• 대한치과보철학회지
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• 제45권2호
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• pp.169-181
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• 2007

Statement of problem: Titanium is well known as a proper metal for the dental restorations, because it has an excellent biocompatibility, resistance to corrosion, and mechanical property. However, adhesion between titanium and dental porcelains is related to the diffusion of oxygen to the reaction layers formed on cast-titanium surfaces during porcelain firing and those oxidized layers make the adhesion difficult to be formed. Many studies using mechanical, chemical and physical methods to enhance the titanium-ceramic adhesion have been actively performed. Purpose: This study meant to comparatively analyse the adhesion characteristics depending on different titanium surface coatings after coating the casts and wrought titanium surfaces with Au and TiN. Material and method: In this study, the titanium specimens (CP-Ti, Grade 2, Kobe still Co. Japan) were categorized into cast and wrought titanium. The wrought titanium was cast by using the MgO-based investment(Selevest CB, Selec). The cast and wrought titanium were treated with Au coating($ParaOne^{(R)}$., Gold Ion Sputter, Model PS-1200) and TiN coating(ATEC system, Korea) and the ultra low fusing dental porcelain was fused and fired onto the samples. Biaxial flection test was done on the fired samples and the porcelain was separated. The adhesion characteristics of porcelain and titanium after firing and the specimen surfaces before and after the porcelain fracture test were observed with SEM. The atomic percent of Si on all sample surfaces was comparatively analysed by EDS. In addition, the constituents of specimen surface layers after the porcelain fracture and the formed compound were evaluated by X-ray diffraction diagnosis. Result: The results of this study were obtained as follows : 1. The surface characteristics of cast and wrought titanium after surface treatment(Au, TiN, $Al_2O_3$ sandblasting) were similar and each cast and wrought titanium showed similar bonding characteristics. 2. Before and after the biaxial flection test, the highest atomic weight change of Si component was found in $Al_2O_3$ sandblasted wrought titanium(28.6at.% $\rightarrow$ 8.3at.%). On the other hand, the least change was seen in Au-Pd-In alloy(24.5at.% $\rightarrow$ 9.1at.%). 3. Much amount of Si components was uniformly distributed in Au and TiN coated titanium, but less amount of Si's was unevenly dispersed on Al2O3 sandblasting surfaces. 4. In X-ray diffraction diagnosis after porcelain debonding, we could see $Au_2Ti$ compound and TiN coating layers on Au and TiN coated surfaces and $TiO_2$, typical oxide of titanium, on all titanium surfaces. 5. Debonding of porcelain on cast and wrought titanium surface after the biaxial flection is considered as a result of adhesion deterioration between coating layers and titanium surfaces. We found that there are both adhesive failure and cohesive failure at the same time. Conclusion: These results showed that the titanium-ceramic adhesion could be improved by coating cast and wrought titanium surfaces with Au and TiN when making porcelain fused to metal crowns. In order to use porcelain fused to titanium clinically, it is considered that coating technique to enhance the bonding strength between coating kKlayers and titanium surfaces should be developed first.

• 한국유가공학회:학술대회논문집
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• 한국유가공기술과학회 2002년도 제54회 춘계심포지움 - 우유와 국민건강
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• pp.59-60
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• 2002

