• Title/Summary/Keyword: Coating Method

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PEMOCVD of Ti(C,N) Thin Films on D2 Steel and Si(100) Substrates at Low Growth Temperatures

  • Kim, Myung-Chan;Heo, Cheol-Ho;Boo, Jin-Hyo;Cho,Yong-Ki;Han, Jeon-Geon
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.211-211
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    • 1999
  • Titanium nitride (TiN) thin films have useful properties including high hardness, good electrical conductivity, high melting point, and chemical inertness. The applications have included wear-resistant hard coatings on machine tools and bearings, decorative coating making use of the golden color, thermal control coatings for widows, and erosion resistant coatings for spacecraft plasma probes. For all these applications as feature sizes shrink and aspect ratios grow, the issue of good step coverage becomes increasingly important. It is therefore essential to manufacture conformal coatings of TiN. The growth of TiN thin films by chemical vapor deposition (CVD) is of great interest for achieving conformal deposition. The most widely used precursor for TiN is TiCl4 and NH3. However, chlorine impurity in the as-grown films and relatively high deposition temperature (>$600^{\circ}C$) are considered major drawbacks from actual device fabrication. To overcome these problems, recently, MOCVD processes including plasma assisted have been suggested. In this study, therefore, we have doposited Ti(C, N) thin films on Si(100) and D2 steel substrates in the temperature range of 150-30$0^{\circ}C$ using tetrakis diethylamido titanium (TDEAT) and titanium isopropoxide (TIP) by pulsed DC plamsa enhanced metal-organic chemical vapor deposition (PEMOCVD) method. Polycrystalline Ti(C, N) thin films were successfully grown on either D2 steel or Si(100) surfaces at temperature as low as 15$0^{\circ}C$. Compositions of the as-grown films were determined with XPS and RBS. From XPS analysis, thin films of Ti(C, N) with low oxygen concentration were obtained. RBS data were also confirmed the changes of stoichiometry and microhardness of our films. Radical formation and ionization behaviors in plasma are analyzed by optical emission spectroscopy (OES) at various pulsed bias and gases conditions. H2 and He+H2 gases are used as carrier gases to compare plasma parameter and the effect of N2 and NH3 gases as reactive gas is also evaluated in reduction of C content of the films. In this study, we fond that He and H2 mixture gas is very effective in enhancing ionization of radicals, especially N resulting is high hardness. The higher hardness of film is obtained to be ca. 1700 HK 0.01 but it depends on gas species and bias voltage. The proper process is evident for H and N2 gas atmosphere and bias voltage of 600V. However, NH3 gas highly reduces formation of CN radical, thereby decreasing C content of Ti(C, N) thin films in a great deal. Compared to PVD TiN films, the Ti(C, N) film grown by PEMOCVD has very good conformability; the step coverage exceeds 85% with an aspect ratio of more than 3.

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Effect of processing parameters on TiO2 film by room temperature granule spray in vacuum (상온진공과립분사에 의한 TiO2 코팅층에 미치는 공정변수의 영향)

  • Kim, Han-Gil;Park, Yoon-Soo;Bang, Kook-Soo;Park, Dong-Soo;Park, Chan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.1
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    • pp.22-27
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    • 2017
  • $TiO_2$ films, thickness of $1{\sim}30{\mu}m$ were deposited on glass substrate at room temperature by room temperature granule spray in vacuum. The starting powder was calcinated at $600^{\circ}C$ for 4 h using $Al_2O_3$ crucible in the furnace. The particle size of the $TiO_2$, $1.5{\mu}m$ was measured by a particle size analyzer. The effect of different process parameters such as number of pass, gas flow rate and feeder voltage was studied. As the number of passes increased, the film thickness increased proportionally due to adequate kinetic energy conserved. The effect of three different flow rates (i.e. 15, 25, and 35 LPM) on deposited film was investigated. As gas flow rate increased, the film thickness increased up to 25 LPM and then decreased. Higher feeder voltage with low flow rate of 15 LPM resulted in unsufficient coating thickness due to insufficient kinetic energy. Microstructure of $TiO_2$ films was investigated by scanning electron microscope and high resolution tramission electron microscope.

