization and non-starch polysaccharide (NSP) absorption include the presence of anti-nutrient facto. (ANF) in grains, the nature of grain starch, NSP and the digestive capacity of animals. Improvements in feed production technology have been made in enzyme stabilization, allowing some dry enzyme products to be pelleted after conditioning at up to $87.69^{\circ}C$ and liquid enzymes to be stored in the feed mill for up to low months prior to use. The soluble NSP, arabinokylans and beta-glucans are partially degraded into smaller fragments by enzymes. With fragmentation, the water holding capacity is decreased, which leads to a reduction in digesta moisture, wet feces, and dirty eggs from hens fed diets containing viscosity-inducing ingredients.

• The Journal of the Korea Contents Association
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• v.20 no.5
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• pp.437-447
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• 2020

The study was performed to identify the process of change, decisional balance, self-efficacy and social support corresponding to the stage of exercise behavior change and the applicability of social support of women in nursing college based on a Transtheoretical Model. The subjects consisted of 223 women in nursing college by convenience sampling and the data were analyzed by IBM SPSS 21.0 program. The subjects were distributed in each stage of change of behaviors: 17.9% in the precontemplation stage, 54.3% in the contemplation stage, 16.6% in the preparation stage, 4.5% in the action stage and 6.7% in the maintenance stage. Analysis of variance showed that consciousness raising, dramatic relief, self reevaluation, social liberation, counter conditioning, helping relationship, reinforcement management, self liberation, stimulus control, pros, cons and self-efficacy were significantly associated with the stages of exercise behaviors. But there was no significant difference in social support. The transtheoretical model would be applicable to explain the exercise behavior of women in nursing college. This study will be useful information for developing effective exercise programs considering nursing female students' stages of change in exercise behavior.

• Journal of Periodontal and Implant Science
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• v.32 no.3
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• pp.523-537
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• 2002

The present study was performed to evaluate the effect of tetracycline - HCl on the change of implant surface microstructure according to application time. Implants with pure titanium machined surface, SLA surface and $TiO_2blasted$ surface were used. Implant surface was rubbed with 5Omg/ml tetracycline - HCl solution for ${\frac}{1}{2}$ min., 1 min., $1{\frac}{1}{2}$ min., 2 min., and 3min. respectively in the test group and with no conditioning in the control group. Then, the specimens were processed for scanning electron microscopic observation. The following results were obtained. 1. In the pure titanium machined surfaces, the control specimen showed a more or less rough machined surface composed of alternating positive and negative lines corresponding to grooves and ridges. After treatment, machining line was more pronounced for the control specimens. but in general, test specimens were similar to control. 2. In the SLA surfaces, the control specimen showed that the macro roughness was achieved by large-grit sandblasting. subsequently, the acid-etching process crated the micro roughness, which thus was superimposed on the macro roughness. 3. In the SLA surfaces, irrespective of the application time of 50mg/ml tetracycline-HCl solution, in general, test specimens were similar to control. 4. In the $TiO_2blasted$ surfaces the control specimen showed the rough surface with small pits. The irregularity of the $TiO_2blasted$ surfaces with 50mg/ml tetracycline-HCl solution was lessened and the flattened areas were wider relative to the application time of tetracycline - HCl solution. In conclusion, pure titanium machined surfaces and SLA surfaces weren't changed irrespective of the application time of tetracycline-HCl solution. And the $TiO_2blasted$ surfaces conditioned with tetracycline - HCl solution began to be changed from $1{\frac}{1}{2}$ min. This results are expected to be applied to the regenerative procedures for peri-implantitis treatment.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.2 no.3
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• pp.189-199
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• 2004

A bridge transported servo manipulator (BTSM) system for the advanced spent fuel conditioning process (ACP) has been developed to overcome the limitation of access, which is a drawback of mechanical master-slave manipulators (MSM) for the equipment maintenance. The servo manipulator is composed of a slave manipulator attached to the telescoping tubesets equipped with the overhead bridge installed at a hot cell and a master manipulator installed at an out-of-hot cell. Each manipulator has 7 degrees-of-freedom (DOF): a body rotation, an upper-arm tilt, a lower-arm tilt, a lower-arm rotation, a wrist pan & tilt, and a grasp motion. A wire-driven mechanism for a lower-arm rotation, a wrist pan and tilt, and a grasp motion of the manipulator has been adopted to increase the handling capacity compared to the manipulator weight and decrease the friction. The main disadvantage of the wire-driven mechanism is that if one link is in motion, other links can be affected. In this paper, the transmission characteristics among the wire-driven links have been formulated to overcome this drawback. The unexpected behaviors are confirmed by analyses of transmission characteristics as well as experiments. Also, the experimental results show that the unexpected behaviors are greatly decreased by the proposed compensation equations.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.15 no.3
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• pp.191-197
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• 2017

The Korea Atomic Energy Research Institute (KAERI) has developed a safeguards technology for pyroprocessing based on the Safeguards-By-Design (SBD) concept. KAERI took part in a Member-State Support Program (MSSP) to establish a pyroprocessing safeguards approach. A Reference Engineering-scale Pyroprocessing Facility (REPF) concept was designed on which KAERI developed its safeguards system. Recently the REPF is being upgraded to the REPF+, a scaled-up facility. For assessment of the nuclear-material accountancy (NMA) system, KAERI has developed a simulation program named Pyroprocessing Material Flow and MUF Uncertainty Simulation (PYMUS). The PYMUS is currently being upgraded to include a Near-Real-Time Accountancy (NRTA) statistical analysis function. The Advanced Spent Fuel Conditioning Process Safeguards Neutron Counter (ASNC) has been updated as Non-Destructive Assay (NDA) equipment for input-material accountancy, and a Hybrid Induced-fission-based Pu-Accounting Instrument (HIPAI) has been developed for the NMA of uranium/transuranic (U/TRU) ingots. Currently, performance testing of Compton-suppressed Gamma-ray measurement, Laser-Induced Breakdown Spectroscopy (LIBS), and homogenization sampling are underway. These efforts will provide an essential basis for the realization of an advanced nuclear-fuel cycle in the ROK.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2018.10a
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• pp.329-331
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• 2018

In this paper, we propose a monitoring system that starts with the supply of raw materials for threading, is processed into a lathe machine, and checks for defects of the product are automatically performed by the robot with Smart Factory technology through assembly and disassembly. Completion check according to the production instruction quantity and production instruction is made by checking the production status according to whether or not the raw material is worn by the displacement sensor, and checking the pitch and the contour of the processed female and male to determine OK and NG. The robotic system acts as a relay for loading and unloading of raw materials, pallet transfer, and overall process, and it acts as an intermediary for organically driving. The location information of the threaded products is collected by using the non-contact wireless tag and the energy saving system Production efficiency and utilization rate were checked. The environmental sensor collects the air-conditioning environment data (temperature, humidity), measures the temperature and humidity accurately, and checks the quality of product processing. It monitors and monitors the driving hazard level environment (overheating, humidity) of the product. Controls for CNC and robot module PLC as a heterogeneous system.