• Title/Summary/Keyword: Coating Thickness

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PR Coating for Electron Beam Lithography of Cylindrical Mold and Measuring Coating Thickness of It using Measuring Tip (원통금형의 전자빔 가공을 위한 PR 코팅 및 측정 팁을 이용한 두께측정)

  • Lee, Seung-Woo;Kim, Jeong-O;Suh, Jeong
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.10
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    • pp.1144-1148
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    • 2012
  • Process conditions for generating nano patterns handle different process according to the pattern characteristics, and different process data according to patterns in questions. To efficiently find optimal process conditions for generating nano patterns, process data by experiment is needed consideration of the pattern characteristics concerning the equipment. In particular, coating methods of a cylindrical mold differ from it of a flat plate because of viscosity of coating materials. Also the coating thickness affects nano process and pattern line width. So coating method of coating thickness for cylindrical mold is very important on nano pattern generating. In this study, a method is proposed for coating Photo Resist through the spray in order to coat cylindrical mold and measuring the thickness of coating using measuring tip considering the size of cylindrical mold because there is no method in the existing SEM. The proposed method is applied to a real printed electronics system to verify its accuracy and efficiency.

Corrosion Behavior of TiN Ion Plated Steel Plate(I)-Effects of Ti interlayer and TiN coating thickness (TiN 이온 플레이팅한 강판의 내식성에 관한 연구(I)-Ti 하지 코팅 및 TiN 코팅 두께의 영향)

  • Yeon, Yun Mo;Han, Jeon Geon;Kim, Dae Jin;Bae, Eun Hyeon
    • Journal of the Korean institute of surface engineering
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    • v.24 no.1
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    • pp.34-34
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    • 1991
  • Corrosion behavior of TiN coated steel was studied in terms of thickness of interlayer Ti and TiN coating TiN was are ion plated to a thickness of 1$\mu\textrm{m}$ and 2$\mu\textrm{m}$ respectively with interlayer coating of Ti of 1$\mu\textrm{m}$, 2$\mu\textrm{m}$ and 3$\mu\textrm{m}$. Corrosion resistance of TiN coated steel was evaluated by anodic palarization test in 1N H2SO4 as well as salt spray test. Porosity of each coating was also tested by using SO2 test method. Corrosion current density decreased with increasing TiN coating thickness and Ti interlayer coating markedly enhanced the corrosion resistance. Ti interlayer coating of 2$\mu\textrm{m}$ and 3$\mu\textrm{m}$ prior to 2$\mu\textrm{m}$ TiN coating decreased the corrosion current density of active range by an order of 4 and that of passive range by an order of 2. This improvement was associated with the retardation of corrosive agent penetration with increasing coating thickness and inherent corrosion resistance of Ti interlayer. Ti interlayer coating was also very effective in improvement of corrosion resistance under salt atmosphere.

Corrosion Behavior of TiN Ion Plated Steel Plate(I) -Effects of Ti interlayer and TiN coating thickness- (TiN 이온 플레이팅한 강판의 내식성에 관한 연구(I) - Ti 하지 코팅 및 TiN 코팅 두께의 영향 -)

  • 연윤모;한전건;김대진;배은현
    • Journal of the Korean institute of surface engineering
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    • v.25 no.1
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    • pp.34-39
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    • 1992
  • Corrosion behavior of TiN coated steel was studied in terms of thickness of interlayer Ti and TiN coating. TiN was arc ion plated to a thickness of 1$\mu\textrm{m}$ and 2$\mu\textrm{m}$ respectively with interlayer coating of Ti of 1$\mu\textrm{m}$, $2\mu\textrm{m}$ and $3\mu\textrm{m}$. Corrosion resistance of TiN coated steel was evaluated by anodic palarization test in 1N $H_2$SO$_4$ as well as salt spray test. Porosity of each coating was also tested by using $SO_2$ test method. Corrosion current density decreased with increasing TiN coating thickness and Ti interlayer coating markedly enhanced the corrosion resistance. Ti interlayer coating of $2\mu\textrm{m}$ and $3\mu\textrm{m}$ prior to $2\mu\textrm{m}$ TiN coating decreased the corrosion current density of active range by an order of 4 and that of passive range by an order of 2. This improvement was associated with the retardation of corrosive agent penetration with increasing coating thickness and inherent corrosion resistance of Ti interlayer. Ti interlayer coating was also very effective in improvement of corrosion resistance under salt atmosphere.