Edible films such as wax coatings, sugar and chocolate covers, and sausage casings, have been used in food applications for years$^{(1)}$ However, interest in edible films and biodegradable polymers has been renewed due to concerns about the environment, a need to reduce the quantity of disposable packaging, and demand by the consumer for higher quality food products. Edible films can function as secondary packaging materials to enhance food quality and reduce the amount of traditional packaging needed. For example, edible films can serve to enhance food quality by acting as moisture and gas barriers, thus, providing protection to a food product after the primary packaging is opened. Edible films are not meant to replace synthetic packaging materials; instead, they provide the potential as food packagings where traditional synthetic or biodegradable plastics cannot function. For instance, edible films can be used as convenient soluble pouches containing single-servings for products such as instant noodles and soup/seasoning combination. In the food industry, they can be used as ingredient delivery systems for delivering pre-measured ingredients during processing. Edible films also can provide the food processors with a variety of new opportunities for product development and processing. Depends on materials of edible films, they also can be sources of nutritional supplements. Especially, whey proteins have excellent amino acid balance while some edible films resources lack adequate amount of certain amino acids, for example, soy protein is low in methionine and wheat flour is low in lysine$^{(2)}$. Whey proteins have a surplus of the essential amino acid lysine, threonine, methionine and isoleucine. Thus, the idea of using whey protein-based films to individually pack cereal products, which often deficient in these amino acids, become very attractive$^{(3)}$. Whey is a by-product of cheese manufacturing and much of annual production is not utilized$^{(4)}$. Development of edible films from whey protein is one of the ways to recover whey from dairy industry waste. Whey proteins as raw materials of film production can be obtained at inexpensive cost. I hypothesize that it is possible to make whey protein-based edible films with improved moisture barrier properties without significantly altering other properties by producing whey protein/lipid emulsion films and these films will be suitable far food applications. The fellowing are the specific otjectives of this research: 1. Develop whey protein/lipid emulsion edible films and determine their microstructures, barrier (moisture and oxygen) and mechanical (tensile strength and elongation) properties. 2. Study the nature of interactions involved in the formation and stability of the films. 3. Investigate thermal properties, heat sealability, and sealing properties of the films. 4. Demonstrate suitability of their application in foods as packaging materials. Methodologies were developed to produce edible films from whey protein isolate (WPI) and concentrate (WPC), and film-forming procedure was optimized. Lipids, butter fat (BF) and candelilla wax (CW), were added into film-forming solutions to produce whey protein/lipid emulsion edible films. Significant reduction in water vapor and oxygen permeabilities of the films could be achieved upon addition of BF and CW. Mechanical properties were also influenced by the lipid type. Microstructures of the films accounted for the differences in their barrier and mechanical properties. Studies with bond-dissociating agents indicated that disulfide and hydrogen bonds, cooperatively, were the primary forces involved in the formation and stability of whey protein/lipid emulsion films. Contribution of hydrophobic interactions was secondary. Thermal properties of the films were studied using differential scanning calorimetry, and the results were used to optimize heat-sealing conditions for the films. Electron spectroscopy for chemical analysis (ESCA) was used to study the nature of the interfacial interaction of sealed films. All films were heat sealable and showed good seal strengths while the plasticizer type influenced optimum heat-sealing temperatures of the films, 130$^{\circ}$C for sorbitol-plasticized WPI films and 110$^{\circ}$C for glycerol-plasticized WPI films. ESCA spectra showed that the main interactions responsible for the heat-sealed joint of whey protein-based edible films were hydrogen bonds and covalent bonds involving C-0-H and N-C components. Finally, solubility in water, moisture contents, moisture sorption isotherms and sensory attributes (using a trained sensory panel) of the films were determined. Solubility was influenced primarily by the plasticizer in the films, and the higher the plasticizer content, the greater was the solubility of the films in water. Moisture contents of the films showed a strong relationship with moisture sorption isotherm properties of the films. Lower moisture content of the films resulted in lower equilibrium moisture contents at all aw levels. Sensory evaluation of the films revealed that no distinctive odor existed in WPI films. All films tested showed slight sweetness and adhesiveness. Films with lipids were scored as being opaque while films without lipids were scored to be clear. Whey protein/lipid emulsion edible films may be suitable for packaging of powder mix and should be suitable for packaging of non-hygroscopic foods$^{(5,6,7,8,)}$.

• Journal of the Korean Wood Science and Technology
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• 제38권4호
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• pp.333-340
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• 2010