Material Performance Evaluation of PolyUrea for Structural Seismic Retrofitting (구조물 내진 보강용 폴리우레아의 재료 성능 평가)

  • Cho, Chul-Min;Choi, Ji-Hun;Rhee, Seung-Hoon;Kim, Tae-Kyun;Kim, Jang-Ho Jay
    • Journal of the Korea Concrete Institute
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    • v.29 no.2
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    • pp.131-139
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    • 2017
  • Recently, earthquakes have frequently occurred near Korean peninsula. An experimental study is needed for developing a reinforcing method for seismic strengthening to apply to RC structures. Recently, PolyUrea (PU) as structural reinforcement materials has been receiving great interest from construction industry. The reinforcing effect of PU appeared to be excellent under blast and impact as well as earthquakes. In this study, Flexible Type PolyUrea (FTPU) developed in preceding studies was modified to develop Stiff Type PolyUrea (STPU) by varying the ratio of the components of prepolymer and hardener of FTPU. The material performance evaluation has been performed through hardening time, tensile strength and percent elongation test, pull-off test, and shore hardness test. The experimental results showed that STPU has higher tensile strength and lower elongation than FTPU. Therefore, STPU coating agent can be used for semi-permanent products. By using STPU with Fiber-Reinforced Polymer (FRP) on concrete columns, confinement effect can be enhanced to maximize seismic strength and ductility.

An Experimental Study on the Development of Electromagnetic Shielding Concrete Wall for Shielding High-altitude Electromagnetic Pulse (HEMP) (고고도 전자기파(HEMP)차폐를 위한 전자파 차폐 콘크리트 벽체 개발에 관한 실험적 연구)

  • Choi, Hyun-Jun;Kim, Hyung-Chul;Lim, Sang-Woo;Lee, Han-Seung
    • Journal of the Korea Concrete Institute
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    • v.29 no.2
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    • pp.169-177
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    • 2017
  • Rather than causing damage from heat, blast, and radiation of a regular nuclear weapon, recently, it is predicted that North Korea has been inventing high altitude electromagnetic pulse (HEMP) missile in order to incapacitate electronic equipment. HEMP shielding facility is used for military purpose today. Despite the electromagnetic shielding effects from high quality compression plates, problems may include such as the possibility of electromagnetic influx resulting in the welding of the compression plates, and difficulties and high cost of construction. Therefore, in this study, a high electrical conducting material was added to the concrete experimental subject to ensure the shielding effect through electromagnetic waves to for the concrete structure, instead of building a shielding facility separately for the structure. Also, among the experimental subjects, 100 ${\mu}m$ of Iron-Aluminum alloy metal spraying coat was applied to two types with the highest shielding effect, and to two types with the lowest shielding effect. The result of the experiment indicates that experimental subjects added with a high electrical conductivity material did not meet the minimum shielding criteria of MIL-STD-118-125-1 standard, but all the experimental material applied to the metal spraying coating satisfied the minimum shielding criteria. In conclusion, it is considered that 100 µm of Iron-Aluminum alloy metal spraying coat contains high efficiency in the HEMP shielding.

BONE RESPONSE OF TWO DIFFERENT SURFACE TITANIUM SUBPERIOSTEAL IMPLANTS - ANODIZED SURFACE, IBAD HA COATING SURFACE (티타늄 임플랜트의 두 가지 표면처리방식에 대한 골반응 - 양극 산화표면, IBAD HA 코팅 표면)