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Mechanical Property Evaluation of Diamond-like Carbon Coated by PE-CVD (PE-CVD방법을 이용한 DLC 박막의 기계적특성 평가)

  • Kang Seog Ju;Yi Jin-Woo;Kim Seock Sam
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2003.11a
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    • pp.368-376
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    • 2003
  • In this research, DLC thin films are produced as several hundred nm thickness by PE-CVD method. And then these thin films are estimated tribological characteristics to find out useful possibilities as a protecting film for high-quality function and life extension at MEMs by mechanical properties observation . These are measured thickness and residual stress of DLC coating. Compared after measuring friction coefficient, adhesion force, hardness, cohesive force of coating films. As results all test, we can decide several conclusions. First, friction coefficient decreased, as the load increased. otherwise, friction coefficient increased, as thickness of coating film increased under low load$(1\~50mN)$. Secod, adhesion force increased as thickness of coating films. Third, hardness of coating film is affected by substrate coating film when it is less than thickness of 300nm and it has general hardness of DLC coating film when it is more than thickness of 500nm. Fourth, cohesive force of coating film is complexly affected by hardness, adhesion force, residual stress, etc.

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On the AR Coating Method of Al-MIS(p-Si) Solar Cel (Al-MIS(p-Si) 태양전지의 AR Coating 방법)

  • 엄경숙;백수현
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.21 no.6
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    • pp.64-69
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    • 1984
  • We found that the maximum efficiency of Al-MIS (p-Si) solar ceil was shown at 80$\AA$ thickness of Al-film which was deposited with slower velocity than 0.6$\AA$/sec. It was coated with ZnS and SiO for Anti-Reflecting. In single coating, ZnS and SiO film had maximum Isc at 570 and 690 A thickness, respectively. We confirmed that these results agreed well with the quarter coating condition; n1d1=λ/4. In double coating, we held the one layer with its optimum thickness in single coating and controlled the other layer. The maximum value of Isc in this case was almost the same with it in single coating but was maintained its value in so wide range of thickness. Keeping the relation; n1d1=n2d2 as another way, we made the total thickness of film thinner to 70-90% of the sum of each optimum thickness in single coating. In this case Isc was higher value than 20% of it in any other previous case and was retained so wide range of thickness.

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Effect on Tooling Characteristics to DLC-coated Thickness of Tool for Graphite Material (흑연소재가공용 공구의 DLC 코팅두께가 가공특성에 미치는 영향)

  • Yoon, Jae-Ho;Kim, Hyeong-Gyun;Choi, Seong-Dae
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.14 no.5
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    • pp.22-27
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    • 2015
  • Processing of low toughness graphite material requires high-speed machine tools and DLC coating. In this study, results of investigation of the tool wear and machining properties of the DLC coating according to the thickness, and the machining time of the tool used for the machining of graphite electrodes, were as follows. 1. DLC coating thickness shows a larger wear amount of the tool center in accordance with thickness; the wear amount of the tool increases in proportion to the machining time. 2. The difference between the amount of wear depending on the processing time shows edge portions larger than the tool wear amount in the center. This amount of wear of the tool edge is formed since the rotating torque is in contact with the graphite material surface significantly more than the central portion. 3. The thicker the DLC coating, the more the coating tool eliminated of the coating area by the interface between the cemented carbide tool being coated with an increased friction of the graphite material and the DLC coating area.