한반도 남부 일대에서 자생하는 황칠나무(Dendropanax morbifera Lev.) 수액으로부터 추출한 천연 도료인 황칠도료(Korean Dendropanax lacquer)는 예로부터 귀중한 예술품이나 투구, 화살, 활 등의 전쟁도구를 찬란한 황금색으로 도장하는데 사용되어 왔다. 경화 후 황금색의 투명한 도막을 형성하여 우수한 색상특성을 지니고 있을 뿐만 아니라 내후성, 내수성, 내식성 등이 우수하여, 보호도장으로써도 훌륭한 가치를 지니고 있다. 그러나 이러한 많은 장점에도 불구하고, 현대적인 여러 적용분야에 사용되지 못하고 있는 이유는 황칠도료의 생산량이 적고, 이로 인하여 가격이 매우 고가이고, 장시간의 경화시간이 소요되는 문제도 큰 원인으로 작용하고 있다. 한편 황칠 내에 광중합이 가능한 conjugated diene을 포함한 모노머가 있으며, 이러한 모노머는 일광 조사 조건등에 의하여 짧은 시간에 단단하고 황금색을 띠는 도막을 형성할 수 있음이 보고된 바가 있다. 따라서 본 연구에 서는 전통적인 황칠도료의 경화방법을 개선하고 경화속도를 촉진하기 위하여, 열개시제를 도입하여 열경화를 촉진하는 방법과 열개시제 및 광개시제를 동시에 도입하고 이중경화(dual curing)에 의해서 경화속도를 촉진하고자 하였다. 이러한 경화 속도 및 경화 거동은 적외선분광분석기(FT-IR)을 이용하여 -C=C- 이중결합 특성피크의 변화를 관찰하거나, 진자경도계(pendulum hardness tester)를 이용하여 표면 경도의 변화를 관찰함으로써 평가하였다. 또한 강체진자물성측정기(RPT)에 spot UV curing 장비를 도입하여 이중경화에 의한 경화 속도 진을 평가하였다. 본 연구의 결과 열개시제에 의하여 열경화가 촉진될 수 있을 뿐만 아니라, 이중경화에 의하여 경화속도를 향상시킬 수 있음을 확인하였다. 또한 이러한 황칠도료 경화 속도 촉진 방법을 활용하여 전통적인 역에만 사용되어온 황칠도료를 현대적인 여러 적용분야에도 확대하여 사용할 수 있는 가능성을 제시하였다.

• 공학논문집
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• 제3권1호
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• pp.189-197
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• 1998

생체적합성이 뛰어난 Hydroxyapatite(HAp)를 Wet Chemical Process로 만든 후 Ion Beam Assisted Deposition (IBAD)를 이용하여 Ti-6Al-4V의 표면에 coating 시켰다. 그런후 5ppm, 10ppm, 20ppm, 100ppm의 $AgNO_3$용액으로 HAp의 Ca이온과 Ag이온을 치환시켰다. 본 논문에서는 Ag-HAp로 coating된 Ti-6Al-4V를 만들어 항균효과와 생체적합성을 연구하였다. 먼저 생체 대체재료 이식수술시 감염이 큰 2가지 종류의 bacteria (P. Aeruginosa, S. Epidermidis)로 항균 test를 하였고, 그 결과 20ppm의 $AgNO_3$로 처리한 Ti-6Al-4V에서 우수한 항균성이 관찰되었다. 또한 생체적합성 연구을 위해 osteoblast와 macrophages로 생체적합성 실험을 하여 SEM으로 관찰한 결과, 5ppm과 10ppm의 $AgNO_3$로 처리한 Ti-6Al-4V 에서 좋은 생체적합성을 보였다. HAp의 Ca 이온에 치환된 Ag 이온의 항균원리를 관찰하기 위하여, 가장 일반적인 bacteria인 E. coli를 Ag-HAp로 처리한 후 transmission electron microscope (TEM)으로 관찰하였다. Ag-HAp로 처리한 E. coli에서 cell wall과 cytoplasm이 파괴된 것이 관찰되었고, cytoplasm에서는 검은점이 발견되었다. 이 검은점을 Energy dispersive analysis X-ray (EDAX)로 분석한 결과 미량의 Ag이온이 검출되었다. 이로써 Ag 이온이 효과적으로 Bacteria를 파괴하여 항균효과를 나타내는 것을 알 수 있었다.