  • Lee, In-Ku;Suh, Kyu-Won;Choi, Joon-Eon;Jung, Sung-Min;Ryu, Jae-Jun
    • The Journal of Korean Academy of Prosthodontics
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    • v.45 no.1
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    • pp.131-143
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    • 2007
  • Statement of the problem: In case of poor bone quality or immediately loaded implant, various strategies have been developed focusing on the surface of materials to improve direct implant fixation to the bone. The microscopic properties of implant surfaces play a major role in the osseous healing of dental implant. Purpose of study: This study was undertaken to evaluate bone response of ion beam-assisted deposition(IBAD) of hydroxyapatite(HA) on the anodized surface of subperiosteal titanium implants. Material and methods: Two half doughnut shape subperiosteal titanium implants were made. The control group was treated with Anodized surface treatment and the test group was treated with IBAD of HA on control surface. Then two implants inserted together into the subperiosteum of the skull of 30 rats and histological response around implant was observed under LM(light microscope) and TEM(transmission electron microscope) on 4th, 6th and 8th week. Results: Many subperiosteal implants were fixed with fibrous connective tissue not with bony tissue because of weak primary stability. The control group observed poor bone response and there was no significant change at any observation time. However the test group showed advanced bone formation and showed direct bone to implant contact under LM on 8th week. The test group observed much rER in the cell of osteoblast but the control group showed little rER under TEM. Conclusions: The test group showed better bone formation than the control group at the condition of weak primary stability. With these results IBAD surface treatment method on Anodized surface, may be good effect at the condition of weak primary stability.

A Numerical Study on Dynamic Characteristics of Counter-Rotating Rigid/Deformable Rolls in Press Contact (압착되어 회전하는 강체/변형 롤의 동적 특성에 관한 수치해석 연구)

  • Lee, Moon-Kyu;Lee, Sang-Hyuk;Hur, Nahm-Keon;Seo, Young-Jin;Kim, In-Cheol;Lee, Sung-Jin
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.35 no.8
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    • pp.869-876
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    • 2011
  • It is important to analyze the dynamic behavior of counter-rotating rigid/deformable rolls in the roll-coating process, because the stability of the process is affected by the dynamic characteristics. In the present study, the effects of material property, angular velocity, and gap size on the contact pressure and contact shape of the deformable roll are numerically investigated. The behavior of two rolls with a negative gap was analyzed using the finite element method, and the material property of the deformable roll was applied with the Mooney-Rivlin coefficients of the hyper-elastic model. The contact shape is affected by the gap size, and the contact pressure mainly depends on the stiffness of the deformable roll and the gap size. To maintain a negative gap between two rolls, controls such as load and displacement controls must be used. The results indicate that displacement control can reduce the instability.

A Study in Preparation of $^{113m}In$ colloid as Scanning Agent and it's Organ Distribution in Rats (주사용(走査用) $^{113m}In$ 교질(膠質)의 조제(調製) 및 흰쥐에서의 장기분포(臟器分布)에 관(關)한 연구(硏究))

  • Koh, Chang-Soon;Rhee, Chong-Heon;Chang, Ko-Chang;Hong, Chang-Gi D.
    • The Korean Journal of Nuclear Medicine
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    • v.3 no.1
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    • pp.73-82
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    • 1969
  • The newly developed diagnostic method with application of $^{113}Sn-^{113m}In$ cow system ($^{113}Sn:\;T\frac{1}{2}$ 118 days, $^{113m}In:\;T\frac{1}{2}$ 1.7 hrs, 390 Kev, Single ${\gamma}$) has the remarkable advantages such as increased diagnostic ability by single large dose administration of $^{113m}In$ with no subsequent radiation hazard and shortened examining time. We reformed the research of following scope with the use of developed $^{113}Sn-^{113m}In$ cow (25 mCi) generator: The sizes of particles produced under various conditions were investigated, and possibility for application to the scannings of various organs such as brain, liver, lung, bone marrow and blood pool etc. were studied. Results: $^{113m}InCl_3$ solution eluted from diluted HCl solution (pH 1.5) passed through $^{113}Sn-^{113m}In$ generator, and there can be produced various sized particles of colloidal indium. And there observed the state of distribution of $^{113m}In$ in each organ which showed many differences according to the particle sizes of colloidal indium. The results are stated as follows: 1. The adjustment of pH is the most important factor in making the desirable particle size of colloidal indium. The colloid for blood pool showed the highest level as 7.1%/gm blood, at pH 1.7, the colloid of pH 3.5 for liver scanning showed the highest level, 88.4%, in the liver, the colloid pH 6 showed the highest level, 3.1%, in the spleen, and the colloid of pH 11.0 showed the highest level, 85.3%/gm, in the lung. 2. The colloid for liver scanning made with NaCl-NaOH system showed the highest liver uptake at pH 7.2, and at either higher or lower pH than 7.2 showed decrease of liver uptake more or less. 3. The activity of $^{113m}In$ eluted through $^{113}Sn-^{113m}In$ generator indicated over 90% in the initial 4 ml, and particularly 88.1%-86.0% in the initial 2 ml. 4. The incubation time, tempertaure and mechanical irritation related to colloid formation and coating of colloid were not the definite condition of influence.

