Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)

Korean Tribology Society (한국트라이볼로지학회)
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Mechanical Property Evaluation of Diamond-like Carbon Coated by PE-CVD

PE-CVD방법을 이용한 DLC 박막의 기계적특성 평가

  • Kang Seog Ju (Graduate School, Department of Mechanical Engineering, Kyungpook National University) ;
  • Yi Jin-Woo (Graduate School, Department of Mechanical Engineering, Kyungpook National University) ;
  • Kim Seock Sam (Department of Mechanical Engineering, Kyungpook National University)
  • 강석주 (경북대학교 대학원 기계공학과) ;
  • 이진우 (경북대학교 대학원 기계공학과) ;
  • 김석삼 (경북대학교 기계공학부)
  • Published : 2003.11.01
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Abstract

In this research, DLC thin films are produced as several hundred nm thickness by PE-CVD method. And then these thin films are estimated tribological characteristics to find out useful possibilities as a protecting film for high-quality function and life extension at MEMs by mechanical properties observation . These are measured thickness and residual stress of DLC coating. Compared after measuring friction coefficient, adhesion force, hardness, cohesive force of coating films. As results all test, we can decide several conclusions. First, friction coefficient decreased, as the load increased. otherwise, friction coefficient increased, as thickness of coating film increased under low load$(1\~50mN)$. Secod, adhesion force increased as thickness of coating films. Third, hardness of coating film is affected by substrate coating film when it is less than thickness of 300nm and it has general hardness of DLC coating film when it is more than thickness of 500nm. Fourth, cohesive force of coating film is complexly affected by hardness, adhesion force, residual stress, etc.

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