• 제목/요약/키워드: Column scanning

검색결과 86건 처리시간 0.038초

마이크로 전자칼럼을 이용한 대면적 스캔 (Scanning large area with a micro-electron column)

  • 장원권;박성순;김호섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.182-183
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    • 2007
  • In large area scanning with a micro-electron column, the optimal operation condition for the best visibility was studied. A micro-electron column can realize nearly unlimited scanning size with distribution of micro-electron columns, therefore applicable to large sized SEM or VSEM. The maximum scanning size with a micro-electron column was about $200cm^2$ when only one deflector was employed. However, a double deflector equipped micro-electron column provided 1.7 times larger scanning area with the same visibility as that of one deflector.

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초소형 전자칼럼의 대면적 주사 적정조건 (The Optimal Condition for Scanning Large Area with a Micro-electron-column)

  • 박성순;김호섭;장원권
    • 한국전기전자재료학회논문지
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    • 제20권6호
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    • pp.481-486
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    • 2007
  • In large area scanning with a micro-electron-column, the operating condition for the best resolution was investigated in factors of working distance and field of view. The resolution of a test sample was dependent on electron beam energy and scanning field size. The best resolution with single deflector was obtained at 300 V and 30 mm in the electron emitting tip voltage and a working distance, respectively. The scanning area at that condition was $13.9{\times}13.9mm^2$, linearly increased with the working distance. Double deflector was employed for larger scanning size without increasing working distance, but showed only 1.7 times larger than that of single deflector, and the resolution was inverse proportional to the scanning size.

전자빔 가공시스템용 경통의 구축 (Establishment of Column Unit for Electron Beam Machining System)

  • 강재훈;이찬홍;최종호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.1017-1020
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    • 2004
  • It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, column unit build up with several electo-magnetic lens is necessarily required more than anything else to modify scanning electron microscope. In this study, various components included several electro-magnetic lens and main body which are essentially constructed for column unit are designed and manufactured. And this established column unit will be used for next connected study in the development step of scanning electron microscope based electron beam machining system.

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자동 감마 증류탑 검사 장치를 위한 방사선 계측장치 설계 (Design of radiation detection circuit for gamma column scanning)

  • 김종범;정성희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 B
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    • pp.612-615
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    • 2003
  • In this paper, a design of radiation detector for gamma column scanner is introduced. Distillation column is important unit in Petro-chemical industries, and its on-line diagnose is very important. To get density profile measured by the radiation transmitted through column is well method for on-line diagnose as gamma scanning. For this purpose radiation detection circuit, radiation source and mechanical system for moving source and detector are required. Conventional radiation detection circuit for this application is sensitive to electric noise because of interface between the radiation circuit and the controller for mechanical system. The radiation detection system introduced here is using loop coil instead of slip ring to remove contact noise. Radiation detection system designed here for gamma scanning consist of BGO detector, high voltage circuit, PHA circuit and FSK modem. The BGO detector is used as radiation sensor, high voltage circuit and peak height analysis circuit is essential to process the signal generated from BGO detector. Micro controller convert measured data into ASCII data. FSK modem transmit ASCII data. Transmitted ASCH data is picked up in antenna coil and processed for combined function with mechanical system. This method gives good result by isolating the controlling circuit of mechanical system from radiation detecting circuit which is sensitive to noise.

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Micro-CT 스캐닝을 통한 섬유보강 콘크리트 기둥내부 강섬유의 배향성 및 위치분포 분석 (Analysis of Orientation and Distribution of Steel Fiber in Fiber Reinforced Concrete Column by Micro-CT Scanning)

  • 박태훈;서형원;배성철
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2019년도 춘계 학술논문 발표대회
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    • pp.23-24
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    • 2019
  • In this study, analysis of steel fiber orientation and distribution inside fiber reinforced concrete was performed using micro-CT scanning technology. Samples were extracted from the column according to its height and distance from the mold. Samples were scanned in order to attain the image of steel fibers then region of interest were obtained by binarization process. By calculating the principle moment of inertia of each fiber, direction vector, scale, center postion, volume, and surface area were gained in order to analyze the orientation and distribution. Most of the fibers inside the column tended to be perpendicular to the main axis of the column. Moreover, most of the fibers appeared at the bottom of the column and at the position where it is farthest from the mold.

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주사 전자 현미경에서 영상 획득에 필요한 구성 요소 구현 (Realization for Each Element for capturing image in Scanning Electron Microscopy)

  • 임선종;이찬홍
    • 한국레이저가공학회지
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    • 제12권2호
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    • pp.26-30
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    • 2009
  • Scanning Electron Microscopy (SEM) includes high voltage generator, electron gun, column, secondary electron detector, scan coil system and image grabber. Column includes electron lenses (condenser lens and objective lens). Condenser lens generates fringe field, makes focal length and control spot size. Focal length represents property of lens. Objective lens control focus. Most of the electrons emitted from the filament, are captured by the anode. The portion of the electron current that leaves the gun through the hole in the anode is called the beam current. Electron beam probe is called the focused beam on the specimen. Because of the lens and aperture, the probe current becomes smaller than the beam current. It generate various signals(backscattered electron, secondary electron) in an interaction with the specimen atoms. In this paper, we describe the result of research to develop the core elements for low-resolution SEM.

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전자현미경 개발 (The development of scanning electron microscopy)

  • 오현주;장동영;양희남;김동환;박만진;심치형;김충수
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.15-18
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    • 2005
  • We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.

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열전자형 주사전자현미경 결상특성의 수치해석 (Numerical Analysis for the Image Evaluation of a Thermionic SEM)

  • 정현우;박만진;김동환;장동영;박근
    • 한국공작기계학회논문집
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    • 제16권6호
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    • pp.153-158
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    • 2007
  • The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.

차이값 히스토그램 기반 가역 워터마킹의 행열 교차 스캐닝을 통한 성능 향상 기법 (Performance Enhancement through Row-Column Cross Scanning in Differential Histogram-based Reversible Watermarking)

  • 여동규;이해연;김병만
    • 정보처리학회논문지B
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    • 제18B권1호
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    • pp.1-10
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    • 2011
  • 가역 워터마킹 기법은 디지털 콘텐츠에 지각적 투명성을 유지하며 워터마크를 삽입한 후, 이를 아무런 손상없이 원본 상태로 복원할 수 있는 메시지 은닉 수단으로서 높은 품질과 높은 삽입용량이 요구되는 분야에서 다양하게 이용되어질 수 있다. 본 논문에서는 차이값 히스토그램 기반의 가역 워터마킹에서 응용분야의 요구에 맞게 높은 삽입용량을 제공하기 위한 효율적인 반복삽입 알고리즘을 제안한다. 제안한 방법에서는 메시지가 삽입된 영상에 대하여 반복삽입할 때, 지역성을 최대한 활용하기 위하여 행열 교차 스캐닝 방법을 이용하였다. 다양한 영상들에 대하여 비교 분석한 실험 결과에 따르면 제안한 알고리즘은 완전한 가역성과 함께 낮은 왜곡을 유지하면서도 효율적인 반복삽입을 통한 높은 삽입용량을 얻을 수 있었다.

Construction Process & Technologies Applied to Parc.1 Project

  • Hoi-soo, Seo;Jae-min, Baek
    • 국제초고층학회논문집
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    • 제11권3호
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    • pp.181-187
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    • 2022
  • POSCO E&C has completed Parc.1 project successfully. The construction period was 42months, and 1.5 million workers were participated till completion. To meet schedule management and quality control, POSCO E&C has adopted a lot of technologies such as GPS measurement, 3D scanning, vibration control, stack effect control, column shortening control, etc