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Relationship between Halitosis and Gastric Fever Analysed by Questionnaire Cold-Heat Patternization (구취의 한열변증 분석: 구취는 위열증으로 발생하는가?)

  • Lee, Seon-Young;Kim, So-Yeon;Hur, Won-Young;Eom, Guk-Hyeon;Kim, Hyun-Kyung;Lee, Joon-Suk;Yoon, Sang-Hyub;Ryu, Bong-Ha;Kim, Jin-Sung
    • The Journal of Internal Korean Medicine
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    • v.27 no.2
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    • pp.500-509
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    • 2006
  • Objectives: We performed this study to check the effect of Cold-Heat attribute analyzed quantitatively by questionnaire on halitosis patient. Methods: We made a questionnaire composed of 15 items(6 categories) about the contents of Cold-Heat and asked 105 subjects to answer in the form Likert-like seven-points score. And then, we extracted Cold-Heat attribute from 15 items, 6 categories, 6 weighted categories, heat score and cold score. On the other hand we measured the halimeter measurements. VAS, winkle tongue coating index. Afterward, the data were analyzed by statistical methods. Results:1) In the 15 items, question number 6, 7, 8 is negative correlated with halimeter measurements. Question number10 is positive correlated with halimeter measurements. And question number 11, 12, 14 is positive correlated with VAS. 2) In the 6 categories, constipation is negative correlated with halimeter measurements. Chill is positive correlated with VAS. And Cold-limbs is positive correlated with halimeter measurements. 3) In the 6 weighted score categories, constipation is negative correlated with halimeter measurements. Chill is positive correlated with VAS. And Cold-limbs is positive correlated with halimeter measurements. Conclusions: Further clinical research is necessary in the development of the questionnaire's items. And to get the better of this study, we should research more analytic method made casual relationship clear between Cold-Heat attributes and the index of halitosis.

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Avoidance of Internal Resonances in Hemispherical Resonator Assemblies from Fused Quartz Connected by Indium Solder