Effects of Thickness and Defects of DLC Coating Layer on Corrosion Resistance of Metallic Bipolar Plates of PEMFCs (PEMFC 금속분리판의 내식성에 미치는 DLC 코팅층의 두께 및 결함의 영향)

  • Dong-Ho Shin;Seong-Jong Kim
    • Corrosion Science and Technology
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    • v.23 no.3
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    • pp.235-245
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    • 2024
  • DLC coatings have been widely applied in industrial fields that require high corrosion resistance due to their excellent mechanical characteristics and chemical stability. In this research, effects of DLC coating thickness and defects on corrosion resistance were investigated for application of metallic bipolar plates in polymer membrane electrolyte fuel cells (PEMFCs). Results revealed that a DLC coating thickness of 0.7 ㎛ could lead to a defect size reduction of about 75.9% compared to that of 0.3 ㎛.As a result of potentiodynamic polarization experiments, the current density under a potential of 0.6 V was measured to be less than 1 ㎂/cm2,which was an excellent value. Inparticular, the delamination ratio and the decrease rate of maximum pitting depth were up to 84.8% and 63.3%, respectively, with an increase in the DLC coating thickness. These results demonstrate that DLC coating thickness and defects are factors that can affect corrosion resistance of DLC coating and its substrate.

A Study on the Coating Thickness Prediction of a Piston Skirt (피스톤 스커트의 코팅두께 예측에 관한 연구)

  • Chun, Sang-Myung
    • Transactions of the Korean Society of Automotive Engineers
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    • v.19 no.2
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    • pp.84-91
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    • 2011
  • The purpose of this study is to find how to be formed the wet film thickness during the low friction coating process for a piston skirt with application to the theory of screen printing. In other words, the general expressions predicting the pressure under a blade and the volume of coating fluid passing through the blade edge are derived. Using these expressions, the coating thickness on a piston skirt during a sample blade coating process can be quantitatively assessed.

Corrosion Behavior of TiN Ion Plated Steel Plate(III)-Effects of Ni and Ti interlayer thickness- (TiN 이온 플레이팅한 강판의 내식성에 관한 연구(III)-Ni 및 Ti 하지코팅두께의 영향-)

  • 한전건;연윤모
    • Journal of the Korean institute of surface engineering
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    • v.26 no.2
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    • pp.55-62
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    • 1993
  • The effect of interlayer coating thickness of Ni and Ti on corrosion behavior was studied for TiN ion plat-ed steel plate. Interlayer coating was carried out in a single and bi-layer to a various thickness combination prior to final TiN coating. Corrosion behavior was evaluated by anodic polarization test in 1N H2SO4 as well as salt spray test. Ni interlayer coating was effectived in reducing corrosion current density of active region and Ti interlayer coating over Ni coating reduced the anodic corrosion current density by an order of 4 with increasing the thickness of Ti up to$ 3\mu\textrm{m}$. The improvement of corrosion resistance by Ni/Ti interlayer coating was attributed to the effective prevention of penetration of active corrosion agent resulting from the inherent corrosion resistance of Ni and Ti. Putting corrosion behavior was observed from salt spray test result for all specimens and corrosion resistance at salt atmosphere was enhanced with increasing Ni and Ti thickness, Cor-lay TiN coating was spalled out by the generation of corrosion products.

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Coating and Etching Technologies for Indirect Laser processing of Printing Roll (인쇄 롤의 간접식 레이저 가공을 위한 코팅과 에칭 기술)

  • Lee, Seung-Woo;Kim, Jeong-O;Kang, HeeShin
    • Laser Solutions
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    • v.16 no.4
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    • pp.12-16
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    • 2013
  • For mass production of electronic devices, the processing of the printing roll is one of the most important key technologies for printed electronics technology. A roll of printing process, the gravure printing that is used to print the electronic device is most often used. The indirect laser processing has been used in order to produce printing roll for gravure printing. It consists of the following processing that is coating of photo polymer or black lacquer on the surface of printing roll, pattering using a laser beam and etching process. In this study, we have carried out study on the coating and etching for $25{\mu}m$ line width on the printing roll. To do this goals, a $4{\mu}m$ coating thickness and 20% average coating thickness of the coating homogeneity of variance is performed. The factors to determine the thickness and homogeneity are a viscosity of coating solution, the liquid injection, the number of injection, feed rate, rotational speed, and the like. After the laser patterning, a line width of $25{\mu}m$ or less was confirmed to be processed through etching and the chromium plating process.

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