• 한국광물학회지
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• 제25권4호
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• pp.185-195
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• 2012

나노 크기 매킨나와이트(FeS)는 높은 환원력, 흡착성, 그리고 비표면적을 지니고 있어, 염소유기물의 분해와 중금속 및 비금속의 제거에 유용하다. 하지만 매킨나와이트 나노입자는 콜로이드 안정성(colloid stability)의 변화로 지하수 흐름에 따라 쉽게 확산되거나, 입자집적(particle aggregation)에 의해 대수층의 공극을 막을 수 있다. 따라서 투과반응벽(permeable reactive barrier)에 적용하기 위해서 적절한 공학적 변형이 필요하다. 본 연구에서는 코팅법을 적용해 나노크기 매킨나와이트를 변형시킴으로써 본래의 반응성을 유지하고 또한 경제적인 투과반응벽의 설치에 활용하고자 한다. 이를 위해 화학적 처리를 하지 않은 규사(non-treated silica sand, NTS)와 화학적 처리에 의해 불순물이 제거된 규사(chemically treated silica sand, CTS)를 사용해 매킨나와이트를 코팅시켰다. 두 규사 모두 약 pH 5.4에서 매킨나와이트가 최대로 코팅되었으며, 이 pH는 (1) 매킨나와이트의 용해도, (2) 규사 및 매킨나와이트의 표면전하(surface charge)에 의해 영향받았다. 최적 pH에서 NTS와 CTS에 의한 코팅량은 각각 0.101 mmol FeS/g, 0.043 mmol FeS/g으로, NTS 표면에 존재하는 산화철 등의 불순물에 의해 매킨나와이트의 코팅이 현저히 증가했다. 한편 혐기성 조건에서 코팅되지 않은 규사 2종과 최적 pH에서 코팅된 규사 2종을 이용해 아비산염(arsenite)의 흡착실험을 실시했다. pH 7에서 코팅되지 않은 NTS와 코팅된 NTS에 의한 아비산염의 상대적 제거율은 아비산염의 초기 농도에 따라 달라졌다. 낮은 농도에서 코팅되지 않은 NTS가 높은 아비산염의 제거율을 보였으나, 높은 농도에서는 코팅된 NTS가 상대적으로 높은 제거율을 보였다. 이런 차이는 아비산염은 낮은 농도에서 규사 표면에 존재하는 산화물과의 표면배위결합(surface complexation)에 의해 제거되었고, 높은 농도에서 코팅된 매킨나와이트와 반응해 황화비소(arsenic sulfides)로 침전되었기 때문이다. pH 7에서 코팅된 NTS에 비교해 코팅된 CTS는 현저히 낮은 아비산염 제거율을 보였는데, 이는 CTS의 상대적으로 낮은 매킨나와이트 코팅량에 기인했다. 따라서 코팅된 NTS는 코팅된 CTS보다 아비산염의 제거를 위한 투과반응벽의 설치에 더 적합한 물질이며, 특히 아비산염의 오염도가 심한 지하수의 복원에 유용하게 적용될 수 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.100-101
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• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• 한국작물학회지
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• 제65권1호
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• pp.30-39
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• 2020

벼 직파재배나 육묘에서 종자소독, 병충해방제, 시비 등에 요구되는 생산비절감기술로 개발된 기존 규산코팅볍씨(규산/Zeolite)의 단점 보완으로 신규 규산코팅기술이 개발되었다. 신규 규산코팅볍씨의 제조 및 이용특성과 육묘상자에서 건묘육성 및 벼 키다리병 경감효과를 명확하게 하기 위하여 벼 키다리병 이병성 감염종자를 소독 없이 마른 상태로 코팅한 볍씨와 중도저항성 소독된 보급종자를 마른 상태로 코팅한 볍씨를 토경조건과 수경조건에서 시험이 수행되었다. 1. 신규 규산코팅볍씨는 종자 100 g에 코팅 바인더 점액성 수용성규산 18 ml을 충분히 묻히고 거기에 Dolomite 80 g/철 5 g의 혼합분말을 고루 뿌려서 코팅되었다. 2. 신규 규산코팅볍씨의 특성은 종자무게의 1.84배이었고 중량, 코팅강도와 코팅색택 등이 기존 규산코팅볍씨보다 훨씬 개선되었다. 3. 신규 규산코팅볍씨의 묘는 무코팅볍씨에서 자란 묘의 연한 엽색과 늘어지는 초형에 비하여 짙은 엽색(SPAD치)으로 직립되었고 엽신의 규질화가 현저히 높았으며 묘소질(w/cm)은 유의하게 증가되었다. 특히 생육량과 엽색도는 토경조건에서 보다 영양이 결제된 수경조건에서 뚜렷하였다. 4. 47일간 육묘 중 벼 키다리병 발생은 파종 후 38일에 peak를 보였고 무코팅볍씨 발병률 54.2%에 비하여 신규 규산코팅에서는 68.8~70.7%의 방제가를 나타내었다. 이상을 종합하여 보면 벼농사에서 가장 많이 요구되는 규산질 비료를 Dolomite와 철분으로 종피에 코팅시켜서 만든 신규 규산코팅볍씨로 종자소독, 건묘육성 및 벼 키다리병 경감 효과 등은 친환경 저비용과 안전 쌀 생산에 크게 기여되리라 본다. 또한 장기 영양결제에도 육묘 중 뿌리 활력이나 엽의 노화 없이 정상생육이 지속되어 육묘시비량 절감 가능성도 보였고 금후 묘의 노화경감을 위한 최소 영양공급 연구가 요구되었다.