  • Sarapuloff, Sergii A.;Rhee, Huinam;Park, Sang-Jin
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2013.04a
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    • pp.835-841
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    • 2013
  • Modern solid-state gyroscopes (HRG) with hemispherical resonators from high-purity quartz glass and special surface superfinishing and ultrathin gold coating become the best instruments for precise-grade inertial reference units (IRU) targeting long-term space missions. Designing of these sensors could be a notable contribution into development of Korea as a space nation. In participial, 40mm diameter thin-shell resonator from high-purity fused quartz, fabricated as a single-piece with its supporting stem has been designed, machined, etched, tuned, tested, and delivered by STM Co. (ATS of Ukraine) several years ago; an extremely-high Q-factor (upto 10~20 millions) has been shown. Understanding of the best way how to match such a unique sensor with inner glass assembly of the gyro means how to use the high potential in a maximal extent; and this has become the urgent task. Inner quartz glass assembly has a very thin indium (In) layer soldered the resonator and its silica base (case), but effects of internal resonances between operational modal pair of the shell-cup and its side (parasitic) modes can notable degrade the potential of the sensor as a whole, instead of so low level of resonator's intrinsic losses. Unfortunately, there are special combinations of dimensions of the parts (so-called, "resonant sizes"), when intensive losses of energy occurs. The authors proposed to use the length of stem's fixture as an additional design parameter to avoid such cases. So-called, a cyclic scheme of finite element method (FEM) and ANSYS software were employed to estimate different combinations of gyro assembly parameters. This variant has no mismatches of numerical origin due to FEM's discrete mesh. The optimum length and dangerous "resonant lengths" have been found. The special attention has been paid to analyses of 3D effects in a cup-stem transient zone, including determination of a difference between the positions of geometrical Pole of the resonant hemisphere and of its "dynamical Pole", i.e., its real zone of oscillation node. Boundary effects between the shell (cup) and 3D short "beams" (inner and outer stems) have been ranged. The results of the numerical experiments have been compared with the classic model of a quasi-hemispherical shell band with inextensional midsurface, and the solution using Rayleigh's functions of the $1^{st}$ and $2^{nd}$ kinds. To guarantee the truth of the recommended sizes to a designer of the real device, the analytical and FEM results have been compared with experimental data for a party of real resonators. The consistency of the results obtained by different means has been shown with errors less than 5%. The results notably differ from the data published earlier by different researchers.

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Preparation of Fe4[Fe(CN)6]3 Coated on Mica or TiO2/Mica for Infrared Reflective Blue Pigments and Isolation-heat Properties of These Paints (Fe4[Fe(CN)6]3가 코팅된 Mica 또는 TiO2/Mica 적외선 반사용 청색안료 제조 및 이 도료의 차열 특성 평가)

  • Jung, Ha-Young;Kim, Dae Sung;Lee, Hyun-Jin;Lee, Seung-Ho;Lim, Hyung Mi;Choi, Byung-Ki;Kang, Kwang-Jung;Choi, Jin-Sub
    • Korean Journal of Materials Research
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    • v.23 no.12
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    • pp.672-679
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    • 2013
  • $Fe_4[Fe(CN)_6]_3$ coated on a mica or $TiO_2$/mica surface as infrared reflective blue pigment was prepared by a hydrothermal method. $Fe_4[Fe(CN)_6]_3$, used as coloring agent, was uniformly coated on mica or $TiO_2$/mica under the optimized condition of a 1.2 : 1 weight ratio between iron(III) chloride hexahydrate and potassium ferrocyanidetrihydrate at the initial pH level of 4.5 at $70^{\circ}C$. The infrared (IR)-reflective pigments were characterized by SEM, Zeta-potenial, FT-IR, and UV-VIS NIR spectrophotometry. Especially the CIE color coordinate and total solar reflectance(TSR) properties of the pigments were investigated in relation to variation of the coating and coated substrate thicknesses. Isolation-heat paint was prepared with 20 wt% blue pigments fully dispersed in acryl-urethane resin and several additives to coat the film uniformly. The films were also measured with CIE color coordinate, TSR, and the surface temperature was recorded by an isolation-heat measuring system. The pigments and films of $Fe_4[Fe(CN)_6]_3$ coated on mica and $TiO_2$/mica showed high TSR values compared with the TSR value of $Fe_4[Fe(CN)_6]_3$ itself. According to the increase of TSR value, the property of isolation-heat is effective. To realize the optimal blue color, we applied the the pigment to $TiO_2$ coated mica(TM(b)) which has blueish interference color. The pigment of $Fe_4[Fe(CN)_6]_3$ coated on TM(b) shows a strong blue color compared with that of $Fe_4[Fe(CN)_6]_3$ coated on $TiO_2$/Mmca(TM(w)), which has a whitish interference color.