• 한국식품위생안전성학회지
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• 제32권4호
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• pp.329-335
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• 2017

식품용 금속 캔의 내면 코팅에 사용되는 에폭시 수지로 부터 용출되어 식품으로 이행될 수 있는 BPA, phenol, p-tert-butylphenol과 BADGE, BFDGE 및 그 가수분해산물과 염화물 등 총 9종의 비스페놀 관련물질들을 HPLC/FLD를 사용하여 동시 분석하는 방법을 확립하여 검량선 및 회수율을 검토하고 식품유사용매로의 이행량을 조사하였다. 23종류의 식품용 금속 캔 총 161건을 대상으로 $60^{\circ}C$에서 30분간 용출한 결과 물, 4% 초산, 50% 에탄올 및 n-heptane에서 전부 불검출이었다. $95^{\circ}C$에서 30분간 용출한 결과는 식품유사용매로 4% 초산과 50% 에탄올을 사용한 경우 BPA는 불검출~$10.77{\mu}g/L$, phenol은 불검출~$2.35{\mu}g/L$ 검출되어 정량한계 수준이었으며, 국내 용출규격인 $600{\mu}g/L$에 비해 매우 낮은 수준임을 확인하였다. 또한 금속 캔은 저장성이 우수하여 식품을 장기간 보관하는 특징이 있어 보관기간(0~90일) 및 온도조건(4, 25, $60^{\circ}C$)에 따른 BPA 등 9개의 BPA 관련물질들의 이행량의 변화를 측정하였다. 온도조건이 $4^{\circ}C$ 및 $25^{\circ}C$인 경우 90일 동안 모든 식품유사용매에서 BPA를 비롯하여 9종의 BPA 관련물질들은 검출되지 않았다. 식품유사용매로 물과 4% 초산을 사용하여 $60^{\circ}C$의 온도에서 90일간 저장한 경우 BPA와 $BADGE{\cdot}2H_2O$는 시간이 지남에 따라 약하게 증가하는 경향을 보였으나, 이행량이 70일 이후부터 급격한 증가 없이 대체로 유지되는 수준이었고, 검출값 또한 정량한계 수준으로 매우 낮게 나타났다. 따라서 식품용 금속 캔으로부터 BPA를 비롯한 관련 물질들의 이행량은 안전한 수준으로 관리되고 있음을 알 수 있었다.

• Nuclear Engineering and Technology
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• 제39권5호
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• pp.603-616
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• 2007

Roy Huddle, having invented the coated particle in Harwell 1957, stated in the early 1970s that we know now everything about particles and coatings and should be going over to deal with other problems. This was on the occasion of the Dragon fuel performance information meeting London 1973: How wrong a genius be! It took until 1978 that really good particles were made in Germany, then during the Japanese HTTR production in the 1990s and finally the Chinese 2000-2001 campaign for HTR-10. Here, we present a review of history and present status. Today, good fuel is measured by different standards from the seventies: where $9*10^{-4}$ initial free heavy metal fraction was typical for early AVR carbide fuel and $3*10^{-4}$ initial free heavy metal fraction was acceptable for oxide fuel in THTR, we insist on values more than an order of magnitude below this value today. Half a percent of particle failure at the end-of-irradiation, another ancient standard, is not even acceptable today, even for the most severe accidents. While legislation and licensing has not changed, one of the reasons we insist on these improvements is the preference for passive systems rather than active controls of earlier times. After renewed HTGR interest, we are reporting about the start of new or reactivated coated particle work in several parts of the world, considering the aspects of designs/ traditional and new materials, manufacturing technologies/ quality control quality assurance, irradiation and accident performance, modeling and performance predictions, and fuel cycle aspects and spent fuel treatment. In very general terms, the coated particle should be strong, reliable, retentive, and affordable. These properties have to be quantified and will be eventually optimized for a specific application system. Results obtained so far indicate that the same particle can be used for steam cycle applications with $700-750^{\circ}C$ helium coolant gas exit, for gas turbine applications at $850-900^{\circ}C$ and for process heat/hydrogen generation applications with $950^{\circ}C$ outlet temperatures. There is a clear set of standards for modem high quality fuel in terms of low levels of heavy metal contamination, manufacture-induced particle defects during fuel body and fuel element making, irradiation/accident induced particle failures and limits on fission product release from intact particles. While gas-cooled reactor design is still open-ended with blocks for the prismatic and spherical fuel elements for the pebble-bed design, there is near worldwide agreement on high quality fuel: a $500{\mu}m$ diameter $UO_2$ kernel of 10% enrichment is surrounded by a $100{\mu}m$ thick sacrificial buffer layer to be followed by a dense inner pyrocarbon layer, a high quality silicon carbide layer of $35{\mu}m$ thickness and theoretical density and another outer pyrocarbon layer. Good performance has been demonstrated both under operational and under accident conditions, i.e. to 10% FIMA and maximum $1600^{\circ}C$ afterwards. And it is the wide-ranging demonstration experience that makes this particle superior. Recommendations are made for further work: 1. Generation of data for presently manufactured materials, e.g. SiC strength and strength distribution, PyC creep and shrinkage and many more material data sets. 2. Renewed start of irradiation and accident testing of modem coated particle fuel. 3. Analysis of existing and newly created data with a view to demonstrate satisfactory performance at burnups beyond 10% FIMA and complete fission product retention even in accidents that go beyond $1600^{\circ}C$ for a short period of time. This work should proceed at both national and international level.

• 마이크로전자및패키징학회지
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• 제19권1호
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• pp.61-66
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• 2012

반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 화학적-기계적 연마(CMP: Chemical-Mechanical Planarization) 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 화학적-기계적 연마 공정의 중요성은 더욱 강조되고 있다. 화학적-기계적 연마공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 화학적-기계적 연마 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리(Slurry), 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. 패드 컨디셔닝이란 컨디셔너가 화학적-기계적 연마 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 화학적-기계적 연마 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 스크래치(Scratch) 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 유기박막을 표면에 증착하여 부식을 방지하고자 하였다. 컨디셔너 제작에 사용되는 금속인 니켈과 니켈 합금을 기판으로 하고, 증착된 유기박막으로는 자기조립단분자막(SAM: Self-Assembled Monolayer)과 불화탄소(FC: FluoroCarbon) 박막을 증착하였다. 자기조립단분자막은 2가지 전구체(Perfluoroctyltrichloro silane(FOTS), Dodecanethiol(DT))를 사용하여 기상 자기조립 단분자막 증착(Vapor SAM) 방법으로 증착하였고, 불화탄소막은 10 nm, 50 nm, 100 nm 두께로 PE-CVD(Plasma Enhanced-Chemical Vapor Deposition, SRN-504, Sorona, Korea) 방법으로 증착하여 표면의 부식특성을 평가하였다. 표면 부식 특성은 동전위분극법(Potentiodynamic Polarization)과 전기화학적 임피던스 측정법(Electrochemical Impedance Spectroscopy(EIS)) 등의 전기화학 분석법을 사용하여 평가되었다. 또한 측정된 임피던스 데이터를 전기적 등가회로(Electrical Equivalent Circuit) 모델에 적용하여 부식 방지 효율을 계산하였다. 동전위분극법과 EIS의 결과 분석으로부터 유기박막이 증착된 표면의 부식전류밀도가 감소하고, 임피던스가 증가하는 것을 확인하였다.